Nanolithography
Development of sub-10-nm-length-scale nanofabrication technology using charged-particle beams and nanoimprint...
Single-Photon
Detectors
This effort focuses on developing superconductive nanowires
as narrow as a few nm wide for use in single-photon detection...
Templated Self-Assembly
Lithography is currently being squeezed between two engineering realities:
an extraordinary requirement on resolution for nanoscale manufacturing,
and...
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