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Domestic Patents

      1     “X-ray Lithographic Apparatus and Process”, H.I. Smith, D.L. Spears, and E. Stern, filed January 14, 1972.  Patent 3,743,842, July 3, 1973.

      2     “Soft X-ray Mask Support Substrate”, D.L. Spears, H.I. Smith, and E. Stern.  Patent 3,742,230, June 25, 1973.

      3     “Soft X-ray Alignment System”, H.I. Smith, D.L. Spears, and E. Stern.  Patent 3,742,229, June 26, 1973.

      4     “Soft X-ray Mask Alignment System”, H.I. Smith, filed October 14, 1975.  Patent 3,984,680, October 5, 1976.

      5     “Enhancing Epitaxy and Preferred Orientation”, H.I. Smith, Serial No. 756, 358 filed January 3, 1977, continuation in part filed April 9, 1979.  Patent 4,333,792, June 8, 1982.

      6     “Supported Membrane Composite Structure and Its Method of Manufacture”, D.C. Flanders, H.I. Smith, and M. DaLomba, filed March 29, 1977.  Patent 4,170,512, March 3, 1981.

      7     “Alignment of Diffraction Gratings”, H.I. Smith, S.S. Austin, and D.C. Flanders, filed May 3, 1977.  Patent 4,200,395, April 29, 1980.

      8     “Surface Wave Devices for Processing Signals”, E. Stern, R.C. Williamson, and H.I. Smith.  Patent 4,075,706, February 21, 1978.

      9     “The Orientation of Ordered Liquids and Their use in Devices”, D.C. Shaver, D.C. Flanders, and H.I. Smith, filed May 1978.  Patent 4,256,787, March 17, 1981. (MIT Case No. 3078L)

    10     “Spatial-Period-Division Exposing”, D.C. Flanders and H.I. Smith, Serial No. 43,310, filed May 1979.  Patent 4,360,586, November 23, 1982.

    11     “Plate Aligning”, H.I. Smith, Stewart S. Austin, and D.C. Flanders, filed December 26, 1979.  Patent 4,340,305, July 20, 1982.

    12     “Process for Selectively Etching Silicon”, C.M. Horwitz, filed May 25, 1982.  Patent 4,422,897, December 27, 1983.

    13     “Method of Entraining Dislocations and Other Crystalline Defects in Heated Film Contacting Patterned Region”, H.I. Smith, and M.W. Geis, filed June 23, 1982.  Patent 4,479,846, October 30, 1984. (MIT Case No. 3682)

    14     “Orientation Filtering for Crystalline Films”, H.I. Smith, H.A. Atwater, C.V. Thompson, and M.W. Geis, Serial No. 481096, filed March 31, 1983.  Patent 4,632,723, December 30, 1986.

    15     “Thick Crystalline Films on Foreign Substrates”, H.I. Smith, H.A. Atwater, and M.W. Geis, filed May 24, 1983.  Patent 4,576,676, March 18, 1986.

    16     “Product Made by Method of Entraining Dislocations and Other Crystalline Defects”, M.W. Geis, and H.I. Smith, filed June 4, 1984, Patent 4,562,106, December 31, 1985; Division of Serial No. 391,130, June 23, 1982.  Patent 4,479,846. (MIT Case No. 3682)

    17     “Graphoepitaxy by Encapsulation”, M.W. Geis, H.I. Smith, D.A. Antoniadis, and D.C. Flanders, filed December 10, 1984.  Patent 4,565,599, January 21, 1986.  Continuation of Serial No. 332,553 (December 21, 1981); Serial No. 181,102 (August 25, 1980).  (MIT Case No. 80.21L).

    18     “A Lithography Mask with π-Phase Shifting Attenuator”, H.I. Smith, E.H. Anderson, and M.L. Schattenburg, filed February 25, 1987, Serial No. 18587.  Patent 4,890,309, December 26, 1989. (MIT Case No. 4283).

    19     “Epitaxy with Reusable Template”, H.I. Smith and C.V. Thompson,  Patent 5,639,300, June, 1997. (MIT Case No. 4576).

    20     “Holographic Lithography”,H.I. Smith, E.H. Anderson, and M.L. Schattenburg, Patent 5,142,385, August 25, 1992. (MIT  Case No. 4778).

    21     “Energy Beam Locating”, H. I. Smith, E.H. Anderson, and M.L. Schattenburg, filed April 5, 1991.  Patent 5,136,169, August 4, 1992. (MIT Case No. 5492).

    22     “Graphoepitaxy using Energy Beams”, H.I. Smith, M.W. Geis, and D.C. Flanders, filed August 7, 1990, Serial #06/680,238, Patent 5,122,223, June 16, 1992.  (MIT Case No. 79.13L),

    23     “On-Axis Interferometric Alignment of Plates Using the Spatial Phase of Interference Patterns “, H.I. Smith, A.M. Modiano, and E. Moon, filed June 1, 1993,  Patent 5,414,514,  May 9, 1995.   (MIT Case No. 6284).

    24     “Interferometric Broadband Imaging”, H.I. Smith, E.E. Moon, and P.N. Everett, filed May 28, 1996, Serial #08/654 287. (MIT Case No. 7025)

    25     “Wavelength-Selective Optical Add/Drop Switch”, J.N. Damask, T.E. Murphy, J. Ferrera, M.H. Lim, H.I. Smith, and H.A. Haus,  Patent # 5,915,051, June 22, 1999, filed January 21, 1997. (MIT Case No. 7264).

    26     “Maskless Lithography Using a Multiplexed Array of Fresnel Zone Plates”, H.I. Smith, US Patent No., 5,900,637, May 4, 1999, filed May 30, 1997, Serial #08/866,550.  (MIT Case No. 7731).

    27     “Scintillating  Fiducial Patterns”, J.G. Goodberlet, H.I. Smith,  US Patent No., 5,892,230, filed May 29, 1997, Serial #08/865,095.  (MIT Case No. 7671).

    28     “X-ray Lithography Masking”, H.I. Smith, M.L. Schattenburg, J.M. Carter, and M.H. Lim, U.S. Patent No. 5,809,103, September 15, 1998, filed December 20, 1996, Serial #08/770,678.  (MIT Case No. 7384).

    29     “Optical Alignment Apparatus Having Multiple Parallel Alignment Marks”, P.N. Everett, E.E. Moon, H.I. Smith, U.S. Patent No. 5,808,742, September 15, 1998, filed May 28, 1996. (MIT Case No. 7025).

    30     “Optical Gap Sensing”, P.N. Everett,  E.E. Moon, H.I. Smith, US Patent No. 6,088,103, filed 9/9/98.  (MIT Case No. 7025).

    31     “A Method and System for Interference Lithography Utilizing Phase-Locked Scanning Beams”, Mark Schattenburg and Patrick N. Everett, (MIT Case No. 8564).

    32     “Near-Field Optical Masks With Embedded Attenuators”, James Goodberlet, submitted 7/10/01, (MIT Case No. 9381).

    33     “Method for Fabricating Small Magnetic Elements”, Michael Walsh, Joy Cheng, Bernhard Vogeli, Henry Smith, submitted 10/01. MIT Case #9511

    34     “Distributed Feedback Nanocrystal Laser”, Moungi  Bawendi, Hans J. Eisler, Henry I. Smith, Vikram C. Sundar and Michael Walsh, submitted 10/1/01 (MIT Case No. 9495).

    35     “Self-Aligned Process for Magnetic Random Access Memories”, H.I. Smith,                               (MIT Case #9506) (2001).

    36     “Adaptive Lithography Membrane Masks”, M. Feldman, H. Smith, K. Murooka, and Mike Lim, US Patent No. #6,404,481, issued June  11, 2002  (MIT  Case No. 8882).

    37     “Dual Level Mask for Pattern Transfer in Lithography”, Caroline A. Ross, Timothy Savas, Henry I. Smith and Bernhard Vogeli, (MIT Case No. 9520) (2001).

    38     “Maskless Arrayed Lithography Systems”, David J. Carter, Dario Gil, Rajesh Menon and Henry I. Smith, (MIT Case No. 9887) (2002).

    39     “Holographic Fabrication and Replication of Diffractive Optical Elements”, George Barbastathis, David J. Carter, Dario Gil, Rajesh Menon and Henry I. Smith, (MIT Case No. 9299)  (2002).

    40     “Maskless Lithography Using an array of improved diffractive-focusing elements”, George Barbastathis, David J. Carter, Dario Gil, Rajesh Menon and Henry I. Smith, (MIT Case No. 9922) (2002).

    41     “Diffractive Optics Fabrication Procedures”, by George Barbastathis, David J. Carter, Dario Gil, James G. Goodberlet, Jeffrey T. Hastings, Rajesh Menon and Henry I. Smith, (MIT Case No. 9996) (2002). United States of America Serial No. 60/415720, Filed October 3, 2002

    42     “Optical Gap Measuring Apparatus and Method Having 2-Dimensional Grating Mark with Chirp in one Direction”, E.E. Moon, P.N. Everett and Henry I. Smith, US Patent No. #6,522,411, filed 5/25/00, appl. 09/578,578.  (MIT Case No. 8449), date of patent 2/18/03.

    43     “Parallel Optical Traps”,MIT Case # 10366 R. Menon, G. Barbastathis, D. Gil and Henry I. Smith, June 13, 2003

    44     Optical Waveguide With Side-Wall Gratings” by Jeffrey T. Hastings, Michael H. Lim and Henry I. Smith, M.I.T. Case No. 9668 Patent Convention Treaty Serial No. US03/, Filed May 28, 2003, United States of America Serial No. 10/446245, Filed May 30, 2002.

    45     “Method for Providing Singly Dispersed Nanotubes of Uniform Length with Native Properties”, Yet Ming Chiang, Mike Walsh, Tom O’Reilly, and H. I. Smith.

    46     “Spatial Phase locking with shaped electron beam lithography”, J. Ferrera, J. Goodberlet, T. Groves, J. Hartley, M. Mondol, M. Schattenburg, Henry I. Smith, Patent #US6822248, filed November 23, 2004.

    47     “System and Method for Manipulating Micro-Particles sing Electromagnetic Fields”, Menon, et. al, U.S. Patent Serial # 10/748,058, Filed 12/30/03.  MIT case # 10366.

    48     “Imaging System and Method Employing Beam Folding”, Rajesh Menon & Henry I. Smith, MIT Case # 10612.  Filed 4/14/05.

    49     “Systen & Method for Proximity Effect Correction in Imaging System” Menon et.al, US Patent ser. No. 10/823,458.  MIT Case # 10379.

    50     “Maskless (Direct-Write) Lithography System that Uses a Beam Folding Technique”, Rajesh Menon and Henry I. Smith, MIT. Case # 10612

    51     “Maskless Lithography using reversible contrast enhancement layer”, MIT Case # 11362.

    52     “Microscopy using reversible contrast enhancement layer”, MIT Case # 11390.

    53     “Phase Shift Masked Zone Plate Array Lithography”, George Barbastathis, Rajesh Menon and Henry I. Smith, U.S. Patent Serial No. 60/650332, filed February 4, 2005.  MIT Case # 11509.

    54     “Spatial-Phase Locking of One or More Energy Beams for Determining Two-Dimensional Location and Beam Shape”, Hastings et al.  MIT Case No.  10860., Pat. No. 60/571,726.