MIT
Quantum Nanostructures and
Nanofabrication Group

Prof. Karl K. Berggren

Nanowerk Highlights EBL with STEM for single-nm features

Nanotechweb has released a Journal Highlight of some of our recently published work. The research involves using electron beam lithography to precisely place quantum dots on a sample surface. The work explores size and height of different templating holes in a PMMA resist to incorporate single or many quantum dots in each hole. The results were reported and discussed in Nanotechnology

Check out the exciting discussion on nanotechweb.org!

Also, check out the exciting video that Vitor made for his paper: See the YouTube video here!

It was also featured on the NSF Knowledge Network.