Quantum Nanostructures and
Nanofabrication Group

Prof. Karl K. Berggren and Dr. P. Donald Keathley

Publications

Link to Graduate Student Theses | Link to QNN Patents

In Review

  1. Kevin C. Chen, Ian Christen, Hamza Raniwala, Marco Colangelo, Lorenzo De Santis, Katia Shtyrkova, et al. “A Scalable Cavity-Based Spin-Photon Interface in a Photonic Integrated Circuit.” Available on ArXiv: February 2024.
  2. Valentin Karam, Owen Medeiros, Tareq El Dandachi, Matteo Castellani, Reed Foster, Marco Colangelo, et al. “Parameter Extraction for a Superconducting Thermal Switch (hTron) SPICE Modelt.” Available on ArXiv: January 2024.
  3. Patel, Sahil R., Marco Colangelo, Andrew D. Beyer, Gregor G. Taylor, Jason P. Allmaras, Emma E. Wollman, et al. “Improvements of Readout Signal Integrity in Mid-Infrared Superconducting Nanowire Single Photon Detectors.” Available on ArXiv: January 2024.
  4. Kim, Changsub, Christina Bell, Jake Evans, Jonathan Greenfield, Emma K. Batson, Karl K. Berggren, et al. “Wafer-Scale MgB2 Superconducting Devices.” Available on ArXiv: December 2023.
  5. Warner, Hana K., Jeffrey Holzgrafe, Beatriz Yankelevich, David Barton, Stefano Poletto, C. J. Xin, et al. “Coherent Control of a Superconducting Qubit Using Light.” Available on ArXiv: October 2023.
  6. Matthew Yeung, Lu-Ting. Chou, Marco Turchetti, Shiuh-Hsuan Chia, Karl K. Berggren, and Philip D. Keathley, “Lightwave Electronic Harmonic Frequency Mixing.” Available on ArXiv: July 2023.
  7. Felix Ritzkowsky, Matthew Yeung, Engjell Bebeti, Thomas Gebert, Toru Matsuyama, Matthias Budden, Roland Mainz, et al. “Large Area Optical Frequency Detectors for Single-Shot Phase Readout.” Available on ArXiv: June 2023.

In Print

  1. Marco Colangelo, Zhu, D., Shao, L., Holzgrafe, J., Batson, E. K., Desiatov, B., Medeiros, O., Yeung, M., Loncar, M., & Berggren, K. K. “Molybdenum Silicide Superconducting Nanowire Single-Photon Detectors on Lithium Niobate Waveguides,” ACS Photonics (2024)
  2. Ilya Charaev, Bandurin, D. A., Bollinger, A. T., Phinney, I. Y., Drozdov, I., Colangelo, M., Butters, B. A., Taniguchi, T., Watanabe, K., He, X., Medeiros, O., Božović, I., Jarillo-Herrero, P., & Berggren, K. K. “Single-photon detection using high-temperature superconductors,” Nat. Nanotechnol.pp. 1–7, (2023) | ArXiv
  3. Alessandro Buzzi, Matteo Castellani, Reed A. Foster, Owen Medeiros, Marco Colangelo, and Karl K. Berggren. “A nanocryotron memory and logic family,” Appl. Phys. Lett., 122, 14, (2023)| ArXiv
  4. Matteo Castellani, Owen Medeiros, Reed A. Foster, Alessandro Buzzi, Marco Colangelo, Joshua C. Bienfang, Alessandro Restelli, & Karl K. Berggren, “A Nanocryotron Ripple Counter Integrated with a Superconducting Nanowire Single-Photon Detector for Megapixel Arrays”, Appl. Phys. Lett., 122, 14, (2023)|ArXiv
  5. Emma Batson, Marco Colangelo, John Simonaitis, Eyosias Gebremeskel, Owen Medeiros, Mayuran Saravanapavanantham, Vladimir Bulovic, Phillip D. Keathley, Karl K. Berggren, “Reduced ITO for transparent superconducting electronics,” Supercond. Sci. Technol., 36, 5, (2023)| ArXiv
  6. John W. Simonaitis, Phillip D. Keathley. “Twin Experiments Reveal Twin Electron Dynamics,” Nat. Phys. pp. 1–2, (2023)
  7. Jamie S. Luskin, Ekkehart Schmidt, Boris Korzh, Andrew D. Beyer, Bruce Bumble, Jason P. Allmaras, Alexander B. Walter, et al, “Large active-area superconducting microwire detector array with single-photon sensitivity in the near-infrared,” Appl. Phys. Lett., 122, 24, (2023) | ArXiv
  8. R. A. Foster, M. Castellani, A. Buzzi, O. Medeiros, M. Colangelo, and K. K. Berggren, “A superconducting nanowire binary shift register”, Appl. Phys. Lett., 122, 15, (2023) | AIP Highlight | ArXiv
  9. Akshay Agarwal, John Simonaitis, Vivek K. Goyal, Karl K. Berggren, “Secondary Electron Count Imaging in SEM” Ultramicroscopy, 245 113662, (2023) | ArXiv
  10. Marco Colangelo, B. Korzh, J. P. Allmaras, A. D. Beyer, A. S. Mueller, R. M. Briggs, B. Bumble, M. Runyan, M. J. Stevens, A. N. McCaughan, D. Zhu, S. Smith, W. Becker, L. Narváez, J. C. Bienfang, S. Frasca, A. E. Velasco, C. H. Peña, E. E. Ramirez, A. B. Walter, E. Schmidt, E. E. Wollman, M. Spiropulu, R. Mirin, S. W. Nam, K. K. Berggren, M. D. Shaw “Impedance-matched differential superconducting nanowire detectors” Phys. Rev. Appl. 19, (2023) | ArXiv
  11. Ilya Charaev, D. A. Bandurin, A. T. Bollinger, I. Y. Phinney, I. Drozdov, M. Colangelo, B. A. Butters, T. Taniguchi, K. Watanabe, X. He, P. Medeiros, I. Božović, P. Jarillo-Herrero, K.K. Berggren, “Single-photon detection using high-temperature superconductors,” Nat. Nanotechnol., (2023) | ArXiV
  12. Philip D. Keathley, S. V. B. Jensen, M. D. Yeung, M. R. Bionta, and L. B. Madsen, “Uncovering Extreme Nonlinear Dynamics in Solids Through Time-Domain Field Analysis.” Phys. Rev. B 107, (2023) | ArXiv.
  13. Samantha I. Davis, Andrew Mueller, Raju Valivarthi, Nikolai Lauk, Lautaro Narvaez, Boris Korzh, Andrew D. Beyer, Marco Colangelo, Karl K. Berggren, Matthew D. Shaw, Neil Sinclair, Maria Spiropulu Improved heralded single-photon source with a photon-number-resolving superconducting nanowire detector.” Phys. Rev. Applied, 18 (6), (2022) | ArXiv
  14. Lin, C.-W., Huang, S., Colangelo, M., Chen, C., Wong, F. N. C., He, Y., Berggren, K. K., & Belcher, A. M. “Surface Plasmon Enhanced Upconversion Fluorescence in Short-Wave Infrared for In Vivo Imaging of Ovarian Cancer,” ACS Nano. (2022)
  15. Erik Piatti, Marco Colangelo, Mattia Bartoli, Owen Medeiros, Renato S. Gonnelli, Karl K. Berggren, and Dario Daghero. “Reversible Tuning of Superconductivity in Ion-Gated NbN Ultrathin Films by Self-Encapsulation with a High-k Dielectric Layer” Physical Review Applied 18(5) 054023. (2022)
  16. Yonit Hochberg, Benjamin V. Lehmann, Ilya Charaev, Jeff Chiles, Sae Woo Nam, Karl K. Berggren “New Constraints on Dark Matter from Superconducting Nanowires.” Physical Review D, 106(11), (2022) | ArXiv
  17. Marco Colangelo, Alexander B. Walter, Boris A. Korzh, Ekkehart Schmidt, Bruce Bumble, Adriana E. Lita, Andrew D. Beyer, Jason P. Allmaras, Ryan M. Briggs, Alexander G. Kozorezov, Emma E. Wollman, Matthew D. Shaw, Karl K. Berggren, “Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm.” Nano Lett., (2022)
  18. Jeff Chiles, Ilya Charaev, Robert Lasenby, Masha Baryakhtar, Junwu Huang, Alexana Roshko, George Burton, Marco Colangelo, Ken Van Tilburg, Asimina Arvanitaki, Sae Woo Nam, Karl K. Berggren “New Constraints on Dark Photon Dark Matter with Superconducting Nanowire Detectors in an Optical Haloscope” Phys. Rev. Lett. 128 (2022). ArXiv
  19. Andrew Dane, Jason Allmaras, Di Zhu, Murat Onen, Marco Colangelo, Reza Baghdadi, Jean-Luc Tambasco, Yukimi Morimoto, Ignacio Estay Forno, Ilya Charaev, Qingyuan Zhao, Mikhail Skvortsov, Alexander Kozorezov, Karl K. Berggren. “Self-heating hotspots in superconducting nanowires cooled by phonon black-body radiation” Nat Commun, 13 (1), (2022) | ArXiv
  20. Mara Prentiss, Arthur Chu, and Karl K. Berggren, “Finding the infectious dose for COVID-19 by applying an airborne-transmission model to superspreader events” PLOS ONE, 17 (6), (2022).
  21. Linbo Shao, Di Zhu, Marco Colangelo, Dae Hun Lee, Neil Sinclair, Yaowen Hu, Peter T. Rakich, Keji Lai, Karl K. Berggren, Marko Loncar “Electrical Control of Surface Acoustic Waves” Nat Electron (2022) | arXiv
  22. Marco Turchetti, Yujia Yang, Mina R. Bionta, Alberto Nardi, Luca Daniel, Karl K. Berggren, Phillip D. Keathley “Electron Emission Regimes of Planar Nano Vacuum Emitters” IEEE Trans. on Elec. Dev. (2022) | arXiv
  23. Jesse Liu, Kristin Dona, Gabe Hoshino, Stefan Knirck, Noah Kurinsky, Matthew Malaker, David W. Miller, Andrew Sonnenschein, Mohamed H. Awida, Peter S. Barry, Karl K. Berggren, Daniel Bowring, Gianpaolo Carosi, Clarence Chang, Aaron Chou, Rakshya Khatiwada, Samantha Lewis, Juliang Li, Sae Woo Nam, Omid Noroozian, and Tony X. Zhou “Broadband Solenoidal Haloscope for Terahertz Axion Detection” Phys. Rev. Lett. 128, (2022) | arXiv
  24. Dario Cattozzo Mor, Yujia Yang, Felix Ritzkowsky, Franz X. Kärtner, Karl K. Berggren, Neetesh Kumar Singh, Phillip D. Keathley “PHz Electronic Device Design and Simulation for Waveguide-Integrated Carrier-Envelope Phase Detection” Journal of Lightwave Technology (2022) | arXiv
  25. Pete Barry, Karl Berggren, A. Baha Balantekin, John Bollinger, Ray Bunker, Ilya Charaev, Jeff Chiles, Aaron Chou, Marcel Demarteau, Joe Formaggio, Peter Graham, Salman Habib, David Hume, Kent Irwin, Mikhail Lukin, Joseph Lykken, Reina Maruyama, Holger Mueller, SaeWoo Nam, Andrei Nomerotski, John Orrell, Robert Plunke).tt, Raphael Pooser, John Preskill, Surjeet Rajendran, Alex Sushkov, Ronald Walsworth “Opportunities for DOE National Laboratory-led QuantISED Experiments”, on arXiv.
  26. Laura Cattaneo, Luca Pedrelli, Roger Y. Bello, Alicia Palacios, Phillip D. Keathley, Fernando Martín, and Ursula Keller “Isolating Attosecond Electron Dynamics in Molecules where Nuclei Move Fast” Phys. Rev. Lett. 128, (2022) | arXiv
  27. Daniel F. Santavicca, Marco Colangelo, Carleigh R. Eagle, Maitri P. Warusawithana, and Karl K. Berggren “50 Ω transmission lines with extreme wavelength compression based on superconducting nanowires on high-permittivity substrates” Appl. Phys. Lett. 119, (2021) | arXiv
  28. Xiaofu Zhang, Ilya Charaev, Huanlong Liu, Tony X. Zhou, Dong Zhu, Karl K. Berggren, Andreas Schilling “Physical properties of amorphous molybdenum silicide films for single photon detectors” Superconductor Science and Technology 34, 9 (2021) | arXiv
  29. Ranajoy Bhattacharya, Marco Turchetti, P. Donald Keathley, Karl K. Berggren, and Jim Browning “Long term field emission current stability characterization of planar field emitter devices” Journal of Vacuum Science & Technology B 39 (2021)
  30. David Awschalom1, Karl K. Berggren, Hannes Bernien, Sunil Bhave, Lincoln D. Carr, Paul Davids, Sophia E. Economou, Dirk Englund, Andrei Faraon, Martin Fejer, Saikat Guha, Martin V. Gustafsson, Evelyn Hu, Liang Jiang, Jungsang Kim, Boris Korzh, Prem Kumar, Paul G. Kwiat, Marko Lončar, Mikhail D. Lukin, David A.B. Miller, Christopher Monroe, Sae Woo Nam, Prineha Narang, Jason S. Orcutt, Michael G. Raymer, Amir H. Safavi-Naeini, Maria Spiropulu, Kartik Srinivasan, Shuo Sun, Jelena Vučković, Edo Waks, Ronald Walsworth, Andrew M. Weiner, Zheshen Zhang, “Development of Quantum Interconnects (QuICs) for Next-Generation Information Technologies,” PRX Quantum, vol. 2, no. 1, p. 017002, (2021) | ArXiv
  31. John Simonaitis, Benjamin Slayton, Yugu Yang-Keathley, Phillip Keathley, Karl K. Berggren “Precise, Subnanosecond, and High-Voltage Switching Enabled by Gallium Nitride Electronics Integrated into Complex Loads” Reviews of Scientific Instruments 92 (2021) | arXiv
  32. Drew Buckley, Yujia Yang, Yugu Yang-Keathley, Karl K. Berggren, and Phillip D. Keathley “Nanoantenna design for enhanced carrier–envelope-phase sensitivity” JOSA B 38, 9 (2021) | arXiv
  33. Navid Abedzadeh, M. A. R. Krielaart, Chung-Soo Kim, John Simonaitis, Richard Hobbs, Pieter Kruit, Karl K. Berggren “Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample” Ultramicroscopy 226 (2021) | arXiv
  34. V. B. Verma, B. Korzh, A. B. Walter, A. E. Lita, R. M. Briggs, M. Colangelo, Y. Zhai, E. E. Wollman, A. D. Beyer, J. P. Allmaras, H. Vora, D. Zhu, E. Schmidt, A. G. Kozorezov, K. K. Berggren, R. P. Mirin, S. W. Nam, and M. D. Shaw “Single-photon detection in the mid-infrared up to 10 μm wavelength using tungsten silicide superconducting nanowire detectors” APL Photonics 6 (2021) | arXiv
  35. Alberto Nardi, Marco Turchetti, Wesley A. Britton, Yuyao Chen, Yujia Yang, Luca Dal Negro, Karl K. Berggren, Phillip D. Keathley “Nanoscale refractory doped titanium nitride field emitters” Nanotechnology (2021) | arXiv
  36. Mina R. Bionta, Felix Ritzkowsky, Marco Turchetti, Yujia Yang, Dario Cattozzo Mor, William P. Putnam, Franz X. Kärtner, Karl K. Berggren, Phillip D. Keathley “On-chip sampling of optical fields with attosecond resolution” Nature Photonics 15 (2021) | arXiv
  37. Akshay Agarwal, John Simonaitis, Karl K. Berggren “Image-Histogram-based Secondary Electron Counting to Evaluate Detection Quantum Efficiency in SEM” Ultramicroscopy 224 (2021) | arXiv
  38. Marco Turchetti, Mina R. Bionta, Yujia Yang, Felix Ritzkowsky, Denis Ricardo Candido, Michael Flatté, Karl K. Berggren, Phillip D. Keathley “Impact of DC bias on Weak Optical-Field-Driven Electron Emission in Nano-Vacuum-Gap Detectors” JOSA B 38, 3 (2021) | arXiv
  39. Marco Colangelo, Di Zhu, Daniel F. Santavicca, Brenden A. Butters, Joshua C. Bienfang, Karl K. Berggren “A compact and tunable forward coupler based on high-impedance superconducting nanowires” Phys. Rev. Applied 15 (2021) | arXiv
  40. Lily Hallett, Ilya Charaev, Akshay Agarwal, Andrew Dane, Marco Colangelo, Di Zhu, Karl K. Berggren “Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors” Supercond. Sci. Technol. 34, 3 (2021) | arXiv
  41. Reza Baghdadi, Ekkehart Schmidt, Saman Jahani, Ilya Charaev, Michael G W Müller, Marco Colangelo, Di Zhu, Konstantin Ilin, Alexej D Semenov, Zubin Jacob, Michael Siegel and Karl K Berggren “Enhancing the performance of superconducting nanowire-based detectors with high-filling factor by using variable thickness” Supercond. Sci. Technol. 34, 3 (2021) | arXiv
  42. Brenden A Butters, Reza Baghdadi, Murat Onen, Emily A Toomey, Owen Medeiros and Karl K Berggren “A scalable superconducting nanowire memory cell and preliminary array test” Superconductor Science and Technology 34, Number 3 (2021)
  43. Jeffrey Holzgrafe, Neil Sinclair, Di Zhu, Amirhassan Shams-Ansari, Marco Colangelo, Yaowen Hu, Mian Zhang, Karl K. Berggren, Marko Lončar “Cavity electro-optics in thin-film lithium niobate for efficient microwave-to-optical transduction” Optica 7, Issue 12 (2020) | arXiv
  44. Glenn D. Martinez, Drew Buckley, Ilya Charaev, Andrew Dane, Douglas E. Dow, Karl K. Berggren “Superconducting Nanowire Fabrication on Niobium Nitride using Helium Ion Irradiation” (2020): Available on arXiv only.
  45. Reza Baghdadi, Jason P. Allmaras, Brenden A. Butters, Andrew E. Dane, Saleem Iqbal, Adam N. McCaughan, Emily A. Toomey, Qing-Yuan Zhao, Alexander G. Kozorezov, and Karl K. Berggren “Multilayered Heater Nanocryotron: A Superconducting-Nanowire-Based Thermal Switch” Phys. Rev. Applied 14 (2020)
  46. K. Berggren, Q. Xia, K.K. Likharev, D.B. Strukov, H. Jiang, T. Mikolajick, D. Querlioz, M. Salinga, J.R. Erickson, S. Pi, F. Xiong, P. Lin, C. Li, Y. Chen, S. Xiong, B.D Hoskins, M.W. Daniels, A. Madhavan, J.A. Liddle, J.J. McClelland, Y. Yang, J. Rupp, S.S. Nonnenmann, K.-T. Cheng, N. Gong, M.A. Lastras-Montaño, A.A. Talin, A. Salleo, B.J. Shastri, T. Ferreira de Lima, P. Prucnal, A.N. Tait, Y. Shen, H. Meng, C. Roques-Carmes, Z. Cheng, H. Bhaskaran, D. Jariwala, H. Wang, J.M. Shainline, K. Segall, J.J. Yang, K. Roy, S. Datta, and A. Raychowdhury “Roadmap on emerging hardware and technology for machine learning” Nanotechnology 32 (2020)
  47. Emily Toomey, Ken Segall, Matteo Castellani, Marco Colangelo, Nancy Lynch, Karl K. Berggren “Superconducting Nanowire Spiking Element for Neural Networks” Nano Letters 20.11 (2020) | arXiv
  48. Mengjie Zheng, Yujia Yang, Peng Liu, Huigao Duan, Phillip D. Keathley, Karl K.Berggren “Fabrication of gold nanostructures using wet lift-off without adhesion promotion” Microelectronic Engineering 233 (2020)
  49. Yujia Yang, Richard G. Hobbs, Phillip D. Keathley, and Karl K. Berggren “Electron energy loss of ultraviolet plasmonic modes in aluminum nanodisks” Optics Express 28, Issue 19 (2020) | arXiv
  50. Giulio Maria Rossi, Roland E. Mainz, Yudong Yang, Fabian Scheiba, Miguel A. Silva-Toledo, Shih-Hsuan Chia, Phillip D. Keathley, Shaobo Fang, Oliver D. Mücke, Cristian Manzoni, Giulio Cerullo, Giovanni Cirmi & Franz X. Kärtner “Sub-cycle millijoule-level parametric waveform synthesizer for attosecond science” Nature Photonics 14 (2020)
  51. Yujia Yang, Marco Turchetti, Praful Vasireddy, William P. Putnam, Oliver Karnbach, Alberto Nardi, Franz X. Kärtner, Karl K. Berggren, Phillip D. Keathley “Light Phase Detection with On-Chip Petahertz Electronic Networks” Nature Communications 11 (2020) | arXiv
  52. Yujia Yang, Chung-Soo Kim, Richard G.Hobbs, Phillip D.Keathley, Karl K.Berggren “Nanostructured-membrane electron phase plates” Ultramicroscopy 217 (2020) | arXiv
  53. Luca Pedrelli, Phillip D. Keathley, Laura Cattaneo, Franz X. Kärtner, Ursula Keller “Complete phase retrieval of photoelectron wavepackets” New Journal of Physics 22 (2020) | arXiv
  54. Ilya Charaev, Yukimi Morimoto, Andrew Dane, Akshay Agarwal, Marco Colangelo, Karl K. Berggren “Large-area microwire MoSi single-photon detectors at 1550 nm wavelength” Appl. Phys. Lett. 116 (2020) | arXiv
  55. Di Zhu, Marco Colangelo, Changchen Chen, Boris A. Korzh, Franco N. C. Wong, Matthew D. Shaw, Karl K. Berggren “Resolving photon numbers using a superconducting tapered nanowire detector” Nano Letters (2020) | arXiv
  56. Minxu Peng, John Murray-Bruce, Karl K.Berggren, Vivek K. Goyal “Source shot noise mitigation in focused ion beam microscopy by time-resolved measurement” Ultramicroscopy 211 (2020) | arXiv
  57. B. A. Korzh, Q-Y. Zhao, J. P. Allmaras, S. Frasca, T. M. Autry, E. A. Bersin, A. D. Beyer, R. M. Briggs, B. Bumble, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, A. E. Lita, F. Marsili, G. Moody, C. Pena, E. Ramirez, J. D. Rezac, N. Sinclair, M. J. Stevens, A. E. Velasco, V. B. Verma, E. E. Wollman, S. Xie, D. Zhu, P. D. Hale, M. Spiropulu, K. L. Silverman, R. P. Mirin, S. W. Nam, A. G. Kozorezov, M. D. Shaw, K. K. Berggren “Demonstration of sub-3 ps temporal resolution with a superconducting nanowire single-photon detector” Nature Photonics 14 (2020) | arXiv
  58. Hyun Su Yun, Hyung Wan Do, Karl K. Berggren, Caroline A Ross, Hong Kyoon Choi “Commensurability-driven Orientation Control during Block Copolymer Directed Self-assembly” ACS Appl. Mater. Interfaces 12 (2020)
  59. M.-H. Nguyen, G. J. Ribeill, M. V. Gustafsson, S. Shi, S. V. Aradhya, A. P. Wagner, L. M. Ranzani, L. Zhu, R. Baghdadi, B. Butters, E. Toomey, M. Colangelo, P. A. Truitt, A. Jafari-Salim, D. McAllister, D. Yohannes, S. R. Cheng, R. Lazarus, O. Mukhanov, K. K. Berggren, R. A. Buhrman, G. E. Rowlands, T. A. Ohki “Cryogenic Memory Architecture Integrating Spin Hall Effect based Magnetic Memory and Superconductive Cryotron Devices” Scientific Reports 10 (2020) | arXiv
  60. Murat Onen, Marco Turchetti, Brenden A. Butters, Mina R. Bionta, Phillip D. Keathley, Karl K. Berggren “Single-Photon Single-Flux Coupled Detectors” Nanoletters 20 (2019) | arXiv
  61. Yi Yang, Di Zhu, Wei Yan, Akshay Agarwal, Mengjie Zheng, John D. Joannopoulos, Philippe Lalanne, Thomas Christensen, Karl K. Berggren & Marin Soljačić “A general theoretical and experimental framework for nanoscale electromagnetism” Nature 576 (2019) | arXiv
  62. Chung-Soo Kim, Richard G Hobbs, Akshay Agarwal, Yang Yang, Vitor R Manfrinato, Michael P Short, Ju Li, and Karl K Berggren “Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication” Nanotechnology 31 (2019)
  63. Murat Onen, Brenden A. Butters, Emily Toomey, Tayfun Gokmen, Karl K. Berggren “Design and Characterization of Superconducting Nanowire-Based Processors for Acceleration of Deep Neural Network Training” Nanotechnology 31 (2019) | arXiv
  64. Yonit Hochberg, Ilya Charaev, Sae-Woo Nam, Varun Verma, Marco Colangelo, and Karl K. Berggren “Detecting sub-GeV dark matter with superconducting nanowires” Phys. Rev. Lett. 123 (2019) | arXiv
  65. Emily Toomey, Marco Colangelo, and Karl K. Berggren “Investigation of ma-N 2400 series photoresist as an electron-beam resist for superconducting nanoscale devices” Journal of Vacuum Science & Technology B 37 (2019)
  66. Edward Schroeder,Philip Mauskopf, Hamdi Mani, Sean Bryan, Karl K. Berggren, Di Zhu “Operation of a Superconducting Nanowire in Two Detection Modes: KID and SPD” Journal of Low Temperature Physics 194 (2019) | arXiv
  67. Emily Toomey, Ken Segall, Karl K. Berggren “Design of a Power Efficient Artificial Neuron Using Superconducting Nanowires” Frontiers in Neuroscience 13 (2019) | arXiv
  68. P. D. Keathley, W. P. Putnam, P. Vasireddy, R. G. Hobbs, Y. Yang, K. K. Berggren & F. X. Kärtner “Vanishing carrier-envelope-phase-sensitive response in optical-field photoemission from plasmonic nanoantennas” Nature Physics (2019) SharedIt
  69. Di Zhu, Marco Colangelo, Boris A. Korzh, Qing-Yuan Zhao, Simone Frasca, Andrew E. Dane, Angel E. Velasco, Andrew D. Beyer, Jason P. Allmaras, Edward Ramirez, William J. Strickland, Daniel F. Santavicca, Matthew D. Shaw, Karl K. Berggren “Superconducting nanowire single-photon detector with integrated impedance-matching taper” Applied Physics Letters 114 (2019) | arXiv
  70. Charles Roques-Carmes, Steven E. Kooi, Yi Yang, Aviram Massuda, Phillip D. Keathley, Aun Zaidi, Yujia Yang, John D. Joannopoulos, Karl K. Berggren, Ido Kaminer, Marin Soljačić “Towards integrated tunable all-silicon free-electron light sources” Nature Communications 10 (2019)
  71. Akshay Agarwal, Karl K. Berggren, Yuri J. van Staaden, Vivek Goyal “Reduced damage in electron microscopy by using interaction-free measurement and conditional re-illumination” Physical Review A 99 (2019) | ArXiv.
  72. Owen Medeiros, Marco Colangelo, Ilya Charaev, Karl K Berggren “Measuring thickness in thin NbN films for superconducting devices” Journal of Vacuum Science & Technology A 37, 041501 (2019) arXiv
  73. D. F. Santavicca, B. Noble, G. A. Wurtz, M. Colangelo, D. Zhu, K. K. Berggren “Jitter Characterization of a Dual-Readout SNSPD” IEEE Transactions on Applied Superconductivity 29, 5 (2019) | arXiv
  74. J.P. Allmaras, A.G. Kozorezov, B.A. Korzh, K.K. Berggren, and M.D. Shaw “Intrinsic Timing Jitter and Latency in Superconducting Nanowire Single-photon Detectors” Phys. Rev. Applied 11 (2019) | arXiv
  75. Ilya Charaev, Andrew Dane, Akshay Agarwal, Karl K. Berggren “Enhancement of optical response in nanowires by negative-tone PMMA lithography” IEEE Transactions on Applied Superconductivity (2019) | arXiv
  76. Emily Toomey, Murat Onen, Marco Colangelo, Brenden A. Butters, Adam N. McCaughan, Karl K. Berggren “Bridging the gap between nanowires and Josephson junctions: a superconducting device based on controlled fluxon transfer” Physical Review Applied 11 (2019) | arXiv
  77. Marco Turchetti, Chung-Soo Kim, Richard Hobbs, Yujia Yang, Pieter Kruit, Karl K. Berggren “Design and Simulation of a Linear Electron Cavity for Quantum Electron Microscopy” Ultramicroscopy 119 (2019) | pdf
  78. Yujia Yang, Chung-Soo Kim, Richard G. Hobbs, Pieter Kruit, and Karl K. Berggren “Efficient two-port electron beam splitter via a quantum interaction-free measurement” Phys. Rev. A 98, 043621 (2018) | arXiv
  79. Emily Toomey, Marco Colangelo, Navid Abedzadeh, and Karl K. Berggren, “Influence of tetramethylammonium hydroxide (TMAH) on niobium nitride thin films” Journal of Vacuum Science and Technology B 36, 06JC01 (2018) | pdf
  80. Qing-Yuan Zhao, Daniel F. Santavicca, Di Zhu, Brian Noble, and Karl K. Berggren “A distributed electrical model for superconducting nanowire single photon detectors” Applied Physics Letters 113 (2018) | arXiv
  81. Tsung-Ju Lu, Michael Fanto, Hyeongrak Choi, Paul Thomas, Jeffrey Steidle, Sara Mouradian, Wei Kong, Di Zhu, Hyowon Moon, Karl Berggren, Jeehwan Kim, Mohammad Soltani, Stefan Preble, and Dirk Englund. “Aluminum nitride integrated photonics platform for the ultraviolet to visible spectrum” Optics Express 26, 9 (2018) | pdf
  82. Aviram Massuda, Charles Roques-Carmes, Yujia Yang, Steven E. Kooi, Yi Yang, Chitraang Murdia, Karl K. Berggren, Ido Kaminer, and Marin Soljacic. “Smith–Purcell Radiation from Low-Energy Electrons” ACS Photonics 5 (2018) | arXiv
  83. Emily Toomey, Qing-Yuan Zhao, Adam N. McCaughan, Karl K. Berggren. “Frequency pulling and mixing of relaxation oscillations in superconducting nanowires” Physical Review Applied 9, 6 (2018) | pdf
  84. Di Zhu, Qing-Yuan Zhao, Hyeongrak Choi, Tsung-Ju Lu, Andrew E. Dane, Dirk R. Englund, Karl K. Berggren. “A scalable multi-photon coincidence detector based on superconducting nanowires” Nature Nanotechnology (2018) | SharedIt link
  85. Kristen A. Sunter and Karl K. Berggren. “Optical modeling of superconducting nanowire single photon detectors using the transfer matrix method” Applied Optics 57, 17 (2018)
  86. Qing-Yuan Zhao, Emily A. Toomey, Brenden Butters, Adam N McCaughan, Andrew Dane, Sae Woo Nam and Karl K Berggren. “A compact superconducting nanowire memory element operated by nanowire cryotrons” Superconductor Science and Technology 31, 3 (2018) | arXiv
  87. Ranveig Flatabø, Akshay Agarwal, Richard Hobbs, Martin M Greve, Bodil Holst and Karl K Berggren “Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure” Nanotechnology 29, 27 (2018) | pdf
  88. Karl K Berggren, Qing-Yuan Zhao, Nathnael Abebe, Minjie Chen, Prasana Ravindran, Adam McCaughan and Joseph C Bardin “A superconducting nanowire can be modeled by using SPICE” Superconductor Science and Technology 31, 5 (2018) | pdf | source code
  89. Zeeshan Ahmed et al. “Quantum Sensing for High Energy Physics” arXiv (2018)
  90. Andrew E. Dane, Adam N. McCaughan, Di Zhu, Qingyuan Zhao, Chung-Soo Kim, Niccolo Calandri, Francesco Bellei, Karl K. Berggren. “Bias Sputtered NbN and Superconducting Nanowire Devices” Applied Physics Letters (2017)
  91. Ranveig Flatabø, Martin M. Greve, Sabrina D. Eder, Matthias Kalläne, Adrià Salvador Palau, Karl K. Berggren, and Bodil Holst. “Atom sieve for nanometer resolution neutral helium microscopy.”   Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 35 (2017) | pdf
  92. Richard G. Hobbs, William P. Putnam, Arya Fallahi, Yujia Yang, Franz X. Kartner,and Karl K. Berggren. “Mapping Photoemission and Hot-Electron Emission from Plasmonic Nanoantennas” Nano Letters (2017) | pdf
  93. Yachin Ivry, Jonathan J. Surick, Maya Barzilay, Chung-Soo Kim, Faraz Najafi, Estelle Kalfon-Cohen, Andrew D. Dane, Karl K. Berggren.  “Superconductor-superconductor bilayers for enhancing single-photon detection” Nanotechnology (2017)
  94. Won Min Park, Mostafa Bedewy, Karl K. Berggren and Amy E. Keating. “Modular assembly of a protein nanotriangle using orthogonally interacting coiled coils.”  Scientific Reports 7 (2017) | pdf
  95. Akshay Agarwal, Chung-Soo Kim, Richard Hobbs, Dirk van Dyck, Karl K. Berggren. “A nanofabricated, monolithic, path-Optics separated electron interferometer.”  Scientific Reports 7. (2017) | video | pdf
  96. Qing-Yuan Zhao, Di Zhu, Niccolò Calandri, Andrew E. Dane, Adam N. McCaughan, Francesco Bellei, Hao-Zhu Wang, Daniel F. Santavicca, Karl K. Berggren, “Single-photon imager based on a superconducting nanowire delay line.” Nature Photonics 11, 247–251 (2017) | arXiv
  97. Qing-Yuan Zhao, Adam N. McCaughan, Andrew E. Dane, Karl K. Berggren, Thomas Ortlepp. “A nanoCryotron comparator can connect single-flux quantum circuits to conventional electronics“. Superconducting Science and Technology 30, 044002 (2017) | arXiv
  98. Hong Kyoon Choi, Jae-Byum Chang, Adam F. Hannon, Joel K. W. Yang, Karl K. Berggren, Alfredo Alexander-Katz and Caroline A Ross. “Nanoscale spirals by directed self-assembly“. Nano Futures 1, 015001 (2017)
  99. William P. Putnam, Richard G. Hobbs, Phillip D. Keathley, Karl K. Berggren, and Franz X. Kärtner. “Optical-field-controlled photoemission from plasmonic nanoparticles” Nature Physics 13, 335–339 (2017).
  100. Adam N. McCaughan, Nathaniel S. Abebe, Qing-Yuan Zhao, and Karl K. Berggren. “Using geometry to sense current.” Nano Letters 16 (12), 7626–7631 (2016) | arXiv
  101. R. G. Hobbs, V. R. Manfrinato, Y. Yang, S. A. Goodman, L. Zhang, Eric A. Stach, and Karl K. Berggren. “High-energy surface and volume plasmons in nanopatterned sub-10-nm aluminum nanostructures“Nano Lett. 16 (7), 4149–4157 (2016).| pdf
  102. Niccolò Calandri, Qing-Yuan Zhao, Di Zhu, Andrew Dane, and Karl K.Berggren. “ Superconducting nanowire detector jitters limited by detector geometry.” Appl. Phys. Lett., 109, 152601 (2016) | arXiv
  103. Amirhasan Nourbakhsh, Ahmad Zubair, Redwan N. Sajjad, Amir Tavakkoli K. G., Wei Chen, Shiang Fang, Xi Ling, Jing Kong, Mildred S. Dresselhaus, Efthimios Kaxiras, Karl K. Berggren, Dimitri Antoniadis, and Tomás Palacios. “MoS2 Field-Effect Transistor with Sub-10 nm Channel Length.“Nano Lett., 16 (12), 7798–7806 (2016)| pdf
  104. Kärtner, F. X. et al.AXSIS: “ Exploring the frontiers in attosecond X-ray science, imaging and spectroscopy.” Nucl. Instrum. Methods Phys. Res. Sect. Accel. Spectrometers Detect. Assoc. Equip.829, 24–29 (2016)
  105. E. Schroeder, P. Mauskopf, G. Pilyavsky, A. Sinclair, N. Smith, S. Bryan, H. Mani, D. Morozov, K. Berggren, D. Zhu, K. Smirnov, Y. Vakhtomin. “On the measurement of intensity correlations from laboratory and astronomical sources with SPADs and SNSPDs.” Proc. SPIE 9907, Optical and Infrared Interferometry and Imaging V, 99070P (August 4, 2016); doi:10.1117/12.2233536.
  106. D. F. Santavicca, J. K. Adams, L. E. Grant, A. N. McCaughan, & K. K. Berggren. “ Microwave dynamics of high aspect ratio superconducting nanowires studied using self-resonance.” Journal of Applied Physics 119, 234302 (2016). | arXiv
  107. A. N. McCaughan, Q. Zhao, K. K. Berggren. “nanoSQUID operation using kinetic rather than magnetic induction“Scientific Reports 6, 28095 (2016). [Corrigendum] | pdf | pdf corrigendum
  108. P. Kruit, R.G. Hobbs, C-S. Kim, Y. Yang, V.R. Manfrinato, J. Hammer, S. Thomas, P. Weber, B. Klopfer, C. Kohstall, T. Juffmann, M.A. Kasevich, P. Hommelhoff, K.K. Berggren. “ Designs for a quantum electron microscope.” Ultramicroscopy 164, 31-45 (2016) | arXiv
  109. F. Najafi, F. Marsili, V. B. Verma, Q. Zhao, M. D. Shaw, K. K. Berggren, and S. W. Nam, “ Superconducting Nanowire Architectures for Single Photon Detection,” in Superconducting Devices in Quantum Optics, R. H. Hadfield and G. Johansson, Eds. Springer International Publishing, 2016, pp. 3–30.
  110. “Free space-coupled superconducting nanowire single photon detectors for infrared optical communications” Francesco Bellei, Alyssa P. Cartwright, Adam N. McCaughan, Andrew E. Dane, Faraz Najafi, Quinyuan Zhao, and Karl K. Berggren. ArXiv151105786 Phys. (2015). |  Opt. Express24, 3248-3257 (2016)

  111. “The Orientations of Large Aspect-Ratio Coiled-Coil Proteins Attached to Gold Nanostructures”, Jae-Byum Chang, Yong Ho Kim, Evan Thompson, Young Hyun No, Nam Hyeong Kim, Jose Arrieta, Vitor R. Manfrinato, Amy E. Keating & Karl K. Berggren. Small (2016) DOI: 10.1002/smll.201502419|arXiv

  112. “Multilayer block copolymer meshes by orthogonal self-assembly”, Amir Tavakkoli K. G., Samuel M. Nicaise, Karim R. Gadelrab, Alfredo Alexander-Katz, Caroline A. Ross & Karl K. Berggren, Nature Communications 7, 10518(2016). DOI: 10.1038/ncomms10518  | MIT News | Science News | pdf
  113. “Dimensional Tailoring of Hydrothermally Grown Zinc Oxide Nanowire Arrays” Jayce J. Cheng, Samuel M. Nicaise, Karl K. Berggren, and Silvija Gradečak, Nano Lett., 16 (1), pp 753–759 (2016)
  114. “Infrared Transmissometer to Measure the Thickness of NbN Thin Films” Kristen A. Sunter, Andrew E. Dane, Christopher I. Lang, Karl K. Berggren, Applied Optics 54(18), 5743-5749 (2015) |arXiv
  115. “On-chip detection of non-classical light by scalable integration of single-photon detectors” Faraz Najafi, Jacob Mower, Nicholas C. Harris, Francesco Bellei, Andrew Dane, Catherine Lee, Xiaolong Hu, Prashanta Kharel, Francesco Marsili, Solomon Assefa, Karl K. Berggren, Dirk Englund, Nature Communications 6, 5873 (2015) | pdf | IEEE Spectrum Highlight
  116. “Fabrication process yielding saturated nanowire single-photon detectors with 24ps jitter” F. Najafi, A. Dane, F. Bellei, Q. Zhao, K. Sunter, A. McCaughan and K. K. Berggren, IEEE Journal on Selected Topics in Quantum Electronics 21(2), article number 3800507 (2015)
  117. “High-Yield, Ultrafast, Plasmon-Enhanced Au Nanorod Optical Field Emitter Arrays” Richard G Hobbs , Yujia Yang, Arya Fallahi, Phillip D. Keathley, Eva De Leo, Franz X. Kärtner, William S. Graves, and Karl K. Berggren, ACS Nano, 8(11), pp 11474–11482, (2014) | video | pdf
  118. “Control of zinc oxide nanowire array properties with electron beam lithography templating for PV applications” S.M. Nicaise, J.J. Cheng, A. Kiani, S. Gradecak, K.K. Berggren, Nanotechnology 26(7), pp. 075303 (2014) | IOPselect | pdf | video
  119. “High-density Au nanorod optical field-emitter arrays” R G Hobbs, Y Yang, P D Keathley, M E Swanwick, L F Velásquez-Garcíia, F X Kärtner, W S Graves and K K Berggren, Nanotechnology,  25(46), pp. 465304 (2014) | pdf
  120. “A superconducting-nanowire 3-terminal electrothermal device” Adam McCaughan, and Karl K. Berggren, Nano Letters, 14(10), pp. 5748–5753 (2014) | [arXiv] | video
  121. “Eight-fold signal amplification of a superconducting nanowire single-photon detector using a multiple-avalanche architecture” Qingyuan Zhao, Adam McCaughan, Andrew Dane, Faraz Najafi, Francesco Bellei, Domenico De Fazio, Kristen Sunter, Yachin Ivry, Karl K. Berggren, Optics Express, 22(20), pp. 24574-24581, (2014) | pdf | video
  122. “Determining the resolution limits of electron-beam lithography: direct measurement of the point-spread function” Manfrinato, Vitor; Wen, Jianguo; Zhang, Lihua; Yang, Yujia; Hobbs, Richard; Baker, Bowen; Su, Dong; Zakharov, Dmitri; Zaluzec, Nestor; Miller, Dean; Stach, Eric; Berggren, Karl, Nano Letters, 14(8), pp. 4406-4412 (2014) | video | pdf
  123. “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” Hyung Wan Do, Jae-Byum Chang, and Karl K. Berggren Journal of Vacuum Science and Technology B 32, 06F501 (2014).*JVSTB[2014]  preprint | video
  124. “Universal scaling of the critical temperature for thin films near the superconducting-to-insulating transition” Yachin Ivry, Chung-Soo Kim, Andrew E. Dane, Domenico De Fazio, Adam McCaughan, Kristen A. Sunter, Qingyuan Zhao and Karl K. Berggren, Phys. Rev. B, 90,  pp. 214515 (2014) | preprint | supp. info.
  125. “Design rules for self-assembled block copolymer patterns using tiled templates” Jae-Byum Chang, Hong Kyoon Choi, Adam F. Hannon, Alfredo Alexander-Katz, Caroline A. Ross & Karl K. Berggren, Nature Communications 5, 3305(2014) | preprint
  126. “Three-Dimensional Nanofabrication by Block Copolymer Self-Assembly” Caroline A. Ross, Karl K. Berggren, Joy Y. Cheng, Yeon Sik Jung, and Jae-Byum Chang, Advanced Materials, 26, 4386-4396 (2014)
  127. “Sacrificial-Post Templating Method for Block Copolymer Self-Assembly” Amir Tavakkoli K. G., Samuel M. Nicaise, Adam F. Hannon, Kevin W. Gotrik, Alfredo Alexander-Katz, Caroline A. Ross, Karl K. Berggren, small 10 (3), 418 (2014) (inside front cover)
  128. “Single-Photon Generation and Detection, Volume 45: Physics and Applications. Chapter 6: Detectors based on thermal effects”, Berggren, K.K. and Nam, S.-W. Volume editors: Alan Migdall , Sergey V. Polyakov , Jingyun Fan , Joshua C. Bienfang. Elsevier Science Publishing Co Inc San Diego, United States (2013)
  129. “Superconducting-nanowire single-photon-detector linear array” Qingyuan Zhao, Adam McCaughan, Francesco Bellei, Faraz Najafi, Domenico De Fazio, Andrew Dane, Yachin Ivry, and Karl K. Berggren, Applied Physics Letters 103,142602 (2013) | pdf
  130. “Improvement of infrared single-photon detectors absorptance by integrated plasmonic structures” Mária Csete, Áron Sipos, Anikó Szalai, Faraz Najafi, Gábor Szabo & Karl K. Berggren, Scientific Reports 3 : 2406 (2013) | pdf
  131. “Resolution limits of electron-beam lithography towards the atomic scale” Vitor R. Manfrinato, Lihua Zhang, Dong Su, Huigao Duan, Richard Hobbs, Eric A. Stach, and Karl K. Berggren, Nano Letters 13(4), (2013) | Featured Video | pdf
  132. “Controlled placement of colloidal quantum dots in sub-15-nm clusters” Vitor R. Manfrinato, Darcy D. Wanger, David B. Strasfeld, Hee-Sun Han, Francesco Marsili, Jose P. Arrieta, Tamar S. Mentzel, Moungi G. Bawendi, and Karl K. Berggren, Nanotechnology 24 125302 (2013) | preprint
  133. “Bubble nucleation on nano- to micro-size cavities and posts: An experimental validation of classical theory” S. Witharana, B. Phillips, S. Strobel, H. D. Kim, T. McKrell, J.-B. Chang, J. Buongiorno, K. K. Berggren, L. Chen, and Y. Ding, Journal of Applied Physics 112 064904 (2012) | full text
  134. “Efficient Single Photon Detection from 500 nm to 5 µm Wavelength” Francesco Marsili, Francesco Bellei, Faraz Najafi, Andrew E. Dane, Eric A. Dauler, Richard J. Molnar, and Karl K. Berggren Nano Letters 12(9) 4799-4804 (2012)
  135. “Rectangular Symmetry Morphologies in a Topographically Templated Block Copolymer” Amir Tavakkoli K. G., Adam F. Hannon, Kevin W. Gotrik, Alfredo Alexander-Katz, Caroline A. Ross, Karl K. Berggren Advanced Materials 24(31) 4249-4254 (2012) (Back Cover)
  136. “Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films” A. Tavakkoli K. G., K. W. Gotrik, A. F. Hannon, A. Alexander-Katz, C. A. Ross, K. K. Berggren, Science 336 1294-1298 (2012) | full text | Nature Nanotechnology|Research Highlights | Video on Templated Self-Assembly
  137. “Single Photon Counting from Individual Nanocrystals in the Infrared” Raoul E. Correa, Eric A. Dauler, Gautham Nair, Si H. Pan, Danna Rosenberg, Andrew J. Kerman, Richard J. Molnar, Xiaolong Hu, Francesco Marsili, Vikas Anant, Karl K. Berggren, and Moungi G. Bawendi, Nano Letters 12(6) 2953 (2012)
  138. “Critical-current reduction in thin superconducting wires due to current crowding” H. L. Hortensius, E. F. C. Driessen, T. M. Klapwijk, K. K. Berggren, and J. R. Clem, Applied Physics Letters 100 182602 (2012) | full text
  139. “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors” F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, K. K. Berggren, Applied Physics Letters 100 152602 (2012) | full text
  140. “Aligned Sub-10-nm Block Copolymer Patterns Templated by Post Array” Jae-Byum Chang, Jeong Gon Son, Adam F. Hannon, Alfredo Alexander-Katz, Caroline A. Ross, and Karl K. Berggren, ACS Nano 6(3) 2071 (2012)  | full text
  141. “Afterpulsing and Instability in Superconducting Nanowire Avalanche Photodetectors” F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, K. K. Berggren, Applied Physics Letters 100 112601 (2012) | full text
  142. “Optical nano-antennae boost speed and efficiency of single-photon detectors” XIAOLONG HU and KARL K. BERGGREN, Laser Focus World 01/01/2012
  143. “Assembly of sub-10-nm block copolymer patterns with mixed morphology and period using electron irradiation and solvent annealing” Jeong Gon Son, Jae-Byum Chang, Karl K. Berggren, and Caroline A. Ross, Nano Letters 11(11), 5079 (2011)
  144. “Highly ordered square arrays from a templated ABC triblock terpolymer” Jeong Gon Son, Jessica Gwyther, Jae-Byum Chang, Karl K. Berggren, Ian Manner, and Caroline A. Ross, Nano Letters 11(7), 2849 (2011)
  145. “Numerical method to optimize the Polar-Azimuthal Orientation of Infrared Superconducting Nanowire Single-Photon Detectors” Csete, Mária; Sipos, Áron; Najafi, Faraz; Hu, Xiaolong; Berggren, Karl K, Applied Optics 50(31), 5949-5956 (2011) | full text.
  146. “Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si” J. C. van Oven, F. Berwald, K. K. Berggren, P. Kruit, and C. W. Hagen, Journal of Vacuum Science and Technology B 29, 06F305 (2011)*JVSTB[8] | full text.
  147. John R. Clem and Karl K. Berggren, “Geometry-dependent critical currents in superconducting nanocircuits,” Physical Review B 84, 174510 (2011). | full text . Copyright 2011 by the American Physical Society.
  148. “In situ study of hydrogen sisesquioxane dissolution rate in salty and electrochemical developers” Katherine J. Harry, Sebastian Strobel, Joel K. W. Yang, Huigao Duan, and Karl K. Berggren, Journal of Vacuum Science and Technology B 29, 06FJ01 (2011).*JVSTB[8] | full text.
  149. “Controlled Collapse of High-Aspect-Ratio Nanostructures,” Huigao Duan, Joel K. W. Yang, Karl K. Berggren, Small 7(18) 2661-2668 (2011). | full text
  150. “Neon Ion Beam Lithography (NIBL),” Donald Winston , Vitor R Manfrinato , Samuel M Nicaise , Lin Lee Cheong , Huigao Duan , David Ferranti , Jeff Marshman , Shawn McVey , Lewis A Stern , John A Notte , and Karl Berggren, Nano Letters 11(10) 4343-4347(2011). | full text | Nature Nanotechnology | Research Highlights) | Press Coverage.
  151. “Electrochemical development of hydrogen silsesquioxane by applying an electrical potential,” Sebastian Strobel, Katherine J Harry, Huigao Duan, Joel K W Yang, Vitor R Manfrinato and Karl K Berggren, Nanotechnology 22 375301(2011). | full text.
  152. “Modeling the point-spread function in helium-ion lithography,” D. Winston, J. Ferrera, L. Battistella, A. E. Vladár, K. K. Berggren, Scanning 24(2) 121-128 (2011). | full text.
  153. “Sub-5 keV Electron-Beam Lithography in Hydrogen Silsesquioxane Resist,” Vitor R. Manfrinato, Lin Lee Cheong, Huigao Duan, Donald Winston, Henry I. Smith, Karl K. Berggren, Journal of Microelectronic Engineering  88(2011) 3070-3074. | full text
  154. “Single-Photon Detectors Based on Ultranarrow Superconducting Nanowires,” Francesco Marsili, Faraz Najafi, Eric Dauler, Francesco Bellei, Xiaolong Hu, Maria Csete, Richard J. Molnar, and Karl K. Berggren, Nano Letters  11(5) 2048 (2011). | full text
  155. “Electrothermal simulation of superconducting nanowire avalanche photodetectors,” Francesco Marsili, Faraz Najafi, Charles Herder, Karl K. Berggren, Applied Physics Letters  98 093507 (2011). | full text .
  156. “Superconducting nanowire single-photon detectors integrated with optical nano-antennae,” Xiaolong Hu, Eric A. Dauler, Richard J. Molnar, and Karl K. Berggren, Optics Express  19(1) 17-31 (2011). | full text .
  157. “Development of a simple, compact, low-cost interference lithography system,” Hasan Korre, Corey P. Fucetola, Jeremy A. Johnson, and Karl K. Berggren, Journal of Vacuum Science and Technology B 28 C6Q20 (2010).*JVSTB[7] | full text. | Instructional YouTube Video
  158. “Sub-10-nm Half-Pitch Electron-Beam Lithography by Using PMMA as a Negative Resist,” Huigao Duan, Donald Winston, Joel K. W. Yang, Bryan M. Cord, Vitor R. Manfrinato, and Karl K. Berggren, Journal of Vacuum Science and Technology B  28 C6C58-C6C62 (2010).*JVSTB[7] | full text .
  159. “Superconducting microfabricated ion traps,” Shannon X. Wang, Yufei Ge, Jaroslaw Labaziewicz, Eric Dauler, Karl K. Berggren and Isaac L. Chuang, Applied Physics Letters  97 244102 (2010). | full text
  160. “The Scanning Electron Microscope As An Accelerator For The Undergraduate Advanced Physics Laboratory,” Randolph S. Peterson, Karl K. Berggren, and Mark Mondol, CAARI 2010: 21st International Conference on the Application of Accelerators in Research and Industry, Denton, TX; AIP. | full text
  161. “Sub-10-nm Structures on Silicon by Thermal Dewetting of Platinum,” Sebastian Strobel, Christopher Kirkendall, Jae-Byum Chang, and Karl K. Berggren, Nanotechnology  21 (2010) 505301. | full text
  162. “Metrology for electron-beam lithography and resist contrast at the sub-10nm scale,” Huigao Duan, Vitor R. Manfrinato, Joel K. W. Yang, Donald Winston, Bryan M. Cord, and Karl K. Berggren, Journal of Vacuum Science and Technology B  vol. 28, no. 6, pp. H11-H17, (2010).*JVSTB[1] | full text
  163. “Enhancing the potential of block copolymer lithography with polymer self-consistent field theory simulations,” R. A. Mickiewicz, J. K. W. Yang, A. F. Hannon, Y.-S. Jung, A. Alexander-Katz, K. K. Berggren, and C. A. Ross, Macromolecules  vol. 43, no. 19, pp. 8290-8295, (2010). | full text
  164. “Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion,” Huigao Duan and Karl K. Berggren, Nano Letters 10 (9), 3710-3716 (2010).| full text
  165. “High-order temporal coherences of chaotic and laser light,” Martin J. Stevens, Burm Baek, Eric A. Dauler, Andrew J. Kerman, Richard J. Molnar, Scott A. Hamilton, Karl K. Berggren, Richard P. Mirin, and Sae Woo Nam , Optics Express 18, pp. 1430-1437 (2010) | full text.
  166. “High-quality fiber-optic polarization entanglement distribution at 1.3µm telecom wavelength,” Tian Zhong, Xiaolong Hu, Franco N. C. Wong, Karl K. Berggren, Tony D. Roberts, and Philip Battle, Optics Letters 35, pp. 1392-1394 (2010).| full text
  167. “Complex self-assembled patterns using sparse commensurate templates with locally varying motifs,” Joel K. W. Yang, Yeon Sik Jung, Jae-Byum Chang, R. A. Mickiewicz, A. Alexander-Katz, C. A. Ross and Karl K. Berggren, Nature Nanotechnology 5, pp. 256-260 (2010).| News and Views concerning this paper.
  168. “A Path to Ultranarrow Patterns Using Self-Assembled Lithography,” Yeon Sik Jung, J. B. Chang, Eric Verploegen, Karl K. Berggren and C. A. Ross, Nano Letters 10, pp. 1000-1005 (2010). | full text
  169. “Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer,” Sung-Wook Nam, Michael J. Rooks, Joel K. W. Yang, Karl K. Berggren, Hyun-Mi Kim, Min-Hyun Lee, Ki-Bum Kima, Jae Hwan Sim and Do Yeung Yoon, Journal of Vacuum Science and Technology B 27, pp. 2635-2639 (2009). *JVSTB[1] | full text
  170. “Low-cost Interference Lithography,” Corey P. Fucetola, Hasan Korre and Karl K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2958-2961 (2009).*JVSTB[1] | full text
  171. “Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist,” D. Winston, B. M. Cord, B. Ming, D. C. Bell, W. F. DiNatale, L. A. Stern, A. E. Vladar, M. T. Postek, M. K. Mondol, J. K. W. Yang, and K. K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2702-2706 (2009).*JVSTB[1] | full text
  172. “Understanding of Hydrogen Silsesquioxane Electron Resist for Sub-5-nm-Half-Pitch Lithography,” Joel K.W. Yang, Bryan Cord, Karl K. Berggren, Joseph Klingfus, Sung-Wook Nam, Ki-Bum Kim, and Michael J. Rooks, Journal of Vacuum Science and Technology B 27, pp. 2622-2627 (2009).*JVSTB[1] | full text
  173. “Sub-15-nm nanoimprint molds and pattern transfer,” Debbie Morecroft, Joel K.W. Yang, Simon Schuster, Karl K. Berggren, Qiangfei Xia, Wei Wu, and R. Stanley Williams, Journal of Vacuum Science and Technology B 27, pp. 2837-2840 (2009).*JVSTB[1] | full text
  174. “Limiting Factors in Sub-10-nm Scanning-Electron-Beam Lithography,” Bryan Cord, Joel Yang, Huigao Duan, David C. Joy, Joseph Klingfus, and Karl K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2616-2621 (2009).*JVSTB[1] | full text
  175. “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Xiaolong Hu, Tian Zhong, James E. White, Eric A. Dauler, Faraz Najafi, Charles H. Herder, Franco N. C. Wong, and Karl K. Berggren, Optics Letters 34, pp. 3607-3609 (2009). | full text
  176. Andrew J. Kerman, Joel K.W. Yang, Richard J. Molnar, Eric A. Dauler, and Karl K. Berggren, “Electrothermal feedback in superconducting nanowire single-photon detectors,” Physical Review B 79, 100509 (2009). | full text Copyright 2009 by the American Physical Society.
  177. “Efficiently Coupling Light to Superconducting Nanowire Single-Photon Detectors,” Xiaolong Hu, Charles W. Holzwarth, Daniele Masciarelli, Eric A. Dauler, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity 19, pp. 336-340 (2009). | full text
  178. “Suppressed Critical Current in Superconducting Nanowire Single-Photon Detectors With High Fill-Factors,” Joel K. W. Yang, Andrew J. Kerman, Eric A. Dauler, Bryan Cord, Vikas Anant, Richard J. Molnar, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity 19, pp. 318-322 (2009). | full text
  179. “Photon-number-resolution with sub-30-ps timing using multi-element superconducting nanowire single photon detectors,” Eric A. Dauler, Andrew J. Kerman, Bryan S. Robinson, Joel K. W. Yang, Boris Voronov, Gregory Gol’tsman, Scott A. Hamilton, and Karl K. Berggren, Journal of Modern Optics 56, pp. 364-373 (2008). | full text.
  180. “Si-Containing Block Copolymers for Self-Assembled Nanolithography (invited),” C.A. Ross, Y.S. Jung, V.P.Chuang, F. Ilievski, J.K.W. Yang, I. Bita, E.L. Thomas, H.I. Smith, K.K. Berggren, J.G.Vansco, and J.Y. Cheng, Journal of Vacuum Science and Technology B 26, pp.2489-2494 (2008). | full text*JVSTB[2]
  181. E.A. Dauler, M.J. Stevens, B. Baek, R. Molnar, S.A. Hamilton, R.P. Mirin, S.-W. Nam, and K.K. Berggren, “Measuring intensity correlations with a two-element superconducting nanowire single photon detector,” Physical Review A 78, 053826 (2008) (4 pages). | full text Copyright 2008 by the American Physical Society.
  182. “Sub-10 nm Nanoimprint Lithography by Wafer Bowing,” Wei Wu, W.M. Tong, J. Bartman, Y. Chen, R. Walmsley, Z. Yu, Q. Xia, I. Park, C. Picciotto, J. Gao, S.-Y. Wang, D. Morecroft, J.K.W. Yang, K.K. Berggren, and R.S. Williams, Nano Letters 8, pp. 3865-3869 (2008). | full text
  183. “Fabrication and Characterization of Suspended Uniaxial Tensile Strained-Si Nanowires for Gate-All-Around n-MOSFETs,” P. Hashemi, M. Canonico, J.K.W. Yang, L. Gomez, K.K. Berggren, and J. L. Hoyt, ECS (Electrochemical Society) Transactions, Vol. 16, No. 10, pp. 57-68, October 2008. | full text
  184. “Amplitude spectroscopy of a solid-state artificial atom,” David M. Berns, Mark S. Rudner, Sergio O. Valenzuela, Karl K. Berggren, William D. Oliver, Leonid S. Levitov, Terry P. Orlando, Nature 455, 51-57, (2008). | full text
  185. “Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates,” Ion Bita, Joel K. W. Yang, Yeon Sik Jung, Caroline A. Ross, Edwin L. Thomas, and Karl K. Berggren, Science 321, 939 (2008). | full text
  186. “Optical properties of superconducting nanowire single-photon detectors,” Vikas Anant, Andrew J. Kerman, Eric A. Dauler, Joel K.W. Yang, Kristine M. Rosfjord, and Karl K. Berggren,  Optics Express, 16, 10750 (2008). | full text
  187. “Controlling the optical properties of transparent media by mixing active and passive resonances,” Vikas Anant, Ayman F. Abouraddy, and Karl K. Berggren, arXiv:0711.5021 (2008)
  188. “Pulse Calibration and non-adiabatic control of solid-state artificial atoms,” Jona Bylander, Mark S. Rudner, Andrey V. Shytov, Sergio O. Valenzuela, David M. Berns, Karl K. Berggren, leonid S. Levitov, and William D. Oliver, Physical Review B, 80, 220506(R) (2009). | full text
  189. “Atomic-force lithography with interferometric tip-to-substrate position metrology,” Euclid E. Moon, Jan Kupec, Mark K. Mondol, Henry I. Smith, and Karl K. Berggren, Journal of Vacuum Science and Technology B, 25, 2284 (2007). *JVSTB[3] | full text
  190. “Optimal temperature for development of poly(methylmethacrylate),” Bryan Cord, Jodie Lutkenhaus, and Karl K. Berggren, Journal of Vacuum Science and Technology B, 25, 2013 (2007). JVSTB*[2] | full text
  191. “Using high-contrast salty development of hydrogen silsesquioxane for sub-10-nm half-pitch lithography,” Joel K. W. Yang and Karl K. Berggren, Journal of Vacuum Science and Technology B 25, 2025 (2007). | full text*JVSTB[3]
  192. “Pattern Generation by Using Multi-Step Room-Temperature Nanoimprint Lithography,” Stefan Harrer, Joel Yang, Giovanni Antonio Salvatore. Karl K. Berggren, Filip Ilievski, and Caroline A. Ross, IEEE Transactions on Nanotechnology, 6 639-644 (2007) . | abstract | full text
  193. “Multi-Element Superconducting Nanowire Single-Photon Detector,” Eric A. Dauler, Bryan S. Robinson, Andrew J. Kerman, Joel K. W. Yang, Kristine M. Rosfjord, Vikas Anant, Boris Voronov, Gregory Gol’tsman, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity, 17 279-284 (2007). | full text
  194. “Modeling the Electrical and Thermal Response of Superconducting Nanowire Single-Photon Detectors,”Joel K. W. Yang, Andrew J. Kerman, Eric A. Dauler, Vikas Anant, Kristine M. Rosfjord, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity, 17 581-585 (2007). | full text
  195. Janice C. Lee, William D. Oliver, Karl K. Berggren, and Terry P. Orlando, “Nonlinear resonant behavior of a dispersive readout circuit for a superconducting flux qubit,” Physical Review B75, 144505 (2007). | abstract | full text Copyright 2007 by the American Physical Society.
  196. “Constriction-limited detection efficiency of superconducting nanowire single-photon detectors,” Andrew J. Kerman, Eric A. Dauler, Joel K. W. Yang, Kristine M. Rosfjord, Karl K. Berggren, G. Gol’tsman, and B. Voronov, Applied Physics Letters, 90 101110 (2007). | abstract | full text.
  197. “Enhancing etch resistance of hydrogen silsesquioxane via postdevelop electron curing,” Joel K. W. Yang, Vikas Anant, and Karl K. Berggren, Journal of Vacuum Science and Technology B 24, 3157 (2006) .*JVSTB[4] | full text
  198. “Robust shadow-mask evaporation via lithographically controlled undercut,” B. Cord, C. Dames, K.K. Berggren, and J. Aumentado, Journal of Vacuum Science and Technology B 24, 3139 (2006).*JVSTB[4] | full text
  199. “Microwave-Induced Cooling of a Superconducting Qubit,” Sergio O. Valenzuela, William D. Oliver, David M. Berns, Karl K. Berggren, Leonid S. Levitov, and Terry P. Orlando, Science 314, 1589-92 (2006). | pdf
  200. Eric A. Dauler, Bryan S. Robinson, Andrew J. Kerman, Vikas Anant, Richard J. Barron, Karl K. Berggren, David O. Caplan, John J. Carney, Scott A. Hamilton, Kristine M. Rosfjord, Mark L. Stevens, Joel K. Yang, “1.25 Gbit/s photon-counting optical communications using a two-element superconducting nanowire single photon detector,” Proc. of SPIE Advanced Photon Counting Techniques, Wolfgang Becker; Ed., Vol. 6372, Oct (2006). | full text.
  201. “Nanowires detect individual infrared photons,” K.K. Berggren and A.J. Kerman, Laser Focus World, 42 87-89 (2006).(review article)
  202. D. M. Berns, W. D. Oliver, S. O. Valenzuela, A. V. Shytov, K. K. Berggren, L. S. Levitov, and T. P. Orlando, “Coherent Quasiclassical Dynamics of a Persistent Current Qubit,” Physical Review Letters 97, 150502 (2006). Copyright 2006 by the American Physical Society.
  203. “Superconducting Nanowire Photon-Counting Detectors for Optical Communications,” A.J. Kerman, E.A. Dauler, B.S. Robinson, R. Barron, D.O. Caplan, M.L. Stevens, J.J. Carney, S.A. Hamilton, W.E. Keicher, J.K.W. Yang, K. Rosfjord, V. Anant, and K.K. Berggren, Lincoln Laboratory Journal, 16, 217-224, (2006).(review article)
  204. “Kinetic-inductance-limited reset time of superconducting nanowire photon counters,” Andrew J. Kerman, Eric A. Dauler, William E. Keicher, Joel K. W. Yang, Karl K. Berggren, G. Gol’tsman, and B. Voronov, Applied Physics Letters, 88 111116 (2006). | abstract | full text | YouTube Video.
  205. “781-Mbit/s photon-counting optical communications using a superconducting nanowire detector,” Bryan S. Robinson, Andrew J. Kerman, Eric A. Dauler, Richard J. Barron, David O. Caplan, Mark L. Stevens, John J. Carney, and Scott A. Hamilton, Joel K. W. Yang, and Karl K. Berggren, Optics Letters , 31 444-446 (2006). | abstract | full text.
  206. “Nanowire Single-Photon Detector with an Integrated Optical Cavity and Anti-Reflection Coating” K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. Voronov, G. N. Gol’tsman, K. K. Berggren, Optics Express, 14 527-34 (2006). | abstract | full text.
  207. “Mach-Zehnder Interferometry in a Strongly Driven Superconducting Qubit,” William D. Oliver, Yang Yu, Janice C. Lee, Karl K. Berggren, Leonid S. Levitov, and Terry P. Orlando, Science, 310 1653-7 (2005) | abstract. | arXiv
  208. “Multi-Photon, Multi-Level Dynamics in a Superconducting Persistent-Current Qubit,” Y. Yu, W. D. Oliver, J. C. Lee, K. K. Berggren, L. S. Levitov, T. P. Orlando, preprint available at cond-mat/0508587 (in review).
  209. “Pumped quantum systems: immersion fluids of the future?” Vikas Anant, Magnus Radmark, Ayman F. Abouraddy, Thomas C. Killian, and Karl K. Berggren, J. Vac. Sci. Tech. B, 23, 2662-2667, (2005) | pdf | full text.
  210. “Fabrication Development for Nanowire GHz-Counting-Rate Single-Photon Detectors,” Joel K. W. Yang, Eric Dauler, Antonin Ferri, Aaron Pearlman, Aleksandr Verevkin, Gregory Gol’tsman, Boris Voronov, Roman Sobolewski, William E. Keicher, Karl K. Berggren, IEEE Trans. Appl. Supercond., 15, pp. 626-630, (2005) | full text.
  211. “Energy Relaxation Times in Nb Persistent Current Qubits,” Yang Yu, William D. Oliver, Janice C. Lee, Karl K. Berggren, and T. P .Orlando, IEEE Trans. Appl. Supercond., 15, pp. 845-848 (2005) | full text.
  212. “Resonant Readout of a Persistent Current Qubit,” Janice C. Lee, William D. Oliver, Terry P. Orlando, and Karl K. Berggren, IEEE Trans. on Appl. Supercond., 15, 841-844, (2005) | full text.
  213. Y. Yu, D. Nakada, J. C. Lee, B. Singh, D. S. Crankshaw, T. P. Orlando, K. K. Berggren, and W. D. Oliver, “Energy relaxation time between macroscopic quantum levels in a superconducting persistent-current qubit,” Phys. Rev. Lett., 92, 117904-1, (2004) | full text. Copyright 2004 by the American Physical Society.
  214. “Quantum Computing with Superconductors,” K. K. Berggren, Proc. of the IEEE, 92, 1630 (2004) | full text (review article).
  215. D. S. Crankshaw, K. Segall, D. Nakada, T. P. Orlando, L. S. Levitov, S. Lloyd, S. O. Valenzuela, N. Markovic, M. Tinkham, and K. K. Berggren, “dc measurements of macroscopic quantum levels in a superconducting qubit structure with a time-ordered meter,” Phys. Rev. B, 69, 144518-1, (2004). “Copyright 2004 by the Americal Physical Society.”
  216. K. Segall, D. Crankshaw, D. Nakada, T. P. Orlando, L.S. Levitov, S. Lloyd, N. Markovic, S. O. Valenzuela, M. Tinkham, and K. K. Berggren, “Impact of time-ordered measurements of the two states in a niobium superconducting qubit structure,” Phys. Rev. B 67, 220506 (2003). Copyright 2003 by the American Physical Society. | arXiv
  217. “Improved critical-current-density uniformity by using anodization,” D. Nakada, K. K. Berggren, E. Macedo, V. Liberman, and T. P. Orlando, IEEE Trans. Appl. Supercond. 13, 111 (2003). | full text
  218. “Experimental characterization of the two current states in a Nb persistent-current qubit,” K. Segall, D. S. Crankshaw, D. Nakada, B. Singh, J. Lee, T. P. Orlando, K. K. Berggren, N. Markovic, S. Valenzuela, M. Tinkham, IEEE Trans. Appl. Supercond. 13, 1009 (2003). | full text
  219. “Flux-based superconducting qubits for quantum computation,” T. P. Orlando, S. Lloyd, L. S. Levitov, K. K. Berggren, M. J .Feldman, M. F. Bocko, M. Tinkham, J. E. Mooij, C. J. P. Harmans, and C. H. van der Wal, Physica C 372, 194, (2001). | full text
  220. “Room-temperature testing for high critical-current-density Josephson junctions,” M. J. O’Hara, and K. K. Berggren, IEEE Trans. Appl. Supercond. 10, 1669 (2000). | full text
  221. “Measurement of the energy sensitivity of a superconductive comparator,” D. A. Feld, J. P. Sage, K. K. Berggren, and A. Siddiqui, IEEE Trans. Appl. Supercond. 9, 4361 (1999). | full text
  222. “Low Tc superconductive circuits fabricated on 150-mm-diameter wafers using a doubly planarized Nb/AlOx/Nb process,” K. K. Berggren, E. M. Macedo, D. A. Feld, and J. P. Sage, IEEE Trans. Appl. Supercond. 9, 3271 (1999). | full text
  223. “Evaluation of critical current density of Nb/Al/AlOx/Nb Josephson junctions using test structures at 300K,” K. K. Berggren, M. J. O’Hara, J. P. Sage, and A. H. Worsham, IEEE Trans. Appl. Supercond. 9, 3236 (1999). | full text
  224. “Localization of metastable atom beams with optical standing waves: nanolithography at the Heisenberg limit,” K. S. Johnson, J. H. Thywissen, N. H. Dekker, K. K. Berggren, A. P. Chu, R. Younkin, M. Prentiss, Science 280, 1583 (1998).
  225. R. Younkin, K. K. Berggren, E. Cheung, K. S. Johnson, M. Prentiss, A. J. Black, G. M. Whitesides, D. C. Ralph, C. T. Black, M. Tinkham, “Demonstration of a nanolithographic system using a self-assembled monolayer resist for neutral atomic cesium,” Proc. of SPIE Vol. 2995, 109-120 (1997).
  226. Kent S. Johnson, Karl K. Berggren, Andrew J. Black, Charles T. Black, Arthur P. Chu, Nynke H. Dekker, D. C. Ralph, Joseph H. Thywissen, Rebecca J. Younkin, Mara Goff Prentiss, Michael Tinkham, George M. Whitesides, “Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold,” Proc. of SPIE Vol. 2995, 97-108 (1997).
  227. “Nanostructure fabrication in silicon using cesium to pattern a self-assembled monolayer,” R. Younkin, K. K. Berggren, K. S. Johnson, M. Prentiss, D. C. Ralph, and G. M. Whitesides, Appl. Phys. Lett. 71, 1261 (1997).
  228. “Demonstration of a nanolithographic system using a self-assembled monolayer resist for neutral atomic cesium,” K. K. Berggren, R. Younkin, E. Cheung, M. Prentiss, A. J. Black, G. M. Whitesides, D. C. Ralph, C. T. Black, and M. Tinkham, Advanced Materials 9, 5255 (1997).
  229. “Self-assembled monolayers exposed by metastable argon and metastable helium for neutral atom lithography and atomic beam imaging,” A. Bard, K. K. Berggren, J. L. Wilbur, J. D. Gillaspy, S. L. Rolston, J. J. McClelland, W. D. Phillips, M. Prentiss, and G. M. Whitesides, J. Vac. Sci. Technol. B 15, 1805 (1997).
  230. “Nanofabrication using neutral atomic beams,” J. H. Thywissen, K. S. Johnson, R. Younkin, N. H. Dekker, K. K. Berggren, A. P. Chu, M. Prentiss, S. A. Lee, J. Vac. Sci. Tech. B 15, 2093 (1997).
  231. “Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold,” K. S. Johnson, K. K. Berggren, A. Black, C. T. Black, A. P. Chu, N. H. Dekker, D. C. Ralph, J. H. Thywissen, R. Younkin, M. Prentiss, G. M. Whitesides, Appl. Phys. Lett. 69, 2773 (1996).
  232. “A virtual slit for atomic optics and nanolithography,” A. P. Chu, K. K. Berggren, K. S. Johnson, M. G. Prentiss, Quantum and Semiclassical Optics 8, 521 (1996).
  233. “Demonstration of a blazed grating beam splitter for two level atoms,” K. S. Johnson, A. P. Chu, K. K. Berggren, M. Prentiss, Opt. Comm. 126, 326 (1996).
  234. “Microlithography by using neutral metastable atoms and self-assembled monolayers,” K. K. Berggren, A. Bard, J. L. Wilbur, A. G. Helg, J. D. Gillaspy, J. J. McClelland, S. L. Rolston, W. D. Phillips, M. Prentiss, G. M. Whitesides, Science 269, 1255 (1995).
  235. “Demonstration of a non-magnetic blazed grating atomic beam splitter,” K. S. Johnson, A. Chu, T. W. Lynn, K. K. Berggren, M. S. Shahriar, M. Prentiss, Opt. Lett. 20, 1310 (1995).
  236. “Calculation of atomic positions in nanometer-scale direct write optical lithography with an optical standing wave,” K. K. Berggren, M. Prentiss, G. L. Timp, R. E. Behringer, J. Opt. Soc. Am. B 11, 1166 (1994).
  237. G. L. Timp, R. E. Behringer, D. M. Tennant, J. E. Cunningham, M. Prentiss, and K. K. Berggren, “Using light as a lens for submicron neutral-atom lithography,” Phys. Rev. Lett. 69, 1636 (1992). Copyright 1992 by the American Physical Society.
  238. P. R. Hemmer, M. S. Shahriar, M. Prentiss, D. P. Katz, K. K. Berggren, J. Mervis, and N. P. Bigelow, “First observation of forces on three-level atoms in Raman resonant standing-wave optical fields,” Phys. Rev. Lett. 68, 3148 (1992). Copyright 1992 by the American Physical Society.

Patents, Issued and Pending

  1. App. No: US 17/471,758 “Integrated Optical Field Sampling Platform” Inventor(s): Marco Turchetti, Mina Bionta, Felix Ritzkowsky, Yujia Yang, Dario Cattozzo Mor, Franz X. Kaertner, Karl K. Berggren, and Phillip Donald Keathley. Filing Date: September 10, 2021.
  2. Pat. No: US11024790B2 “Single-photon single-flux coupled detectors” Inventor(s): Murat Onen, Marco Turchetti, Karl K. Berggren, Brenden Butters, Mina Bionta, Phillip Donald Keathley. Filing Date: June 1, 2021.
  3. App. No: 16/808,904 “Impedance Matched Superconducting Nanowire Photodetector for Single- and Multi-Photon Detection” Inventor(s): Di Zhu, Marco Colangelo, Boris Korzh, Matthew Shaw, and Karl K. Berggren. Filing Date: April 3, 2020.
  4. Pat. No. US10665634 “Distributed nanowire sensor for single photon imaging” Inventor(s): Qingyuan Zhao, Karl K. Berggren. Issue Date: May 26, 2020.
  5. App. No: 16/266,507 “Superconducting nanowire-based programmable processor” Inventor(s): Karl K. Berggren, Oguzhan Murat Onen, Brenden Butters, Emily Toomey. Filing Date: February 4, 2019.
  6. Pat. No. US10505334 “Apparatus and methods for generating and enhancing Smith-Purcell radiation” Inventor(s): Yang Yi et al. Issue Date: December 10, 2019.
  7. Pat. No. US10749097 “Current crowding in three-terminal superconducting devices and related methods.” Inventors: McCaughan, Adam N., Karl K. Berggren, and Qingyuan Zhao. Issue Date: December 10, 2019.
  8. App. No. 15/907,793 “Systems and methods for hybrid superconducting medium” Inventor(s): Yachin Ivry, Jonathan J. Surick, Karl Kimon Berggren. Filing Date: February 28, 2018.
  9. Pat. No. 9509315 A1: US “Superconducting three-terminal device and logic gates” (International Patent Application No.:  PCT/US2014/023664 ). Inventor(s): A. N. McCaughan, K. K. Berggren. Issue Date: November 29, 2016. (MIT Case No. 17799K)
  10. Pat. No. 8761848 “NANOWIRE-BASED DETECTOR,” Issue Date: June 24, 2014. Berggren, Karl K., Hu, Xiaolong, Masciarelli, Danielle [Copy of Patent]
  11. App. No.: 20130318483 “STANDARDIZED TOPOGRAPHICAL ARRANGEMENTS FOR TEMPLATE REGIONS THAT ORIENT SELF-ASSEMBLY,” Filing Date: May 22, 2013. Chang, Jae-byum, Choi, Hong Kyoon, Hannon, Adam F., Ross, Caroline A., Berggren, Karl K., [Online Listing]
  12. Pat. No. 9478429: US “REMOVABLE TEMPLATES FOR DIRECTED SELF ASSEMBLY,” Issue Date: October 25, 2016. Ghariehali, Amir Tavakkoli Kermani, Nicaise, Samuel Mospens, Berggren, Karl K., Gotrik, Kevin Willy, Ross, Caroline A., [Google Scholar Posting]
  13. U.S. Patent 9,076,907, “Compactly-integrated optical detectors and associated systems and methods.” Inventors: Englund, Dirk, Jacob Mower, Faraz Najafi, H. U. Xiaolong, and Karl K. Berggren. Issued July 7, 2015.
  14. Pat. No. 8625072 B2: US “Systems and Methods Related to Generating Electromagnetic Radiation Interference Patterns,” Issue Date July 7, 2014. Karl K. Berggren, Hasan Korre, Correy P. Fucetola, [publication]
  15. U.S. Patent 8,603,381 “Nanotemplate arbitrary-imprint lithography.” Inventors: Berggren, Karl K., Stefan Harrer, Giovanni A. Salvatore, and Joel K. Yang. Issued December 10, 2013.
  16. U.S. Patent 8,309,278 “Guided self-assembly of block copolymer line structures for integrated circuit interconnects.” Inventors: Yang, Joel KW, Karl K. Berggren, Yeon Sik Jung, and Caroline A. Ross. Issued November 13, 2012.
  17. Patent #7638751, “Multi-element optical detectors with sub-wavelength gaps,” Issued December 29, 2009. Erik A. Dauler, Vikas Anant, Karl K. Berggren, and Joel K.W. Yang
  18. Ion Bita, Edwin L. Thomas, Joel K.W. Yang, Yeon Sik Jung, Caroline A. Ross, and Karl K. Berggren, “Self-Assembly Technique Applicable to Large Areas and Nanofabrication,” U.S. Patent Application No., 12/239362, September 26, 2008.
  19. Patent # US 2010/0078854 A1, “Nanotemplate Aribrary Imprint Lithography,” Issued April 1, 2010. Karl K. Berggren, Stefan Harrer, Giovanni Salvatore, Joel Yang.
  20. Patent #5900160, “Methods of etching articles via microcontact printing,” Issued May 4, 1999. George M. Whitesides, Younan Xia, James L. Wilbur, Rebecca J. Jackman, Enoch Kim, Mara G. Prentiss, Milan Mrksich, Amit Kumar, Christopher B. Gorman, Hans Biebuyck, Karl K. Berggren
  21. Patent #6180239, “Microcontact printing on surfaces and derivative articles,” Issued January 30, 2001. George M. Whitesides, Younan Xia, James L. Wilbur, Rebecca J. Jackman, Enoch Kim, Mara G. Prentiss, Milan Mrksich, Amit Kumar, Christopher B. Gorman, Hans Biebuyck, Karl K. Berggren.

Group Theses

  1. “Superconducting Nanowire Technology for Microwave and Photonics Applications” Ph.D. Colangelo, Marco, June 2023.  pdf
  2. “Scaling of Nanocryotron Superconducting Logic” M.Eng. Reed, Foster, June 2023.  pdf
  3. “Efficient simulation of Large-Scale Superconducting Nanowire Circuits” M.Eng. El Dandachi, Tareq, February 2023. pdf
  4. “Geometrical Optimization of Planar Nano Vacuum Channel Transistors” M.S. Bechhofer, Adina, February 2023.  pdf
  5. “Superconducting Electronics for Breakthrough Starshot Communications” M.Eng. Sorenson, Andrew, June 2022. pdf
  6. “Investigation of Thin Film Supercurrent and Photodetection in Wide Niobium Nitride Wires” M.S. ‪Medeiros‬, Owen, June 2022.  pdf
  7. “Reduced Indium Tin Oxide as a Transparent Superconductor” M.S. Batson, Emma, June 2022.  pdf
  8. “Techniques for Reducing Beam-Induced Damage in Electron Microscopy” Ph.D. Abedzadeh, Navid, June 2022.  pdf
  9. “Nano Vacuum Channel Devices for Electronics and Ultrafast Nanophotonics” Ph.D. Turchetti, Marco, June 2022.  pdf
  10. “Digital and Microwave Superconducting Electronics and Experimental Apparatus” Ph.D. Butters, Brenden, February 2022.  pdf
  11. “High Voltage, Vacuum Integrated Electronics for Nanosecond Switched Charged Particle Optics” M.S. Simonaitis, John, February 2021.  pdf
  12. “Simulation Of Ultrafast Field-Emission Plasmonic Nanoantennas For Phz Processing Of Optical Waveforms” M.S. Cattozzo Mor, Dario, Politecnico di Torino, October 2020.  pdf
  13. “Design of Superconducting Nanowire-Based Neurons and Synapses for Power-Efficient Spiking Neural Networks” M.S. Castellani, Matteo, Politecnico di Torino, October 2020.  pdf
  14. “Techniques for Enhancing Electron Microscopy” Ph.D. Agarwal, Akshay, September 2020.  pdf
  15. “Superconducting nanowire electronics for alternative computing” Ph.D. Toomey, Emily, May 2020.  pdf
  16. “Microwave Engineering in Superconducting Nanowires for Single-Photon Detection” Ph.D. Zhu, Di, September 2019. pdf
  17. “Nanostructures for Vacuum Optoelectronic Engineering” Ph.D. Yang, Yujia, September 2019. pdf
  18. “Superconducting photodetectors, nanowires, and resonators” Ph.D. Dane, Andrew, June 2019. pdf
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