Quantum Nanostructures and
Nanofabrication Group

Prof. Karl K. Berggren

The frontier of information processing lies in nanoscience and nanotechnology research. At the nanoscale, materials and structures can be engineered to exhibit interesting new properties, some based on quantum mechanical effects. Our research focuses on developing nanofabrication technology at the few-nanometer length-scale. We use these technologies to push the envelope of what is possible with photonic and electrical devices, focusing in particular on superconductive and free-electron devices. Our research combines electrical engineering, physics, and materials science and helps extend the limits of nanoscale engineering.


Superconducting Devices
We design and fabricate superconducting nanowire single photon detectors (SNSPDs). SNSPDs are appropriate for many applications because they have low jitter, a fast reset time and good sensitivity to infrared... Read more >>
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Nanofabrication, and nanolithography in particular, are the cornerstone of the modern microelectronics industry, and are integral to the future of nanotechnology as a whole. We are investigating fundamental challenges associated... Read more >>
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New paper: “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” accepted to JVSTB
We developed two processes for fabricating three-dimensional nanostructures using a hydrogen silsesquioxane and poly(methylmethacrylate) bilayer resist stack. We demonstrated self-aligned mushroom-shaped posts and freestanding supported structures that were fabricated in... Read more >>
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Prof Berggren featured in MIT Spectrum Magazine
Professor Karl Berggren was recently featured in the Continuum column of MIT's Spectrum magazine. This interview discusses Prof Berggren's experience and perspective in working across disciplines, from physics to electrical... Read more >>
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The nanocryotron: A superconducting-nanowire three-terminal electrothermal device