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Theses

      1     R.J. Hawryluk, “Energy Dissipation by Electron Beam Scattering in Thin Polymer Films”, Ph.D. Thesis, Physics Department, MIT, May 1974.  (Also, Technical Report 511, MIT Lincoln Laboratory 1974).

      2     S.E. Bernacki, “The Application of X-ray Lithography to Microelectronic Devices”, Ph.D. Thesis, Division of Engineering and Applied Physics, Harvard University, April 1975.

      3     D.C. Flanders, “Orientation of Crystalline Overlayers on Amorphous Substrates by Artificially Produced Surface Relief Structures”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, January 1978.  (Also, Technical Report 533, MIT Lincoln Laboratory 1978).

      4     D.C. Shaver, “Alignment of Liquid Crystals by Surface Gratings”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1978.  (Also, Technical Report 538, MIT Lincoln Laboratory 1979).

      5     Alice White, Ph.D. Harvard University

      6     D.C. Shaver, “Electron Beam Techniques for Testing and Restructuring of Wafer-Scale Integrated Circuits”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1981.

      7     A.M. Hawryluk, “Transmission Diffraction Gratings for Soft X-ray Spectroscopy and Spatial Period Division”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, October 1981.  (Also, VLSI Memo 81-69, MIT, October 1981).

      8     C.J. Keavney, “Zone-Melting Recrystallization of InSb on Oxidized Silicon Wafers”, S.M. Thesis, Department of Materials Science and Engineering, MIT, June 1983.  (Also, VLSI Memo 83-143, June 1983).

      9     E.D. Ahlers, “Method of Photolithographic Projection System Characterization”, B.S./M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1983 (VI-A, General Electric, Schenectady, NY).

    10     H.A. Atwater, “Control of Silicon Film Recrystallization using Lithography with Application to Photovoltaics”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1983.  (Also, VLSI Memo 83-149, July 1983).

    11     S.S. Dana, “Nucleation on Surface Relief Structures by Chemical Vapor Deposition”, Ph.D. Thesis, Department of Physics, MIT, September 1983.

    12     L.F.A. Mougel, “Solar Cells Fabricated from Zone-Recrystallized Silicon”, B.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1984.

    13     M.L. Schattenburg, “Astronomical X-ray Spectroscopy: Studies of the Crab Nebula and Development of Ultra-Fine Transmission Gratings”, Ph.D. Thesis, Department of Physics, MIT, June 1984.  (Also, reprinted by Center for Space Research, MIT).

    14     H.J. Lezec, “Photoresist Characterization System”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1984.

    15     R.F. Kwasnick, “Electronic Conduction in Extremely Narrow Silicon Inversion Layers”, Ph.D. Thesis, Department of Physics, MIT, June 1984.

    16     J.M.A. Palella, “Silicon Photovoltaic Cells Prepared by Zone Melting Recrystallization”, B.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, September 1984.

    17     I. Plotnik, “Reactive-Ion Etching of Tungsten for Sub-50 Nanometer High-Contrast X-ray Mask Fabrication”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1985.  (Also, VLSI Memo No. 85-246, May 1985).

    18     E.H. Anderson, “Surface Gratings with Sub-100 nm Linewidths”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1984.  (Also, VLSI Memo 85-251, June 1985).

    19     A.C. Warren, “Surface Superlattices and Quasi-One-Dimensional Conduction in Silicon Inversion Layers”, Ph.D. Thesis, Department of Physics, MIT, June 1985.

    20     N.C. Us, “Ion Bombardment in Plasma Processing of Electronic Materials”, M.S. Thesis, Department of Materials Science, MIT, June 1985. (VI-A, IBM, San Jose, CA).

    21     S.C. Schott, “The Behavior of Germanium during Zone-Melting Recrystalization on Various Substrates”, M.S. Thesis, Department of Materials Science, MIT, June 1985.

    22     J.A. Stein, “A Micromechanical Optical Switch Based on Zero Order Diffraction for Flat Panel Displays”, Ph.D. Thesis, Department of Mechanical Engineering, MIT, June 1985.

    23     D.A. Suma, “An Investigation of Forming of Diffraction Gratings in Thin Polymer Films”, M.S. Thesis, Department of Mechanical Engineering, MIT, June 1985.

    24     J.E. Palmer, “Secondary Grain Growth in Ultra Thin Germanium Films on Silicon Dioxide”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, August 1985.

    25     C.C. Wong, “Secondary Grain Growth and Graphoepitaxy in Thin Au Films”, Ph.D. Thesis, Department of Materials Science and Engineering, MIT, February 1986.

    26     G.G. Wong, “Fast Sub-100 nm Alignment for X-ray Lithography:  Fresnel Zone Plates and Reduced Scanning Field”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1986.

    27     J.E. Murguia, “Design, Fabrication and Testing of a Planar Silicon Permeable Base Transistor”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1986.

    28     S.Y. Chou, “Electronic Conduction in Ultra-Short Channel Si MOSFET’s”, Ph.D. Thesis, Department of Physics, MIT, June 1986.

    29     S.M. Garrison, “The Kinetics of Secondary Grain Growth in Rapidly Thermal Annealed Thin Silicon Films”, S.M. Thesis, Department of Materials Science and Engineering, MIT, June 1986.

    30     T. Yonehara, “Low Temperature-Growth of Semiconductor Films Over Amorphous Insulating Substrates”, Ph.D. Thesis, Waseda University, June 1986.

    31     J.C. Licini, “Quantum Conductance Fluctuations in Extremely Narrow Inversion Layers in Silicon”, Ph.D. Thesis, Department of Physics, MIT, February 1987.

    32     H.A. Atwater, “Ion Beam Enhanced Grain Growth in Thin Films”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1987.

    33     A. Yen, “Grating Gate Si MOSFET for Study of Quantum Transport Effects”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, August 1987.

    34     A.M. Modiano, “Real Time Control, Acquisition, and Image Processing for the Scanning Tunneling Microscope”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, December 1987.

    35     P.F. Bagwell, “Quantum Mechanical Transport Phenomena in Nanostructured Inversion Layers”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, February 1988.

    36     E.H. Anderson, “Fabrication and Electromagnetic Applications of Periodic Nanostructures”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1988.

    37     W. Chu, “Fabrication of Lateral-Surface-Superlattice MODFETs using X-ray Lithography”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, September 1988.

    38     G. Shahidi, “Non-Stationary Transport Effects in Deep Sub-Micron Channel Si MOSFET’s”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1989.

    39     J.E. Palmer, “Evolution of Microstructures in Ultra-Thin Films of GaAs and CaF2 on Single Crystal Silicon”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1989.

    40     K. Ismail, “The Study of Electron Transport in Field-Induced Quantum Wells on GaAs/GaAlAs”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1989.

    41     R. Carpenter, “Material Characterization Techniques for SOI Devices”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1989.

    42     P.G. Meyer, “Fabrication of Deep Submicron MOSFETs using a Self-Aligned Cobalt Disilicide Process”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1989.

    43     S.A. Ajuria, “Photon Enhanced Grain Growth”, S.M. Thesis, Department of Materials Science and Engineering, MIT, June 1989.

    44     H.M. Quek, “An Investigation of Graphoepitaxy in Thin Au and Bi Films”, S.M. Thesis, Department of Materials Science and Engineering, MIT, June 1989.

    45     L.A. Clevenger, “Controlled and Explosive Silicidation of Metal/Amorphous-Silicon Multilayer Thin Films”, Ph.D. Thesis, Department of Materials Science and Engineering, MIT, August 1989.

    46     S.L. Park, “The Anomalous Magnetoresistance of the Electron Gas in a Restricted Geometry”, Ph.D. Thesis, Department of Physics, MIT, April 1990.

    47     J. ScotThomas, “Conductance Oscillations Periodic in the Charge Density of One-Dimensional MOSFET Structures”, Ph.D. Thesis, Department of Physics, MIT, August 1990.

    48     U. Meirav, “Single Electron Charging and Periodic Conductance Oscillations in Gallium Arsenide Nanostructures”, Ph.D. Thesis, Department of Physics, MIT, May 1990.

    49     S.C. The, “A Self-Aligned NMOS Process using X-ray Lithography”, S.M. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1990.

    50     P.H. Bagwell, “Quantum Mechanical Transport in Submicron Electronic Devices”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, December 1990.

    51     F.S. Tsai, “Characterization of Mechanical & Optical Properties of X-ray Mask Membranes”, B.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1991.

    52     K.R. Early, “Experimental Characterization and Physical Modeling of Resolution Limits in Proximity Printing X-ray Lithography”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1991.  (Also, RLE Technical Report No. 565, August 1991, and MTL Memo 91-638, October 1991.

    53     Y.-C. Ku, “Fabrication of Distortion Free X-ray Masks using Low Stress Tungsten”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, October 1991.

    54     A. Yen, “Fabrication of Large-Area 100 nm-Period Gratings using Achromatic Holographic Lithography”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, October 1991.

    55     A.M. Modiano, “An Aligner for X-ray Nanolithography, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, October 1992.  (Also, MTL Memo 93-698, May 1993).

    56     D.B. Olster, “Refining the Process of Achromatic Holographic Lithography”, B.S .Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1992.

    57     R.A. Ghanbari, “Physics and Fabrication of Quasi-One-Dimensional Conductors”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1993.  (Also, RLE Technical Report No. 578, April 1993, and MTL Memo 93-700, May 1993).

    58     W. Chu, “Inorganic X-ray Mask Technology for Quantum-Effect Devices”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1993.  (Also, RLE Technical Report No. 577, April 1993, and MTL Memo 93-699, May 1993).

    59     G.E. Rittenhouse, “Mesoscopic Transport of Cooper Pairs through Ballistic Superconductor-Normal Metal-Superconductor Junctions”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1993.  (Also, MTL Memo 93-701, May 1993).

    60     C.C. Eugster, “Electron Waveguide Devices”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1993.

    61     J.N. Damask, “A New Photonic Device:  The Integrated Resonant Channel-Dropping Filter”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1993.

    62     M.H. Lim, “Measurement of In-Plane Distortion using Holographic Interferometric Techniques”, B.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1993.

    63     S.N. Shah, “A White Light Interferometer for Improved Achromatic Holographic Lithography”, B.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1993.

    64     J.C. Lew, “Fabrication of Free-Standing Silicon Nitride Gratings of 200 nm Period for Atom Interferometry”, B.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1993.

    65     N. Gupta, “Fabrication of 100 nm Gates for Monolithic Microwave Integrated Circuits using X-ray Lithography”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, August 1993.

    66     A. Kumar, “Single  Electron Charging Effects in Quantum Dot Nanostructures”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1994.

    67     H. Li, “Temperature Homogenization with Tungsten Absorber on X-Ray Mask”, B.S. and M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1994.

    68     S.D. Hector, “Optimization of Image Formation in X-Ray Lithography Using Rigorous Electromagnetic Theory and Experiments”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1994.

    69     G.M. Owen, “Optical and Mechanical Characterization of Thin Membranes for X-Ray Lithography”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1994.

    70     J. Ferrera, “Highly Coherent Gratings for Optoelectronics: An Application of Spatial-Phase-Locked Electron Beam Lithography”, B.S. and M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1994.

    71     H. Hu, “Experimental Study of Electron Velocity  Overshoot in Silicon Inversion Layers”, Ph.D. Thesis, Department of Physics, MIT, September 1994.

    72     S. Shah, “Free-standing 100 nm Period Gratings Produced by Achromatic Holographic Lithography”, M.E. Thesis, Department of Electrical Engineering and Computer Science, MIT, February 1995.

    73     M. Burkhardt, “Fabrication Technology and Measurement of Coupled Quantum Dot Devices”, Ph.D Thesis, Department of Electrical Engineering and Computer Science, MIT, February 1995.

    74     A. Yasaka, “Feasibility Study of Spatial-Phase-Locked Focused-Ion-Beam Lithography”, M.S. Thesis, Department of Materials Science and Engineering, MIT, June 1995.

    75     V.V. Wong, “Fabrication of Distributed Feedback Devices Using X-ray Lithography”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, August 1995.

    76     J.G. Goodberlet, “An Experimental Investigation of a Table-Top, Laser-Driven Extreme Ultraviolet Laser”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, February 1996.

    77     J.N. Damask, “Integrated-Optic Grating-Based Filters for Optical Communication Systems”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, May 1996.

    78     K.W. Yee, “Gold-Electroplating Technology for X-Ray-Mask Fabrication”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1996.

    79     K.M. Jackson, “Laterally Non-Uniform Doping Profiles in MOSFETs: Modeling and Analysis”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, August 1996.

    80     I. Yang, “Study of Sub-0.5 mm SOI-with-Active Substrate (SOIAS) Technology for Ultra-Low Power Applications”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, September 1996.

    81     M. Meinhold, “Aligned gate Fabrication Using X-ray Lithography”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, October 1996.

    82     T. Murphy,  “Integrated Optical Grating-Based Matched Filters for Fiber-Optic Communications”,  M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, October 1996.

    83     A. Franke, “Fabrication of Extremely Smooth Nanostructures Using Anisotropic Etching”, M. S. Thesis, Department of Electrical Engineering and Computer Science, MIT, June, 1997.

    84     M. Farhoud, “Interferometric Lithography and Selected Applications”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1997.

    85     J. Foresi, “Optical Confinement and Light Guiding in High Dielectric Contrast Materials Systems”, Ph.D. Thesis, Department of Materials Science and Engineering, MIT, June 1997.

    86     M. Schweizer, “Fabrication and Measurement of Lateral-Surface-Superlattice Devices”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, September 1997.

    87     D. Berman, “The Aluminum Single-Electron Transistor for Ultrasensitive Electrometry of Semiconductor Quantum-Confined Systems”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1998.

    88     D. Carter, “Sub-50 nm X-ray Lithography with Application to a Coupled Quantum Dot Device”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1998.

    89     M. Qi, “Micro-fabrication of 3-D Si/Air and Si/SiO2/Air PBG structures”, M. S. Thesis, Department of Electrical Engineering and Computer Science, MIT, June 1998.

    90     E. Moon, “Dynamic Nanometer Alignment for Nanofabrication and Metrology”, M.S. Thesis, Department of Electrical Engineering and Computer Science, MIT, September 1998.

    91     I. Djomehri, “Zone Plate Array Lithography in the Deep UV”, M. S. Thesis, Department of Electrical Engineering and Computer Science, MIT, September 1998.

    92     J. Bae, “A Data Storage System Based on Patterned Magnetic Media and Magnetic Force Microscopy”, M.S. Thesis, Department of Mechanical Engineering, MIT, May 1999.

    93     V. Chan, “Ceramic Nanostructures from Block Copolymers”, Ph.D.  Thesis, Department of Materials Science and Engineering, MIT, October 1999.

    94     J. Ferrera, “Nanometer-Scale Placement in Electron-Beam Lithography”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, February 2000.

    95     O. Stolz, “Experimental and theoretical investigation on polarization-dependence in Silicon-on-Insulator waveguides”, Diplom-Ingenieur (FH), University of Technology and business in Aalen, May 2000.

    96     M. Walsh, “Nanostructuring Magnetic thin Films Using Interference Lithography”, M. S.  Thesis, Department of Electrical Engineering and Computer  Science, 2000.

    97     T. Murphy, “Design, Fabrication and Measurement of Interated Bragg Grating Optical filters”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, November 2000.

    98     M. Farhoud, “Fabrication and Characterization of Nanostructured Magnetic Particles for Applications in Data Storage”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, December 2000.

    99     D. Twisselmann, “The Origins of Substrate Topography-Induced Anisotropy in Co-alloy Films, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, 2001.

 100     J. Khan, “Integrated Optical Filters using Bragg Gratings and Resonators”,Ph.D. Thesis,  Department of  Electrical Engineering and Computer Science, 2001.

 101     M. Finlayson, “Development of a Scintillating Reference grid for Spatial-Phase-Locked Electron-Beam Lithography” M.S. Thesis, Department of Electrical Engineering and Computer  Science, 2001.

 102     M. Hwang, “Fabrication, Characterization, and Micromagnetic Analysis of Lithographically-defined Particle Arrays for Applications in Data Storage, Ph.D. Thesis, Department of Materials Science and Engineering,  June  2001.

 103     A. Lochtefeld, “Toward the End of the MOSFET Roadmap; Investigating Fundamental Transport Limits and Device Architecture Alternatives”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, May 2001.

 104     K. Jackson, “Optimal MOSFET Design for Low Temperature Operation”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, June  2001.

 105     M. Lim, “Development of x-ray Lithography and Nanofabrication techniques for III-V Optical Devices”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, MIT, February 2002.

 106     A. A. Erchak, “Enhanced Performance of Optical Sources in III-V Materials Using Photonic Crystals”, Ph.D. Thesis, Department of Materials Science and Engineering,  June 2002.

 107     P. Konkola, “Scanning Beam Inferference Lithography”, Ph.D. Thesis, Department of Mechanical Engineering, June 2003.

 108     C. G. Chen, “Beam Alignment and Image Metrology for Scanning Beam Interference Lithography – Fabricating Gratings with Nanometer Phase Accuracy”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, June 2003.

 109     M. W. Meinhold, “X-ray Lithographic Alignment and Overlay Applied to Double-Gate MOSFET Fabrication”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, May 2003.

 110     D. Gil, “Maskless Nanolithography and Imaging with Diffractive Optical Arrays”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, June 2003.

 111     J. Cheng, “Fabrication and Characterization of Nanostructures from Sef-assembled Block Copolymers, Ph.D. Thesis, Department of Materials Science and Engineering,  June 2003.

 112     J. T. Hastings, “Nanometer-Precision Electron-Beam Lithography with Applications in Integrated Optics”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, June 2003.

 113     T. Savas, “Achromatic Interference Lithography”, Ph.D. Thesis, Physics Department.  Sept. 2003

 114     R. Menon,   “Diffractive Optics for Maskless Lithography and Imaging”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, June 2003.

 115     S. Smits, “ Photosensitive Dry Etching of Aluminum with applications in Nanolithography”, M. S. Thesis, Leiden University, Leiden,  Netherlands. August, 2003

 116     A. A. Patel, “The Development of a Prototype Zone-Plate-Array Lithographyt (ZPAL) System”, M. S. Thesis, Department of Electrical Engineering and Computer Science, May 2004.

 117     C. Caramana, “Pattern-PlacemenError Detection for Spatial-Phase-Locked E-Beam Lithography (SPLEBL)”, M. S. Thesis, Department of Electrical Engineering and Computer Science, June 2004.

 118     E. Moon, “Interferometric-Spatial-Phase Imaging for Sub-Nanometer Three-Dimensional Positioning”, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, September 2004.

 119     M. Walsh, “On the design of lithographic interferometers and their application”, Ph.D., Department of Electrical Engineering and Computer Science, September, 2004.