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Conference Presentations (Abstract Only)

   CP-1     H.I. Smith, “The Fabrication of Microsound Components”, IEEE International Conv. Digest, p. 90-91 (1969).  (Report MS-2457; ESD-TR-70-88).

   CP-2     R.C. Williamson and H.I. Smith, “The Reflection of Elastic Surface Waves from Periodic Arrays on YX LiNbO3”, IEEE Ultrasonics Symposium, Miami, FL, December 6-8, 197l.

   CP-3     R.C. Williamson and H.I. Smith, “Large Time Bandwidth Product Surface Wave Pulse Compressor Employing Reflective Gratings”, Ultrasonics Symposium, Boston, MA, October 4-7, 1972.

   CP-4     D.L. Spears and H.I. Smith, “High Frequency Surface Wave Transducers Fabricated by X-ray Lithography”, IEEE Ultrasonics Symposium, Boston, MA, October 6, 1972.

   CP-5     H.I. Smith, J. Melngailis, R.C. Williamson, and W.T. Brogan, “Ion Beam Etching of Surface Gratings”, J. Vac. Sci. Technol. 10, 1127 (1973).

   CP-6     H.I. Smith, “X-ray and Optical Replication of Electron Beam Generated Masks”, IEEE Digests of the Intermag. Conference, Toronto, Canada, May 14-17, 1974.  Also, IEEE Boston Section of Sonics & Ultrasonics, February 5, 1974.

   CP-7     S.E. Bernacki and H.I. Smith, “X-ray Lithography Applied to Silicon Device Fabrication”, Electrochemical Society Meeting, San Francisco, CA, May 12-17, 1974.

   CP-8     R.J. Hawryluk, A. Soares, H.I. Smith, and A.M. Hawryluk, “Experimental Evaluation of Electron Scattering Models”, Electrochemical Society Meeting, San Francisco, CA, May 12-17, 1974.

   CP-9     D.C. Flanders, H.I. Smith, and S.E. Bernacki, “X-ray Lithographic Replication of 1000Å Linewidth Patterns using CuL Radiation”, Electrochemical Society Spring Meeting, Washington, DC, May 2-7, 1976.

CP-10     D.C. Flanders and H.I. Smith, “X-ray Lithographic and Processing Technologies for Fabricating Surface Relief Gratings with Profile Control < 400Å”, 14th Symposium on Electron, Ion & Photon Beam Technol., Palo Alto, CA, May 27, 1977.

CP-11     D.C. Flanders, D.C. Shaver, and H.I. Smith, “Submicrometer Spatial-Period Surface-Relief Gratings for Orienting Crystalline Overlayers”, 8th International Conference Electron & Ion Beam Science & Technology, Seattle, WA, May 1978.

CP-12     H.I. Smith, D.C. Flanders, and M.W. Geis, “Fabrication and Application of Submicrometer Structures”, Dry Etching Seminar, Danvers, MA, October 1978.  (Invited)

CP-13     H.I. Smith and D.C. Flanders, “X-ray Lithography – A Review and Assessment of Future Applications”, Semicon East, Boston, MA, September 1979.  H.I. Smith and D.C. Flanders, “X‑ray Lithography – A Review and Assessment of Future Applications”, Semicon East, Boston, MA, October 1979.  (Invited)

CP-14     H.I. Smith and D.C. Flanders, “X-ray Lithography – A Review and Assessment of Future Applications”, 26th National Vacuum Symposium, New York, NY, October 1979.  (Invited)

CP-15     M.W. Geis, D.A. Antoniadis, D.C. Flanders, and H.I. Smith, “Crystallographic and Electrical Properties of Silicon Produced by Graphoepitaxy”, Mat. Res. Soc., Boston, MA, November 26-30, 1979.

CP-16     H.I. Smith, “Artificial Microstructure Research and Its Impact on Future Integrated Circuits”, Conference on Advanced Research in Integrated Circuits, MIT, Cambridge, MA, January 1980. (Invited)

CP-17     H.I. Smith, “Microfabrication for Guided-Wave Optical Devices”, Topical Meeting on Integrated and Guided-Wave Optics, Incline Village, NV, January 1980.  Integrated and Guided Wave Optics Technical Digest, IEEE (1980).  (Invited)

CP-18     H.I. Smith, “Microlithography and New Materials for VLSI”, Workshop on Microprocessors in Military and Industrial Systems, Johns Hopkins University, MD, January 15-16, 1980.  (Invited)

CP-19     H.I. Smith and D.C. Flanders, “A Review of X-ray Lithography”, Electrochemical Society Meeting, May 1980.

CP-20     H.I. Smith, “Graphoepitaxy of Silicon on Amorphous Substrates”, March Meeting of the American Physical Society, New York, NY, (1980).  (Invited)

CP-21     P.F. Liao and J.G. Bergman, “Surface Enhanced Raman Spectroscopy on Lithographically Produced Silver Microstructures”, Annual Meeting of the Optical Society, Chicago, IL, October 1980.  Abstract in J. Opt. Soc. Amer.

CP-22     H.I. Smith, “Submicrometer Structures Technology”, Symposium uber Mikrostrukturforschung, Institut fur Halbleitertechnik, Aachen, FRG, March 5-6, 1981. (Invited)

CP-23     H.I. Smith, “Review of Conventional Submicrometer Fabrication Techniques”, Workshop on the Interaction of Laser Radiation with Surfaces for Application to Microelectronics, MIT, Cambridge, MA, May 4-5, 1981.  (Invited)

CP-24     M.W. Geis, D.J. Silversmith, J.C.C. Fan, B.Y. Tsaur, H.I. Smith and D.A. Antoniadis, “Preparation of Oriented Silicon Films on Insulating Amorphous Substrates”, Electronic Materials Conference, Santa Barbara, CA, June 24-26, 1981.

CP-25     S.S. Dana and H.I. Smith, “Studies of Graphoepitaxy by CVD and Solution Growth”, 5th International Conference on Vapor Growth and Epitaxy/5th American Conference on Crystal Growth, Coronado, CA, July 19-24, 1981; A.L. Gentile, Conference Secretariat.

CP-26     R. Tatchyn, I. Lindau, M. Hecht, E. Kallne, E. Spiller, R. Bartlett, J. Kallne, J.H. Dijkstra, A.M. Hawryluk, and R.Z. Bachrach, “The First use of Transmission Gratings for Measurements of Optical Constants in the Soft X-ray Range”, presented at Cornell Synchrotron Meeting, July 1981.  (To be published, Nuclear Instruments and Methods).

CP-27     N.M. Ceglio, M. Roth, and A.M. Hawryluk, “Time Resolved X-ray Spectra from Laser Fusion Plasmas”, Bulletin American Physical Society, October 1981.

CP-28     M.W. Geis, H.I. Smith, B.Y. Tsaur, and J.C.C. Fan, “Crystallographic Characteristics of Si Films Recrystallized by Zone Melting”, Materials Research Society Conference, Boston, MA, November 1981.

CP-29     N.M. Ceglio, A.M. Hawryluk, and R.H. Price, “Space & Time Resolved Soft X-ray Spectra using X-ray Transmission Gratings”, Brookhaven Conference on High Resolution Soft X-ray Optics, SPIE, E. Spiller, Chairman, November 16-20, 1981.

CP-30     R.F. Kwasnick, M.A. Kastner, and J. Melngailis, “Electronic Conduction in Ultra-Narrow Silicon Inversion Layers”, post-deadline poster presented at March Meeting of the American Physical Society (1982).

CP-31     M.W. Geis, H.I. Smith, B.-Y. Tsaur, J.C.C. Fan, D.J. Silversmith, and R.W. Mountain, “Control of Subboundaries in Zone-Melted Recrystallized Si Films”, presented at 24th Electronics Materials Conference, Colorado State University, Fort Collins, CO, June 23-25, 1982.

CP-32     C.V. Thompson, “Graphoepitaxy”, Gordon Research Conference on Crystal Growth, NH, July 12-16, 1982.

CP-33     M.W. Geis, H.I. Smith, B.-Y. Tsaur, J.C.C. Fan, D.J. Silversmith, and R.W. Mountain, “Entrainment of Subboundaries in Zone-Melting Recrystallized Si Films”, SOS/SOI Technology Workshop, Provincetown, MA, October 5-7, 1982.

CP-34     M.W. Geis, H.I. Smith, B.-Y. Tsaur, J.C.C. Fan, D.J. Silversmith, and R.W. Mountain, “Entrainment of Subboundaries in Zone-Melted Recrystallized Si Films”, Materials Research Symposium, Boston, MA, November 1, 1982.

CP-35     R.J. Hawryluk, G.L. Schmidt, R.J. Fonck, R.J. Goldston, T. McBride, D. McCune, and A.M. Hawryluk, “Contribution of Fast Charge Exchange Neutrals to Bolometric Measurements on PDX”, 24th Annual Meeting Division of Plasma Physics, November 1-5, 1982.

CP-36     R.F. Kwasnick, M.A. Kastner, and J. Melngailis, “Electronic Conduction in Ultra-Narrow Si Inversion Layers”, presented at March Meeting of the American Physical Society, Bulletin American Physical Society 28, 322 (1983).

CP-37     A.C. Warren, D.A. Antoniadis, J. Melngailis, and H.I. Smith, “Submicrometer-Period Channel Modulation of a MOSFET”, presented at the International Symposium on Electron, Ion and Photon Beams, Los Angeles, CA, May 31 – June 3, 1983.

CP-38     M.L. Schattenburg, C.R. Canizares, H.I. Smith, and A.M. Hawryluk, “Submicrometer-Period Transmission Diffraction Gratings for X-ray Astronomy”, presented at the International Symposium on Electron, Ion and Photon Beams, Los Angeles, CA, May 31 – June 3, 1983.

CP-39     E.H. Anderson and H.I. Smith, “TEM Analysis of Vertical-Slab Cross Section of Submicrometer Structures”, presented at the International Symposium on Electron, Ion and Photon Beams, Los Angeles, CA, May 31 – June 3, 1983.

CP-40     H.A. Atwater, C.V. Thompson, H.I. Smith, and M.W. Geis, “Orientation Filtering by Growth Velocity Competition in Zone-Melting Recrystallization of Si on SiO2”, Electronic Materials Conference, Burlington, VT, June 23-25, 1983.

CP-41     C.V. Thompson and H.I. Smith, “Silicon-on-Insulator by Solid State Surface-Energy-Driven Secondary Recrystallization”, Electronic Materials Conference, Burlington, VT, June 1983.

CP-42     H.I. Smith, “Graphoepitaxy to Circumvent Lattice Matching Constraints”, 4th International Conference on Integrated Optics and Optical Fiber Communication (Post-Conference Meeting), Tokyo, Japan, July 2, 1983.  (Invited)

CP-43     H.I. Smith, “Graphoepitaxy and Zone-Melting Recrystallization of Patterned Films”, 7th International Conference on Crystal Growth, Stuttgart, FRG, September 12-16, 1983.  (Invited)

CP-44     C.V. Thompson and H.I. Smith, “Silicon-on-Insulator by Surface-Energy-Driven Secondary Recrystallization with Patterning”, 7th International Conference on Crystal Growth, Stuttgart, FRG, September 12-16, 1983.

CP-45     M.W. Geis, H.I. Smith, C.K. Chen, B.-Y. Tsaur, R.W. Mountain, and D.J. Silversmith, “Subboundary Entrainment in Strip-Heater Recrystallized Si Films”, Materials Research Society Spring Meeting, Albuquerque, NM, February 27-29, 1984.

CP-46     T. Yonehara, H.I. Smith, C.V. Thompson, and J.E. Palmer, “Graphoepitaxy of Ge by Solid-State Surface-Energy-Driven Secondary Grain Growth”, 6th American Conference on Crystal Growth and 6th International Conference on Vapor Growth and Epitaxy, Atlantic City, NJ, July 15-20, 1984.

CP-47     C.V. Thompson, “Secondary Grain Growth in Ultra-Thin (< 100 nm) Films of Silicon and Germanium”, Interface Migration and Control of Microstructure Symposium of the Annual American Society of Metals Congress, Detroit, MI, September 1984.  (Invited)

CP-48     G.G. Shahidi, E.P. Ippen, and J. Melngailis, “Submicron-gap High-Mobility Picosecond Photodetectors”, Topical Meeting on Picosecond Electronics and Optoelectronics, Lake Tahoe, NV, March 13-15, 1985.

CP-49     S.Y. Chou, D.A. Antoniadis, and H.I. Smith, “Observation of Velocity Overshoot in Deep Submicron (0.08 µm) Channel MOSFETS in Si”, 43rd Annual Device Research Conference, Boulder, CO, June 17-19, 1985.

CP-50     A.C. Warren, D.A. Antoniadis, H.I. Smith, and J. Melngailis, “One-Dimensional Conductivity in Multiple, Parallel Inversion Lines”, 43rd Annual Device Research Conference, Boulder, CO, June 17-19, 1985.

CP-51     A.C. Warren, D.A. Antoniadis, and H.I. Smith, “Modelling Quantum Confinement and Quasi-1D Conduction in the Silicon Grating-Gate FET”, presented at the Yamada Conference XIII on Electronic Properties of Two-Dimensional Systems, Kyoto, Japan, September 9-13, 1985.

CP-52     S.Y. Chou, H.I. Smith, and D.A. Antoniadis, “Drain Current Oscillations in Sub-100 nm Channel Si MOSFET’s Fabricated using X-ray Lithography”, 30th International Symposium on Electron, Ion and Photon Beams, Boston, MA, May 27-30, 1986.

CP-53     H.I. Smith, “X-ray Nanolithography for Sub-100 nm Devices”, American Physical Society Spring Meeting, New York, NY, March 17, 1987.  (Invited Paper)

CP-54     G.G. Shahidi, D.A. Antoniadis, and H.I. Smith, “Reduction of Hot-Electron Effects in Sub‑100 nm Channel Length Si MOSFETs”, presented 5th International Conference on Hot Carrier Effects, July 20-24, 1987, Boston, MA, Proc. to be published Pergamon Press.

CP-55     H.I. Smith, “Fabrication and Performance of Sub-100 nm Electronic Devices”, presented Workshop on Chemical Concepts for Ultrasmall Electronic Devices, Cambridge, MA, October 27-29, 1987.

CP-56     P.F. Bagwell and T.P. Orlando, “Conductance of Quasi-One-Dimensional Wires and Superlattices”, Bulletin American Physical Society 33, 366 (1988).

CP-57     S.L. Park, M.A. Kastner, S.B. Field, “Temperature Dependence of the Magnetoconductance in Narrow Inversion Layers”, Bulletin American Physical Society 33, 489 (1988).

CP-58     J. Scott-Thomas, M.A. Kastner, S.B. Field, D.A. Antoniadis, and H.I. Smith, “Conductance Measurements of a Novel 1-Dimensional MOSFET”, Bulletin American Physical Society 33, 489 (1988).

CP-59     H.A. Atwater, C.V. Thompson, and H.I. Smith, “Strain and Thin Film Grain Growth during Ion Bombardment”, Bulletin American Physical Society 33, 743 (1988).

CP-60     G.G. Shahidi, D.A. Antoniadis, and H.I. Smith, “Reduction of Hot-Electron-Generated Substrate Current in Sub-100 nm Channel Lengths Si MOSFETS”, Device Research Conference, Boulder, CO, June 1988.

CP-61     H.A. Atwater, C.V. Thompson, and H.J. Kim, “The Role of Point Defects in Ion Bombardment Enhanced Grain Growth and Dopant Enhanced”, IBMM 6th International Conference on Ion Beam Modification of Materials, The Jap Soc. of Appl. Phys. Tokyo, Japan, June 12-17, 1988.

CP-62     T.P. Orlando, P.F. Bagwell, H.I. Smith, and D.A. Antoniadis, “Quantum Mechanical Effects in Field-Effect Transistors with Nanostructured Geometries”, The Electrochemical Society Fall Meeting, Chicago, IL (1988).  (Invited).

CP-63     P.F. Bagwell and T.P. Orlando, “Finite Voltage Tunneling in Ballistic Devices”, presented at the March American Physical Society Meeting, St. Louis, MO.  Bulletin American Physical Society, 34, 502 (1989).

CP-64     H.I. Smith, “X-ray Lithography and Nanostructure Fabrication”, Meeting of the American Physical Society, St. Louis, MO, March 20-24, 1989.  (Invited).

CP-65     D.A. Antoniadis, “Surface Superlattice and Quasi-One-Dimensional Devices in GaAs”, Meeting of the American Physical Society, St. Louis, MO, March 20-24, 1989.  (Invited)

CP-66     C.T. Liu, K. Nakamura, D.C. Tsui, K. Ismail, D.A. Antoniadis, and H.I. Smith, “Far-Infrared and Magneto-Capacitance Measurements on GaAs/AlGaAs Lateral Surface Superlattice”, presented at American Physical Society Meeting, St. Louis, MO, March (1989).

CP-67     P.F. Bagwell, K. Ismail, R. Ghanbari, W. Chu, A. Yen, D.A. Antoniadis, H.I. Smith, and T.P. Orlando, “A Simple Explanation of Quantum Oscillations in the Conductance of Quasi One‑Dimensional and Superlattice HEMT Transistors”, presented at the 47th Device Research Conference, Boston, MA (1989).

CP-68     K. Ismail, D.A. Antoniadis, and H. I. Smith, “Fabrication Challenges of Surface-Structured Quantum-Effect Devices”, presented at Symposium on “New Phenomena in Microscopic Structures, Kona, Hawaii, December 6-9, 1989.

CP-69     P.F. Bagwell, A. Kumar, and T.P. Orlando, “Evanescent Modes and Scattering in Quasi-One-Dimensional Wires”, Bull. Am. Phys. Soc. 35, 493 (1990).

CP-70     T.P.E. Broekaert, P.F. Bagwell, T.P. Orlando, and C.G. Fonstad, “Resonant Tunneling Diodes and Transistors with a One, Two, or Three Dimensional Electron Emitter”, Bull. Am. Phys. Soc. 35, 298 (1990).

CP-71     C.T. Liu, D.C. Tsui, M. Shayegan, K. Ismail, D.A. Antoniadis, and H.I. Smith, “Observation of Landau Level Splitting in Magneto-Capacitance Measurements on GaAs/AlGaAs Two-Dimensional Surface Superlattice Structures”, Bull. Am. Phys. Soc. B 35, 597 (1990).

CP-72     U. Meirav, M.A. Kastner, M. Heiblum, and S.J. Wind, “Single Electron Charging and Conductance Oscillations in GaAs Nanostructures”, Bull. Am. Phys. Soc. 35, 721 (1990).

CP-73     J.H.F. Scott-Thomas, M.A. Kastner, S.B. Field, H.I. Smith, and D.A. Antoniadis, “Conductance Oscillations of 1-Dimensional Hole and Electron Gases”, Bull. Am. Phys. Soc. 35, 731 (1990).

CP-74     P.F. Bagwell, T.P. Orlando, and A. Kumar, “Low-Dimensional Resonant Tunneling”, presented at the NATO Advanced Research Workshop on Resonant Tunneling in Semiconductors:  Physics and Applications, El Escorial, Spain (1990).

CP-75     C.C. Eugster, J.A. del Alamo, and M.J. Rooks, “Ballistic Transport in a Novel Grated Quantum Wire”, presented at the 48th Annual Device Research Conference, Santa Barbara, CA, June 25-27, 1990.

CP-76     A. Kumar and P.F. Bagwell, “Resonant Tunneling in a Q1-Dimensional Wire”, presented at Techcon, October (1990).

CP-77     H.I. Smith, K. Ismail, and D.A. Antoniadis, “Investigations of Field-Effect-Controlled Mesoscopic Structures Fabricated with X-ray Nanolithography”, presented at the Advanced Heterostructure Transistors Conference, Kona, Hawaii, December (1990).

CP-78     M.W. Geis and H.I. Smith, “Production of Large-Area Mosaic Diamond Films Approaching Single-Crystal Quality”, ECS Fall Meeting, #179 Washington, DC (1990).

CP-79     S.L. Park, P.F. Bagwell, A. Yen, D.A. Antoniadis, H.I. Smith, T.P. Orlando, and M.A. Kastner, “Magnetotransport in Multiple Narrow Si Inversion Channels Opened Electrostatically Into a Two-Dimensional Electron Gas”, Bull. Am. Phys. Soc. 36, 360 (1991).

CP-80     P.F. Bagwell and A. Kumar, “Evolution of the Quantized Ballistic Conductance with Increasing Disorder in Narrow Wire Arrays”, Bull. Am. Phys. Soc. 36, 359 (1991).

CP-81     Y. Zhao, D.C. Tsui, S.J. Allen, K. Ismail, H.I. Smith, and D.A. Antoniadis, “Spectroscopy of 2‑Deg in a Grid Gate Patterned Heterostructure”, presented at March 18-26 Meeting of the American Physical Society, Cleveland, O, Bull. Am. Phys. Soc. (1991).

CP-82     M.L. Schattenburg, K. Li, R.T. Shin, J.A. Kong, and H.I. Smith, “Calculation of Soft X-ray Diffraction from Nanometer-Scale Gold Structures using a Finite-Element Time-Domain Method”, Progress in Electromagnetics Research Symposium, Cambridge, MA, July 1-5, (1991).

CP-83     G. Rittenhouse, H.I. Smith, J.M. Graybeal, B. Meyerson, “A Novel Structure for a Three-Terminal Superconducting Resonant Tunneling Device”, presented at March 18-26 Meeting of the American Physical Society, Cleveland, O, Bull. Am. Phys. Soc. (1991).

CP-84     C.C. Eugster, J.A. del Alamo, and M.J. Rooks, “Planar Field-Effect Coupled Quantum Wires”, Device Research Conf., Boulder, CO, June (1991).

CP-85     Y. Zhao, D.C. Tsui, M. Santos, M. Shayegan, R. Ghanbari, H.I. Smith, “Magneto-optical Absorption in a Two Dimensional Electron Grid”, Bull. Am. Phys. Soc. 37, 234 (1992).

CP-86     Y. Zhao, D.C. Tsui, K. Hirakawa, M. Santos, M. Shayegan, R. Ghanbari, D.A. Antoniadis, and H.I. Smith, “Far Infrared Magneto-Absorption by the 2 DEG in GaAs/AlGaAs Heterostructures with Grid Gates”, Amer. Phys. Soc., Indiannapolis, IN, March 16-20, 1992.

CP-87     C.R. Canizares, D. Dewey, E.B. Galton, T.H. Markert, H.I. Smith, M.L. Schattenburg, B.E. Woodgate, and S. Jordan, “The MIT Resolution X-ray Spectroscopy Instruments on AXAF”, presented at AIAA Space Programs & Technologies Conference, Huntsville, AL, March 24-27, 1992.

CP-88     H.I. Smith and D.A. Antoniadis, “Mesoscopic Devices:  Will they Supersede Transistors in ULSI?”, presented International Conference on Solid State Devices and Materials, Tsukuba, Japan, August 26-28, 1992.

CP-89     A. Kumar, “Electron States and Potentials in Quantum Dot Structures”, presented at Amer. Phys. Soc. Meeting (Symposium on Charging Effects in Quantum Dots), Indianapolis, ID American Physical Society Bull. 37, 429 (1992).

CP-90     H.I. Smith, “History of X-ray Lithography”, presented at Optcon ’92, Boston, MA, November 15-20, 1992.

CP-91     H.I. Smith and M.L. Schattenburg, “Proximity X-ray Nanolithography-Current Performance and Theoretical Limits, presented at the Amer. Vac. Society 39th National Symposium, Hyatt Regency, Chicago IL , November 9-13, 1992.

CP-92     C.O. Bozler, C.T. Harris, S.Rabe, D.D. Rathman, W.D. Goodhue, M.A. Hollis, and H.I. Smith, “Arrays of Gated Feild-Emitter Cones having 0.32 µm Tip-to-Tip Spacings”, presented 6th International Vac. Microelectronics Conference, Newport, R.I., July 12-15, 1993.

CP-93     C.O. Bozler, C.T. Harris, S.Rabe, D.D. Rathman, W.D. Goodhue, M.A. Hollis, and H.I. Smith, “Fabrication and Performance of Gated Field-Emitter Arrays having 0.32 µm Tip-to-Tip Spacings”, presented at the Electrochemical Society Meeting, New Orleans, LA, October 10-15, 1993.

CP-94     J.N. Damask, V.V. Wong, J. Ferrera, H.I. Smith, and H.A. Haus, “Optical Distributed-Feedback Channel-Dropping Filters:  Design and Fabrication”, LEOS ’93 6th Annual Meeting, San Jose, CA, November 15-18, 1993.  (Invited Paper)

CP-95     J.N. Damask, V.V. Wong, J. Ferrera, H.I. Smith, and H.A. Haus, “High-Coherence QWS Gratings for Optoelectronic Devices:  Why Spatial-Phase-Locked E-Beam Lithography is Necessary”, Fiber Communications Conference ’94, San Jose, CA, February 20-25, 1994.

CP-96     H.I. Smith, “X-ray Lithography: the Past and the Future”, Forum on X-ray Lithography, held at NTT, Japan, June 16-17, 1994 (Invited).

CP-97     J.N. Damask, V.V. Wong, J. Ferrera, H.I. Smith, and H.A. Haus, “Highly-Coherent Electron-Beam-Written Quarter-Wave-Shifted Distributed Bragg Resonators for Channel-Dropping Filters”, Optical Fiber Communications Conference ’95, San Diego, CA, February 26 – March 3, 1995.

CP-98     M. Burkhardt, D.J. Carter, D.A. Antoniadis, T.P. Orlando, Henry I. Smith and M.R. Melloch, “Coulomb BLockade Effects in Double Quantum Dots”, Meeting of The American Physical Society, San Jose, CA, March 20-24, 1995.

CP-99     I.Y. Yang, V.V. Wong, J.N. Damask, J. Ferrera, M.  Burkhardt, S. Silverman, D.A. Antoniadis, and H.I. Smith, “Sub-100nm Electronic, Optoelectronic, and Quantum-effect Device Fabrication”,  1995 International Workshop on X-ray and Extreme Ultraviolet Lithography, Osaka, Japan, July 23-26, 1995.

CP-100     H.I. Smith, “Lithographic Approaches and Their Limitations,” International Symposium on Future Information Processing Technologies, held at Haikko Manor Hotel,  Porvoo, Finland, Sept. 4-8, 1995.

CP-101     A. Franke and M.L. Schattenburg, “Super-smooth x-ray reflection grating technology,” High Throughput X-ray Spectroscopy Workshop, Cambridge, Massachusetts, September  30-October 1, 1996.

CP-102     M.H. Lim, M.L. Schattenburg, and H.I. Smith, “An Inverted X-Ray Mask Configuration Compatible with Pellicle Protection,” 1997 International Conference on Elect. Ion and Photon Beam Technology and Nanofabrication, Dana Point, CA.  May/June 1997.

CP-103     H.I. Smith, “Sub-100nm electronic devices and lithographic technologies-present and prospects for the next 15 years”, Japan Society for the Promotion of Science (JSPS), Kyoto, Japan, July 17, 1997.

CP-104     E.M. Koontz, G.S. Petrich, L.A. Kolodziejski, M.H. Lim, V.V. Wong, H.I. Smith, and M.S. Goorsky and K.M Matney,  “Overgrowth of InGaAsP Materials on Rectangular-Patterned Gratings using GSMBE,” Presented at the Ninth International Conference on InP and Related Materials, Hyannis, MA, May 11-15, 1997.

CP-105     G.D. U’Ren, K.M. Matney, M.S. Goorsky, M. Wormington, E.M. Koontz, M.H. Lim, V.V. Wong, G.S. Petrich, L.A. Kolodziejski, and H.I. Smith, “Triple  Axis Diffraction Studies of InGaAsP/InP Epitaxial Overgrowth Grating Structures”, Presented at the 46th Annual Denver x-ray Conference, Steamboat Springs, CO, August 4-8, 1997.

CP-106     G.D. U’Ren, M.S. Goorsky, K.M. Matney, E.M. Koontz, M.H. Lim, V.V. Wong, G.S. Petrich, L.A. Kolodziesjki, Henry I. Smith, and M. Wormington, “Analysis of Lattice Distortions in High Qualty InGaAsP Epitaxial Overgrowth of Rectangular-Patterned InP gratings”, Presented at the 16th North American Conference on Molecular Beam Epitaxy, Ann Arbor, MI, October 5-8, 1997.

CP-107     H.I. Smith, “Nanofabrication:  The role of feedback, templates, lithography and self organization”, Second Beckman/Hitachi/RIKEN International Workshop on Molecular & Electronic Nanostructures,  Hitachi Advanced Res. Lab., Hatoyama, Saitama, Japan, Nov. 13-14, 1997.

CP-108     E. Moon, P.N. Everett and H.I. Smith, “A Robust, Feedback-Stabilized, Sub-1nm Detectivity Mask-Alignment System”, Techcon ’98  Conference held in Alexis Park Resort, Las Vegas, Nevada, September 9-11, 1998.

CP-109     J. Ferrera, “Spatial-Phase-Locked E-beam Lithography”, Techcon ’98 Conference held in Alexis Park Resort, Las Vegas, Nevada, September 9-11, 1998.

CP-110     H.I. Smith, “Nanofabrication:  The role of feedback, templates, lithography and self organization”, Fifth International Symposium on Quantum Confinement 194th meeting of the Electrochemical Society, Boston, MA.  November 2-5, 1998.

CP-111     C.A. Ross, M. Farhoud, M. Hwang, H.I. Smith, “Fabrication of large area periodic magnet arrays using interferometric lithography”, APS March Meeting (1998).

CP-112     C.A. Ross and H.I. Smith, “Interferometric lithography and x-ray nanolithography for MRAM applications”, Proceedings of DARPA Spintronics Workshop, Minneapolis, July (1998).

CP-113     David Carter, “Sub-40 nm X-ray Lithography.”  Poster presented at the Gordon Research Conference on Nanostructure Fabrication, Tilton, NH, June 21-26, 1998.

CP-114     C.A. Ross and H.I. Smith, “Patterned magnetic recording  media”, abstract submitted to International MRS Conference, China, 1999

CP-115     D.J.D. Carter, “X-ray lithography in the Deep Sub-100 nm Regime” The 1998 International Workshop on Proximity X-Ray Lithography,  XEL ‘98, Yokohama, Japan, November 9-10, 1998

CP-116     C-C. Hsu, R.S. Indeck, A. jander, M.w. Muller, C.A. Ross, D.J. Twisselmann, “MFM Observation of Magnetization Reversal Process in Recording Media with Lithographically Defined Texture”, submitted to the MMM conference, November 1999.

CP-117     K. Murooka, M. H. Lim, J. Ferrera, and Henry I. Smith, “X-ray lithography below 100 nm:  An approach to eliminating distortion”, XEL 1999, Yokohama, Japan, November 1999.

CP-118     M. J. Khan, M. Lim, C. Joyner, t. Murphy, A. Haus, Henry I. Smith, “Integrated Bragg Grating  Structures”, 2001 IEEE/LEOS Summer Topical Meetings, Copper  Mountain Resort, Copper Mountain, Colorado, 30 July – 1 August, 2001.

CP-119     D. J. D  Carter, D. Gil, R. Menon, X. Tang, H.I. Smith, “Functional Prototype Maskless Zone-Plate-Lithography (ZPAL) System”, Opt. Soc. Amer.,  Long Beach, CA. October 15-17, 2001.

CP-120     D. Gil, R. Menon, M. Peuker, D.J.D. Carter, X. Tang, and H.I. Smith, “High Numerical-Aperture UV Fresnel Phase Zone Plates for Lithography and Imaging”, Opt. Soc. Amer., Long Beach, CA.  October 15-17, 2001.

CP-121     E. Lavallee, J. Beauvais, D. Drouin, M. Cloutier, L. K. Mun, Y. Awad, Henry I. Smith, M. H. Lim, J. Carter, M. Schattenburg, “Evaporated electron beam sensitive organic resist for the back-patterning of x-ray lithography masks”, to be presented at NNC in Yokohama, Japan.

CP-122     D. Mascaro, J. Zartman, Henry I. Smith, V. Bulovic, “Forming Oriented Organic Crystal Needles by Solvent Vapor Annealing of Amorphous Thin Film On Nano-Patterned Substrates”, Submitted to the Organic and Polymeric Materials and Devices” symposium at the Spring 2003 MRS Meeting.

CP-123     Henry I. Smith, “Templated Self Assembly:  The Role of Nanolithography in the Nanotechnology revolution”, CMSE Colloquium Series, Fall 2002.

CP-124     J. Todd Hastings, Mark L. Schattenburg, Paul Konkola, Euclid E. Moon and Henry I. Smith, “Nanoaccuracy:  an Essential Element of Nanotechnology”, Japan-US Symposium on Tools and Metrology for NanoTechnology, Cornell University, 21-24, January, 2003.

CP-125     C.A. Ross, J.Y. Cheng, Henry I. Smith, E.L. Thomas and G. Vancso, “Magnetic Nanostructures made by self-assembled block copolymer lithography”, AVS 2003 Meeting, November 2-7, 2003, Baltimore Convention Center, Baltimore, Maryland.

CP-126     T. Barwicz, H. Haus, Henry I. Smith, “A three-dimensional analysis of scattering losses due to sidewall roughness in integrated optical waveguides”, Presented at the Conference on Lasers and Electro-optics (CLEO), Baltimore MD, June 2003.

CP-127     R. Krishnan, K. Nielsch, Henry I. Smith, C. A. Ross, C. V. Thompson, “Highly ordered, single-domain alumina nanopore arrays and metallic nanowire arrays on silicon for on-chip integration of semiconductor devices, Submitted to the electrochemical society conference to be held in November 2003.

CP-128     Y. Shao-Horn, C. Hidrovo, S. M. Jurga, H. I. Smith, and G. Barbastathis, Origami fabrication of electrochemical device on the micrometer scale, 204th Meeting of the Electrochemical Society, Orlando, FL, October 2003 (abstract 1279).

CP-129     H. Smith, “The role of lithography and metrology in nanophoonics fabrication”, 2003 Optics in Computing, Technical Digest, June 18-20, 2003, Wyndham City Center, Washington, DC.

CP-130     R. Krishnan, K. Nielsch, Henry Smith, C. Ross, C. Thompson, “Fabrication of Highly-Ordered Nanopores and Metallic Nanowire Arrays on Silicon for Nanoscale Electronic Device Applications”, Fall 2003 MRS.

CP-131     M. Qi, E. Lidorikis, J. D. Joannopoulos and Henry I. Smith, “3D Photonic Crystals with Point Defects at Near-Infrared”, Submitted to MRS, April 12-16, 2004, San Francisco, CA.

CP-132     A. L. Giermann, C. V. Thompson andHenry I. Smith, “Templated formation of ordered metallic nano-particle arrays”, Submitted to MRS, April 12-16, 2004, San Francisco, CA.

CP-133     R. Krishnan, K. Nielsch, Henry I. Smith, C. A. Ross, C. V. Thompson, “Single-domain A lumina Nanopore and Metallic Nanowire Arrays on Silicon for On-Chip Integration of Nano-devices”, 204th Meeting of The Electrochemical Society, Co-sponsored in Part by the Electronics Division of The American Ceramic Society, October 12-October 16, 2003:  session: – Nanostructured Materials (on wednesday Oct 15, 2003)

CP-134     Tymon Barwicz, Milos A. Popovic, Peter T. Rakich, Michael R. Watts, Hermann A. Haus, Erich P. Ippen and Henry I. Smith, “Fabrication and analysis of add-drop filters based on microring resonators in SiN”, Paper TuL4, The 2004 Optical Fiber Communication Conference (OFC:04), Los Angeles, California, February 22-27, 2004.

CP-135     M. Qi, E. Lidorikis, J. D. Joannopoulos, Henry I. Smith, “Characterization of a three-dimensional photonic crystal with point defects at near-infrared wavelengths”, CLEO/IQEC, or Conference  on Lasers and Electron Optics/International Quantum Electronics Conference,  May 18-20,  San Francisco, CA.

CP-136     George Barbastathis, Hyun Jin In, Will Arora, Henry I. Smith, “Nanostructured Origami”,  SPIE Annual Meeting, Denver, CO.  August 2004.

CP-137     Minghao Qi, “3D Photonic Crystals with Point Defects at Near-Infrared”, Materials Research Society, April 13, 2004

CP-138     Rajesh Menon, Dario Gil, Amil Patel and Henry I. Smith, > “Proximity-Effect Correction in Zone-Plate-Array Lithography”, Micro > and Nano engineering International Conference, Cambridge, UK, 22-25, > September 2003.

CP-139     Dario Gil, Rajesh Menon, Todd Hastings and Henry I. Smith, “The Promise of diffractive Optics in Maskless Lithography”, to be Published in the Proceedings of the 28th International Conference on Micro- and Nano-Engineering 2003, Cambridge, UK 22-25 September 2003.

CP-140     Amanda L. Giermann, Carl V. Thompson and H. I. Smith, “The Effects of Topography on the Formation of Ordered Arrays of Metallic Nano-particles” To be presented at the 2004 Electrochemical Society meeting.

CP-141     Bibiana Onoa (a), Michael Walsh (b), Thomas B. O’Reilly(b), Henry Smith(b), “Carbon nanotubes with prescribed lengths and unaltered properties”MRS meeting, Boston, 2004.

CP-142     Ross, Caroline; Castano, F.J.; Jung, W. 1; Morecroft, D. ; Cheng, J.Y. ; Ilievski, F. ; Shnayderman, M. ; Nielsch, K. ; Krishnan, R. ; Robinson, J.W.A.; Smith, Henry I., “Fabrication of magnetic tubes, rings and dots using novel processes”, MRS meeting, Boston, MA.  Dec. 2004.

CP-143     Cheng, Joy, Shnayderman, Marianna, Mayes, Anne, Thomas, Edwin, Smith, Henry, Vancso, Julius, ross, Caroline, “Controlling local self-assembly of block copolymers using topographical substrates”, MRS meeting, Boston 2004

CP-144     Cheng, Joy, Smith, Henry, Ross, Caroline, “Registering the two-dimensional positions of block copolymer domains on substrates using templated self-assembly”, MRS meeting, Boston 2004.

CP-145     Jung, Wonjoon, Castano, Fernando, Morecroft, Deborah, Menon, rajesh, Smith, Henry, Ross, Caroline, “Properties of Enxhange-biased Elliptical Magnetic Rings Fabricated Using Zone-Plate-Array Lithography”, MRS meeting, Boston, MA  2004

CP-146     Henry I. Smith, “Interferometric-spatial phase imaging for nanometer-level alignment and gap control” NNT Nanoimprint Conference,  Boston, MA, December 3-5, 2003.

CP-147     Rajesh Menon, Amil Patel, Henry I. Smith, “Optical Lithography using MEMs-based spatial-Light Modulators” (2004).

CP-148     G. Barbastathis, H. J. In, W. Arora, and H. I. Smith, “Nanostructured Origami”, SPIE Annual Meeting, Denver, CO, August 2-6, 2004.

CP-149     G. Barbastathis, H. J. In, W. Arora, T. Buchner, and H. I. Smith, “The Nanostructured OrigamiTM 3D Fabrication and Assembly Process (invited talk)”, 19th Annual Meeting of the American Society for Precision Engineering (ASPE), Orlando, FL. 2004.

CP-150     W. Arora, H. J. In, H. I. Smith, and G. Barbastathis, “The Nanostructured OrigamiTM 3D Fabrication and Assembly Process (accepted for presentation to the 24th Army Science Conference, Orlando, FL, 2004.

CP-151     H. J. In, W. Arora, H. I. Smith, and G. Barbastathis, “Controlled Folding of Nanopatterned Membranes Using the Nanostructured Origami” 3D Fabrication and Assembly Process, Abstract accepted for publication to 2nd International Conference on Advanced Materials and Nanotechnology, Canterbury, New Zealand, February 2005.

CP-152     H. J. In, W. Arora, H. I. Smith, and G. Barbastathis, “Fabrication of 3D nanostructures via Nanostructured OriganiTM Process”, to be presented in 2nd International Symposium on Nano Manufacturing (ISNM), Daejon, Korea, Nov. 3-5, 2004.

CP-153     W. Arora, H. J. In, H. I. Smith and G. Barbastathis, “Nanostructured OrigamiTM 3D fabrication and assembly process using strain-induced folding”, to be presented in 2nd International Symposium on Nano Manufacturing (ISNM), Daejon, Korea, Nov. 3-5, 2004.

CP-154     H. Smith, “Zone-Plate-Array lithography (ZPAL): Optical Maskless Lithography for cost-Effective Patterning”, presentation at the SPIE microlithography conference, March 2nd. Paper #5751-36.

CP-155     Michael R. Watts, Minghao Qi, Tymon Barwicz, Milos Popovic, Peter Rakich, Luciano Socci, Erich P. Ippen, Franz Kaertner, and Heny I. Smith, “Towards a polarization independent optical add-drop multiplexer formed from polafrization dependent microring resonator filters”, Conference in India, 2005