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| 95. |
“Assembly of sub-10-nm block copolymer patterns with mixed morphology and period using electron irradiation and solvent annealing” Jeong Gon Son, Jae-Byum Chang, Karl K. Berggren, and Caroline A. Ross, Nano Letters 11(11), 5079 (2011) |
| 94. |
“Highly ordered square arrays from a templated ABC triblock terpolymer” Jeong Gon Son, Jessica Gwyther, Jae-Byum Chang, Karl K. Berggren, Ian Manner, and Caroline A. Ross, Nano Letters 11(7), 2849 (2011) |
| 93. |
“Numerical method to optimize the Polar-Azimuthal Orientation of Infrared Superconducting Nanowire Single-Photon Detectors” Csete, Mária; Sipos, Áron; Najafi, Faraz; Hu, Xiaolong; Berggren, Karl K, Applied Optics 50(31), 5949-5956 (2011) [pdf]. |
| 92. |
“Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si” J. C. van Oven, F. Berwald, K. K. Berggren, P. Kruit, and C. W. Hagen, Journal of Vacuum Science and Technology B 29, 06F305 (2011)*JVSTB[8] [pdf]. |
| 91. |
“Geometry-dependent critical currents in superconducting nanocircuits” John R. Clem and Karl K. Berggren, Physical Review B 84, 174510 (2011). [pdf]. |
| 90. |
“In situ study of hydrogen sisesquioxane dissolution rate in salty and electrochemical developers” Katherine J. Harry, Sebastian Strobel, Joel K. W. Yang, Huigao Duan, and Karl K. Berggren, Journal of Vacuum Science and Technology B 29, 06FJ01 (2011).*JVSTB[8] [pdf]. |
| 89. |
"Controlled Collapse of High-Aspect-Ratio Nanostructures," Huigao Duan, Joel K. W. Yang, Karl K. Berggren, Small 7(18) 2661-2668 (2011). [pdf]
|
| 88. |
“Neon Ion Beam Lithography (NIBL),” Donald Winston , Vitor R Manfrinato , Samuel M Nicaise , Lin Lee Cheong , Huigao Duan , David Ferranti , Jeff Marshman , Shawn McVey , Lewis A Stern , John A Notte , and Karl Berggren, Nano Letters 11(10) 4343-4347(2011). [pdf] [Nature Nanotechnology | Research Highlights] [Press Coverage]. |
| 87. |
“Electrochemical development of hydrogen silsesquioxane by applying an electrical potential,” Sebastian Strobel, Katherine J Harry, Huigao Duan, Joel K W Yang, Vitor R Manfrinato and Karl K Berggren, Nanotechnology 22 375301(2011). [pdf]. |
| 86. |
“Modeling the point-spread function in helium-ion lithography,” D. Winston, J. Ferrera, L. Battistella, A. E. Vladár, K. K. Berggren, Scanning Available Online (2011). [Preprint]. |
| 85. |
“Sub-5 keV Electron-Beam Lithography in Hydrogen Silsesquioxane Resist,” Vitor R. Manfrinato, Lin Lee Cheong, Huigao Duan, Donald Winston, Henry I. Smith, Karl K. Berggren, Journal of Microelectronic Engineering 88(2011) 3070-3074. [pdf]
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| 84. |
“Single-Photon Detectors Based on Ultranarrow Superconducting Nanowires,” Francesco Marsili, Faraz Najafi, Eric Dauler, Francesco Bellei, Xiaolong Hu, Maria Csete, Richard J. Molnar, and Karl K. Berggren, Nano Letters 11(5) 2048 (2011). [pdf]
|
| 83. |
“Electrothermal simulation of superconducting nanowire avalanche photodetectors,” Francesco Marsili, Faraz Najafi, Charles Herder, Karl K. Berggren, Applied Physics Letters 98 093507 (2011). [pdf].
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| 82. |
“Superconducting nanowire single-photon detectors integrated with optical nano-antennae,” Xiaolong Hu, Eric A. Dauler, Richard J. Molnar, and Karl K. Berggren, Optics Express 19(1) 17-31 (2011). [pdf].
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| 81. |
“Development of a simple, compact, low-cost interference lithography system,” Hasan Korre, Corey P. Fucetola, Jeremy A. Johnson, and Karl K. Berggren, Journal of Vacuum Science and Technology B 28 C6Q20 (2010).*JVSTB[7] [pdf]. [Instructional YouTube Video]
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| 80. |
“Sub-10-nm Half-Pitch Electron-Beam Lithography by Using PMMA as a Negative Resist,” Huigao Duan, Donald Winston, Joel K. W. Yang, Bryan M. Cord, Vitor R. Manfrinato, and Karl K. Berggren, Journal of Vacuum Science and Technology B 28 C6C58-C6C62 (2010).*JVSTB[7] [pdf].
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| 79. |
“Superconducting microfabricated ion traps,” Shannon X. Wang, Yufei Ge, Jaroslaw Labaziewicz, Eric Dauler, Karl K. Berggren and Isaac L. Chuang, Applied Physics Letters 97 244102 (2010). [pdf] |
| 78. |
“The Scanning Electron Microscope As An Accelerator For The Undergraduate Advanced Physics Laboratory,” Randolph S. Peterson, Karl K. Berggren, and Mark Mondol, CAARI 2010: 21st International Conference on the Application of Accelerators in Research and Industry, Denton, TX; AIP. [pdf] |
| 77. |
“Sub-10-nm Structures on Silicon by Thermal Dewetting of Platinum,” Sebastian Strobel, Christopher Kirkendall, Jae-Byum Chang, and Karl K. Berggren, Nanotechnology 21 (2010) 505301. [pdf] |
| 76. |
“Metrology for electron-beam lithography and resist contrast at the sub-10nm scale,” Huigao Duan, Vitor R. Manfrinato, Joel K. W. Yang, Donald Winston, Bryan M. Cord, and Karl K. Berggren, Journal of Vacuum Science and Technology B vol. 28, no. 6, pp. H11-H17, (2010).*JVSTB[1][pdf] |
| 75. |
“Enhancing the potential of block copolymer lithography with polymer self-consistent field theory simulations,” R. A. Mickiewicz, J. K. W. Yang, A. F. Hannon, Y.-S. Jung, A. Alexander-Katz, K. K. Berggren, and C. A. Ross, Macromolecules vol. 43, no. 19, pp. 8290-8295, (2010). [pdf] |
| 74. |
“Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion,” Huigao Duan and Karl K. Berggren, Nano Letters 10 (9), 3710-3716 (2010) . [pdf] |
| 73. |
“High-order temporal coherences of chaotic and laser light,” Martin J. Stevens, Burm Baek, Eric A. Dauler, Andrew J. Kerman, Richard J. Molnar, Scott A. Hamilton, Karl K. Berggren, Richard P. Mirin, and Sae Woo Nam , Optics Express 18, pp. 1430-1437 (2010) [pdf]. |
| 72. |
“High-quality fiber-optic polarization entanglement distribution at 1.3µm telecom wavelength,” Tian Zhong, Xiaolong Hu, Franco N. C. Wong, Karl K. Berggren, Tony D. Roberts, and Philip Battle, Optics Letters 35, pp. 1392-1394 (2010). [pdf] |
| 71. |
“Complex self-assembled patterns using sparse commensurate templates with locally varying motifs,” Joel K. W. Yang, Yeon Sik Jung, Jae-Byum Chang, R. A. Mickiewicz, A. Alexander-Katz, C. A. Ross and Karl K. Berggren, Nature Nanotechnology 5, pp. 256-260 (2010). [News and Views concerning this paper.] |
| 70. |
“A Path to Ultranarrow Patterns Using Self-Assembled Lithography,” Yeon Sik Jung, J. B. Chang, Eric Verploegen, Karl K. Berggren and C. A. Ross, Nano Letters 10, pp. 1000-1005 (2010). [pdf] |
| 69. |
“Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer,” Sung-Wook Nam, Michael J. Rooks, Joel K. W. Yang, Karl K. Berggren, Hyun-Mi Kim, Min-Hyun Lee, Ki-Bum Kima, Jae Hwan Sim and Do Yeung Yoon, Journal of Vacuum Science and Technology B 27, pp. 2635-2639 (2009).*JVSTB[1] [pdf] |
| 68. |
“Low-cost Interference Lithography,” Corey P. Fucetola, Hasan Korre and Karl K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2958-2961 (2009).*JVSTB[1] [pdf] |
| 67. |
“Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist,” D. Winston, B. M. Cord, B. Ming, D. C. Bell, W. F. DiNatale, L. A. Stern, A. E. Vladar, M. T. Postek, M. K. Mondol, J. K. W. Yang, and K. K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2702-2706 (2009).*JVSTB[1] [pdf] |
| 66. |
“Understanding of Hydrogen Silsesquioxane Electron Resist for Sub-5-nm-Half-Pitch Lithography,” Joel K.W. Yang, Bryan Cord, Karl K. Berggren, Joseph Klingfus, Sung-Wook Nam, Ki-Bum Kim, and Michael J. Rooks, Journal of Vacuum Science and Technology B 27, pp. 2622-2627 (2009).*JVSTB[1] [pdf] |
| 65. |
“Sub-15-nm nanoimprint molds and pattern transfer,” Debbie Morecroft, Joel K.W. Yang, Simon Schuster, Karl K. Berggren, Qiangfei Xia, Wei Wu, and R. Stanley Williams, Journal of Vacuum Science and Technology B 27, pp. 2837-2840 (2009).*JVSTB[1] [pdf] |
| 64. |
“Limiting Factors in Sub-10-nm Scanning-Electron-Beam Lithography,” Bryan Cord, Joel Yang, Huigao Duan, David C. Joy, Joseph Klingfus, and Karl K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2616-2621 (2009).*JVSTB[1] [pdf] |
| 63. |
“Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Xiaolong Hu, Tian Zhong, James E. White, Eric A. Dauler, Faraz Najafi, Charles H. Herder, Franco N. C. Wong, and Karl K. Berggren, Optics Letters 34, pp. 3607-3609 (2009). [pdf] |
| 62. |
Andrew J. Kerman, Joel K.W. Yang, Richard J. Molnar, Eric A. Dauler, and Karl K. Berggren, “Electrothermal feedback in superconducting nanowire single-photon detectors,” Physical Review B 79, 100509 (2009). [pdf] Copyright 2009 by the American Physical Society. |
| 61. |
“Efficiently Coupling Light to Superconducting Nanowire Single-Photon Detectors,” Xiaolong Hu, Charles W. Holzwarth, Daniele Masciarelli, Eric A. Dauler, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity 19, pp. 336-340 (2009). [pdf] |
| 60. |
“Suppressed Critical Current in Superconducting Nanowire Single-Photon Detectors With High Fill-Factors,” Joel K. W. Yang, Andrew J. Kerman, Eric A. Dauler, Bryan Cord, Vikas Anant, Richard J. Molnar, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity 19, pp. 318-322 (2009). [pdf] |
| 59. |
“Photon-number-resolution with sub-30-ps timing using multi-element superconducting nanowire single photon detectors,” Eric A. Dauler, Andrew J. Kerman, Bryan S. Robinson, Joel K. W. Yang, Boris Voronov, Gregory Gol'tsman, Scott A. Hamilton, and Karl K. Berggren, Journal of Modern Optics 56, pp. 364-373 (2008). Preprint available. |
| 58. |
“Si-Containing Block Copolymers for Self-Assembled Nanolithography (invited),” C.A. Ross, Y.S. Jung, V.P.Chuang, F. Ilievski, J.K.W. Yang, I. Bita, E.L. Thomas, H.I. Smith, K.K. Berggren, J.G.Vansco, and J.Y. Cheng, Journal of Vacuum Science and Technology B 26, pp.2489-2494 (2008).[pdf]*JVSTB[2] |
| 57. |
E.A. Dauler, M.J. Stevens, B. Baek, R. Molnar, S.A. Hamilton, R.P. Mirin, S.-W. Nam, and K.K. Berggren, “Measuring intensity correlations with a two-element superconducting nanowire single photon detector,” Physical Review A 78, 053826 (2008) (4 pages). [pdf] Copyright 2008 by the American Physical Society. |
| 56. |
“Sub-10 nm Nanoimprint Lithography by Wafer Bowing,” Wei Wu, W.M. Tong, J. Bartman, Y. Chen, R. Walmsley, Z. Yu, Q. Xia, I. Park, C. Picciotto, J. Gao, S.-Y. Wang, D. Morecroft, J.K.W. Yang, K.K. Berggren, and R.S. Williams, Nano Letters 8, pp. 3865-3869 (2008). [pdf] |
| 55. |
“Fabrication and Characterization of Suspended Uniaxial Tensile Strained-Si Nanowires for Gate-All-Around n-MOSFETs,” P. Hashemi, M. Canonico, J.K.W. Yang, L. Gomez, K.K. Berggren, and J. L. Hoyt, ECS (Electrochemical Society) Transactions, Vol. 16, No. 10, pp. 57-68, October 2008. [pdf] |
| 54. |
“Amplitude spectroscopy of a solid-state artificial atom,” David M. Berns, Mark S. Rudner, Sergio O. Valenzuela, Karl K. Berggren, William D. Oliver, Leonid S. Levitov, Terry P. Orlando, Nature 455, 51-57, (2008). [preprint] |
| 53. |
“Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates,” Ion Bita, Joel K. W. Yang, Yeon Sik Jung, Caroline A. Ross, Edwin L. Thomas, and Karl K. Berggren, Science 321, 939 (2008). [pdf] |
| 52. |
“Optical properties of superconducting nanowire single-photon detectors,” Vikas Anant, Andrew J. Kerman, Eric A. Dauler, Joel K.W. Yang, Kristine M. Rosfjord, and Karl K. Berggren, Optics Express, 16, 10750 (2008). [pdf] |
| 51. |
“Controlling the optical properties of transparent media by mixing active and passive resonances,” Vikas Anant, Ayman F. Abouraddy, and Karl K. Berggren, arXiv:0711.5021 (2008) |
| 50. |
“Atomic-force lithography with interferometric tip-to-substrate position metrology,” Euclid E. Moon, Jan Kupec, Mark K. Mondol, Henry I. Smith, and Karl K. Berggren, Journal of Vacuum Science and Technology B, 25, 2284 (2007). *JVSTB[3] [pdf] |
| 49. |
“Optimal temperature for development of poly(methylmethacrylate),” Bryan Cord, Jodie Lutkenhaus, and Karl K. Berggren, Journal of Vacuum Science and Technology B, 25, 2013 (2007). JVSTB*[2] [pdf] |
| 48. |
“Using high-contrast salty development of hydrogen silsesquioxane for sub-10-nm half-pitch lithography,” Joel K. W. Yang and Karl K. Berggren, Journal of Vacuum Science and Technology B 25, 2025 (2007).[pdf]*JVSTB[3] |
47. |
“Pattern Generation by Using Multi-Step Room-Temperature Nanoimprint Lithography,” Stefan Harrer, Joel Yang, Giovanni Antonio Salvatore. Karl K. Berggren, Filip Ilievski, and Caroline A. Ross, IEEE Transactions on Nanotechnology, 6 639-644 (2007) . [abstract][pdf] |
| 46. |
“Multi-Element Superconducting Nanowire Single-Photon Detector,” Eric A. Dauler, Bryan S. Robinson, Andrew J. Kerman, Joel K. W. Yang, Kristine M. Rosfjord, Vikas Anant, Boris Voronov, Gregory Gol'tsman, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity, 17 279-284 (2007).[pdf] |
| 45. |
“Modeling the Electrical and Thermal Response of Superconducting Nanowire Single-Photon Detectors,”Joel K. W. Yang, Andrew J. Kerman, Eric A. Dauler, Vikas Anant, Kristine M. Rosfjord, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity, 17 581-585 (2007). [pdf] |
| 44. |
Janice C. Lee, William D. Oliver, Karl K. Berggren, and Terry P. Orlando, “Nonlinear resonant behavior of a dispersive readout circuit for a superconducting flux qubit,” Physical Review B75, 144505 (2007). [abstract][pdf] Copyright 2007 by the American Physical Society. |
| 43. |
“Constriction-limited detection efficiency of superconducting nanowire single-photon detectors,” Andrew J. Kerman, Eric A. Dauler, Joel K. W. Yang, Kristine M. Rosfjord, Karl K. Berggren, G. Gol'tsman, and B. Voronov, Applied Physics Letters, 90 101110 (2007). [abstract][pdf]. |
| 42. |
“Enhancing etch resistance of hydrogen silsesquioxane via postdevelop electron curing,” Joel K. W. Yang, Vikas Anant, and Karl K. Berggren, Journal of Vacuum Science and Technology B 24, 3157 (2006) .*JVSTB[4]pdf |
| 41. |
“Robust shadow-mask evaporation via lithographically controlled undercut,” B. Cord, C. Dames, K.K. Berggren, and J. Aumentado, Journal of Vacuum Science and Technology B 24, 3139 (2006).*JVSTB[4]pdf |
| 40. |
“Microwave-Induced Cooling of a Superconducting Qubit,” Sergio O. Valenzuela, William D. Oliver, David M. Berns, Karl K. Berggren, Leonid S. Levitov, and Terry P. Orlando, Science 314, 1589-92 (2006). |
| 39. |
Eric A. Dauler, Bryan S. Robinson, Andrew J. Kerman, Vikas Anant, Richard J. Barron, Karl K. Berggren, David O. Caplan, John J. Carney, Scott A. Hamilton, Kristine M. Rosfjord, Mark L. Stevens, Joel K. Yang, “1.25 Gbit/s photon-counting optical communications using a two-element superconducting nanowire single photon detector,” Proc. of SPIE Advanced Photon Counting Techniques, Wolfgang Becker; Ed., Vol. 6372, Oct (2006).[pdf]. |
| 38. |
“Nanowires detect individual infrared photons,” K.K. Berggren and A.J. Kerman, Laser Focus World, 42 87-89 (2006).(review article) |
| 37. |
D. M. Berns, W. D. Oliver, S. O. Valenzuela, A. V. Shytov, K. K. Berggren, L. S. Levitov, and T. P. Orlando, “Coherent Quasiclassical Dynamics of a Persistent Current Qubit,” Physical Review Letters 97, 150502 (2006). Copyright 2006 by the American Physical Society. |
| 36. |
“Superconducting Nanowire Photon-Counting Detectors for Optical Communications,” A.J. Kerman, E.A. Dauler, B.S. Robinson, R. Barron, D.O. Caplan, M.L. Stevens, J.J. Carney, S.A. Hamilton, W.E. Keicher, J.K.W. Yang, K. Rosfjord, V. Anant, and K.K. Berggren, Lincoln Laboratory Journal, 16, 217-224, (2006).(review article) |
| 35. |
“Kinetic-inductance-limited reset time of superconducting nanowire photon counters,” Andrew J. Kerman, Eric A. Dauler, William E. Keicher, Joel K. W. Yang, Karl K. Berggren, G. Gol'tsman, and B. Voronov, Applied Physics Letters, 88 111116 (2006). [abstract][pdf] [YouTube Video]. |
| 34. |
“781-Mbit/s photon-counting optical communications using a superconducting nanowire detector,” Bryan S. Robinson, Andrew J. Kerman, Eric A. Dauler, Richard J. Barron, David O. Caplan, Mark L. Stevens, John J. Carney, and Scott A. Hamilton, Joel K. W. Yang, and Karl K. Berggren, Optics Letters , 31 444-446 (2006).[abstract][pdf]. |
| 33. |
“Nanowire Single-Photon Detector with an Integrated Optical Cavity and Anti-Reflection Coating” K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. Voronov, G. N. Gol’tsman, K. K. Berggren, Optics Express, 14 527-34 (2006). [abstract][pdf]. |
| 32. |
“Mach-Zehnder Interferometry in a Strongly Driven Superconducting Qubit,” William D. Oliver, Yang Yu, Janice C. Lee, Karl K. Berggren, Leonid S. Levitov, and Terry P. Orlando, Science, 310 1653-7 (2005) [abstract]. |
| 31. |
“Multi-Photon, Multi-Level Dynamics in a Superconducting Persistent-Current Qubit,” Y. Yu, W. D. Oliver, J. C. Lee, K. K. Berggren, L. S. Levitov, T. P. Orlando, preprint available at cond-mat/0508587 (in review). |
| 30. |
“Pumped quantum systems: immersion fluids of the future?” Vikas Anant, Magnus Radmark, Ayman F. Abouraddy, Thomas C. Killian, and Karl K. Berggren, J. Vac. Sci. Tech. B, 23, 2662-2667, (2005) [pdf][arXiv preprint]. |
| 29. |
“Fabrication Development for Nanowire GHz-Counting-Rate Single-Photon Detectors,” Joel K. W. Yang, Eric Dauler, Antonin Ferri, Aaron Pearlman, Aleksandr Verevkin, Gregory Gol'tsman, Boris Voronov, Roman Sobolewski, William E. Keicher, Karl K. Berggren, IEEE Trans. Appl. Supercond., 15, pp. 626-630, (2005) [pdf]. |
| 28. |
“Energy Relaxation Times in Nb Persistent Current Qubits,” Yang Yu, William D. Oliver, Janice C. Lee, Karl K. Berggren, and T. P .Orlando, IEEE Trans. Appl. Supercond., 15, pp. 845-848 (2005) [pdf]. |
| 27. |
“Resonant Readout of a Persistent Current Qubit,” Janice C. Lee, William D. Oliver, Terry P. Orlando, and Karl K. Berggren, IEEE Trans. on Appl. Supercond., 15, 841-844, (2005) [pdf]. |
| 26. |
Y. Yu, D. Nakada, J. C. Lee, B. Singh, D. S. Crankshaw, T. P. Orlando, K. K. Berggren, and W. D. Oliver, “Energy relaxation time between macroscopic quantum levels in a superconducting persistent-current qubit,” Phys. Rev. Lett., 92, 117904-1, (2004) [arXiv preprint]. Copyright 2004 by the American Physical Society. |
| 25. |
“Quantum Computing with Superconductors,” K. K. Berggren, Proc. of the IEEE, 92, 1630 (2004) [pdf] (review article). |
| 24. |
D. S. Crankshaw, K. Segall, D. Nakada, T. P. Orlando, L. S. Levitov, S. Lloyd, S. O. Valenzuela, N. Markovic, M. Tinkham, and K. K. Berggren, “dc measurements of macroscopic quantum levels in a superconducting qubit structure with a time-ordered meter,” Phys. Rev. B, 69, 144518-1, (2004). "Copyright 2004 by the Americal Physical Society." |
| 23. |
K. Segall, D. Crankshaw, D. Nakada, T. P. Orlando, L.S. Levitov, S. Lloyd, N. Markovic, S. O. Valenzuela, M. Tinkham, and K. K. Berggren, “Impact of time-ordered measurements of the two states in a niobium superconducting qubit structure,” Phys. Rev. B 67, 220506 (2003). Copyright 2003 by the American Physical Society. |
| 22. |
“Improved critical-current-density uniformity by using anodization,” D. Nakada, K. K. Berggren, E. Macedo, V. Liberman, and T. P. Orlando, IEEE Trans. Appl. Supercond. 13, 111 (2003). [pdf] |
| 21. |
“Experimental characterization of the two current states in a Nb persistent-current qubit,” K. Segall, D. S. Crankshaw, D. Nakada, B. Singh, J. Lee, T. P. Orlando, K. K. Berggren, N. Markovic, S. Valenzuela, M. Tinkham, IEEE Trans. Appl. Supercond. 13, 1009 (2003). [pdf] |
| 20. |
“Flux-based superconducting qubits for quantum computation,” T. P. Orlando, S. Lloyd, L. S. Levitov, K. K. Berggren, M. J .Feldman, M. F. Bocko, M. Tinkham, J. E. Mooij, C. J. P. Harmans, and C. H. van der Wal, Physica C 372, 194, (2001). [pdf] |
| 19. |
“Room-temperature testing for high critical-current-density Josephson junctions,” M. J. O'Hara, and K. K. Berggren, IEEE Trans. Appl. Supercond. 10, 1669 (2000). [pdf] |
| 18. |
“Measurement of the energy sensitivity of a superconductive comparator,” D. A. Feld, J. P. Sage, K. K. Berggren, and A. Siddiqui, IEEE Trans. Appl. Supercond. 9, 4361 (1999). [pdf] |
| 17. |
“Low Tc superconductive circuits fabricated on 150-mm-diameter wafers using a doubly planarized Nb/AlOx/Nb process,” K. K. Berggren, E. M. Macedo, D. A. Feld, and J. P. Sage, IEEE Trans. Appl. Supercond. 9, 3271 (1999). [pdf] |
| 16. |
“Evaluation of critical current density of Nb/Al/AlOx/Nb Josephson junctions using test structures at 300K,” K. K. Berggren, M. J. O'Hara, J. P. Sage, and A. H. Worsham, IEEE Trans. Appl. Supercond. 9, 3236 (1999). [pdf] |
| 15. |
“Localization of metastable atom beams with optical standing waves: nanolithography at the Heisenberg limit,” K. S. Johnson, J. H. Thywissen, N. H. Dekker, K. K. Berggren, A. P. Chu, R. Younkin, M. Prentiss, Science 280, 1583 (1998). |
| 14. |
R. Younkin, K. K. Berggren, E. Cheung, K. S. Johnson, M. Prentiss, A. J. Black, G. M. Whitesides, D. C. Ralph, C. T. Black, M. Tinkham, “Demonstration of a nanolithographic system using a self-assembled monolayer resist for neutral atomic cesium,” Proc. of SPIE Vol. 2995, 109-120 (1997). |
| 13. |
Kent S. Johnson, Karl K. Berggren, Andrew J. Black, Charles T. Black, Arthur P. Chu, Nynke H. Dekker, D. C. Ralph, Joseph H. Thywissen, Rebecca J. Younkin, Mara Goff Prentiss, Michael Tinkham, George M. Whitesides, “Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold,” Proc. of SPIE Vol. 2995, 97-108 (1997). |
| 12. |
“Nanostructure fabrication in silicon using cesium to pattern a self-assembled monolayer,” R. Younkin, K. K. Berggren, K. S. Johnson, M. Prentiss, D. C. Ralph, and G. M. Whitesides, Appl. Phys. Lett. 71, 1261 (1997). |
| 11. |
“Demonstration of a nanolithographic system using a self-assembled monolayer resist for neutral atomic cesium,” K. K. Berggren, R. Younkin, E. Cheung, M. Prentiss, A. J. Black, G. M. Whitesides, D. C. Ralph, C. T. Black, and M. Tinkham, Advanced Materials 9, 5255 (1997). |
| 10. |
“Self-assembled monolayers exposed by metastable argon and metastable helium for neutral atom lithography and atomic beam imaging,” A. Bard, K. K. Berggren, J. L. Wilbur, J. D. Gillaspy, S. L. Rolston, J. J. McClelland, W. D. Phillips, M. Prentiss, and G. M. Whitesides, J. Vac. Sci. Technol. B 15, 1805 (1997). |
| 9. |
“Nanofabrication using neutral atomic beams,” J. H. Thywissen, K. S. Johnson, R. Younkin, N. H. Dekker, K. K. Berggren, A. P. Chu, M. Prentiss, S. A. Lee, J. Vac. Sci. Tech. B 15, 2093 (1997). |
| 8. |
“Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold,” K. S. Johnson, K. K. Berggren, A. Black, C. T. Black, A. P. Chu, N. H. Dekker, D. C. Ralph, J. H. Thywissen, R. Younkin, M. Prentiss, G. M. Whitesides, Appl. Phys. Lett. 69, 2773 (1996). |
| 7. |
“A virtual slit for atomic optics and nanolithography,” A. P. Chu, K. K. Berggren, K. S. Johnson, M. G. Prentiss, Quantum and Semiclassical Optics 8, 521 (1996). |
| 6. |
“Demonstration of a blazed grating beam splitter for two level atoms,” K. S. Johnson, A. P. Chu, K. K. Berggren, M. Prentiss, Opt. Comm. 126, 326 (1996). |
| 5. |
“Microlithography by using neutral metastable atoms and self-assembled monolayers,” K. K. Berggren, A. Bard, J. L. Wilbur, A. G. Helg, J. D. Gillaspy, J. J. McClelland, S. L. Rolston, W. D. Phillips, M. Prentiss, G. M. Whitesides, Science 269, 1255 (1995). |
| 4. |
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| *JVSTB |
Copyright [1](2009) [2](2008) [3](2007) [4](2006) [5](2005) [6](1997) [7](2010) [8](2011) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. |
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