MIT
Quantum Nanostructures and
Nanofabrication Group

Prof. Karl K. Berggren

Publications

Link to Graduate Student Theses
Link to QNN Patents

In Review

  1. “Superconducting-superconducting hybridization for enhancing single-photon detection” Yachin Ivry, Jonathan J. Surick, Maya Barzilay, Chung-Soo Kim, Faraz Najafi, Estelle Kalfon-Cohen, Andrew D. Dane, Karl K. Berggren. https://arxiv.org/abs/1703.08034 (2017)
  2. “A scalable single-photon imager using a single superconducting nanowire” Qing-Yuan Zhao, Di Zhu, Niccolò Calandri, Andrew E. Dane, Adam N. McCaughan, Francesco Bellei, Hao-Zhu Wang, Daniel F. Santavicca,Karl K. Berggren, arXiv:1605.08693 (2016).

In Press

  1. Akshay Agarwal, Chung-Soo Kim, Richard Hobbs, Dirk van Dyck, Karl K. Berggren. “A nanofabricated, monolithic, path-separated electron interferometer.”  Scientific Reports. Available Online: May 10, 2017.
  2. Qing-Yuan Zhao, Adam N. McCaughan, Andrew E. Dane, Karl K. Berggren, Thomas Ortlepp. “A nanoCryotron comparator can connect single-flux quantum circuits to conventional electronics.” Superconducting Science and Technology. Available Online: March 8, 2016
  3. William P. Putnam, Richard G. Hobbs, Phillip D. Keathley, Karl K. Berggren, and Franz X. Kärtner. “Photoemission from plasmonic nanoparticles.” Nature Physics., Manuscript DOI: 10.1038/nphys3978.  Available Online: December 19, 2016
  4. Adam N. McCaughan, Nathaniel S. Abebe, Qing-Yuan Zhao, and Karl J. Berggren. “Using geometry to sense current.” Nano Lett., Article ASAP., Manuscript DOI: 10.1021/acs.nanolett.6b03593. Available Online: November 29, 2016
  5. R. G. Hobbs, V. R. Manfrinato, Y. Yang, S. A. Goodman, L. Zhang, Eric A. Stach, and Karl K. Berggren. “High-energy surface and volume plasmons in nanopatterned sub-10-nm aluminum nanostructures.” Nano Lett., Just Accepted Manuscript DOI: 10.1021/acs.nanolett.6b01012. Available Online: June 13, 2016
  6. Niccolò Calandri, Qing-Yuan Zhao, Di Zhu, Andrew Dane, and Karl K.Berggren. “Superconducting nanowire detector jitters limited by detector geometry.”  Appl. Phys. Lett.,  Manuscript DOI: 10.1063/1.4963158. Available Online: October 12, 2016
  7. Amirhasan Nourbakhsh, Ahmad Zubair, Redwan N. Sajjad, Amir Tavakkoli K. G., Wei Chen, Shiang Fang, Xi Ling, Jing Kong, Mildred S. Dresselhaus, Efthimios Kaxiras, Karl K. Berggren, Dimitri Antoniadis, and Tomás Palacios. “MoS2 Field-Effect Transistor with Sub-10 nm Channel Length.” Nano Lett., Article ASAP, Manuscript DOI: 10.1021/acs.nanolett.6b03999. Available Online: November 7, 2016

In Print

  1. Kärtner, F. X. et al. AXSIS: Exploring the frontiers in attosecond X-ray science, imaging and spectroscopy. Nucl. Instrum. Methods Phys. Res. Sect. Accel. Spectrometers Detect. Assoc. Equip. 829, 24–29 (2016)
    E. Schroeder, P. Mauskopf, G. Pilyavsky, A. Sinclair, N. Smith, S. Bryan, H. Mani, D. Morozov, K. Berggren, D. Zhu, K. Smirnov, Y. Vakhtomin.
    “On the measurement of intensity correlations from laboratory and astronomical sources with SPADs and SNSPDs.”  Proc. SPIE 9907, Optical and Infrared Interferometry and Imaging V, 99070P (August 4, 2016); doi:10.1117/12.2233536.
  2. D. F. Santavicca, J. K. Adams, L. E. Grant, A. N. McCaughan, & K. K. Berggren. “Microwave dynamics of high aspect ratio superconducting nanowires studied using self-resonance.” Journal of Applied Physics 119, 234302 (2016).
  3. A. N. McCaughan, Q. Zhao, K. K. Berggren. “nanoSQUID operation using kinetic rather than magnetic induction.” Scientific Reports 6, 28095 (2016). [Corrigendum]
  4. P. Kruit, R.G. Hobbs, C-S. Kim, Y. Yang, V.R. Manfrinato, J. Hammer, S. Thomas, P. Weber, B. Klopfer, C. Kohstall, T. Juffmann, M.A. Kasevich, P. Hommelhoff, K.K. Berggren. “Designs for a quantum electron microscope.” Ultramicroscopy, Available online 10 March 2016, ISSN 0304-3991, http://dx.doi.org/10.1016/j.ultramic.2016.03.004.
  5. F. Najafi, F. Marsili, V. B. Verma, Q. Zhao, M. D. Shaw, K. K. Berggren, and S. W. Nam, “Superconducting Nanowire Architectures for Single Photon Detection,” in Superconducting Devices in Quantum Optics, R. H. Hadfield and G. Johansson, Eds. Springer International Publishing, 2016, pp. 3–30.
  6. “Free space-coupled superconducting nanowire single photon detectors for infrared optical communications” Francesco Bellei, Alyssa P. Cartwright, Adam N. McCaughan, Andrew E. Dane, Faraz Najafi, Quinyuan Zhao, and Karl K. Berggren. ArXiv151105786 Phys. (2015). | Opt. Express24, 3248-3257 (2016)
  7. “The Orientations of Large Aspect-Ratio Coiled-Coil Proteins Attached to Gold Nanostructures”, Jae-Byum Chang, Yong Ho Kim, Evan Thompson, Young Hyun No, Nam Hyeong Kim, Jose Arrieta, Vitor R. Manfrinato, Amy E. Keating & Karl K. Berggren. Small (2016) DOI: 10.1002/smll.201502419

  8. “Multilayer block copolymer meshes by orthogonal self-assembly”, Amir Tavakkoli K. G., Samuel M. Nicaise, Karim R. Gadelrab, Alfredo Alexander-Katz, Caroline A. Ross & Karl K. Berggren, Nature Communications 7, 10518(2016). DOI: 10.1038/ncomms10518  | MIT News | Science News
  9. “Dimensional Tailoring of Hydrothermally Grown Zinc Oxide Nanowire Arrays” Jayce J. Cheng, Samuel M. Nicaise, Karl K. Berggren, and Silvija Gradečak, Nano Lett., 16 (1), pp 753–759 (2016)
  10. “Infrared Transmissometer to Measure the Thickness of NbN Thin Films” Kristen A. Sunter, Andrew E. Dane, Christopher I. Lang, Karl K. BerggrenApplied Optics 54(18), 5743-5749 (2015) |arXiv
  11. “High-Yield, Ultrafast, Plasmon-Enhanced Au Nanorod Optical Field Emitter Arrays” Richard G Hobbs , Yujia Yang, Arya FallahiPhillip D. Keathley, Eva De Leo, Franz X. KärtnerWilliam S. Graves, and Karl K. Berggren, ACS Nano8(11), pp 11474–11482, (2014) | video
  12. “Control of zinc oxide nanowire array properties with electron beam lithography templating for PV applications” S.M. Nicaise, J.J. Cheng, A. Kiani, S. Gradecak, K.K. Berggren, Nanotechnology 26(7), pp. 075303 (2014) | IOPselect | pdf | video
  13. “On-chip detection of non-classical light by scalable integration of single-photon detectors” Faraz Najafi, Jacob Mower, Nicholas C. Harris, Francesco Bellei, Andrew Dane, Catherine Lee, Xiaolong Hu, Prashanta Kharel, Francesco Marsili, Solomon Assefa, Karl K. Berggren, Dirk Englund, Nature Communications 6, 5873 (2015) | pdf | IEEE Spectrum Highlight
  14. “Fabrication process yielding saturated nanowire single-photon detectors with 24ps jitter” F. Najafi, A. Dane, F. Bellei, Q. Zhao, K. Sunter, A. McCaughan and K. K. Berggren, IEEE Journal on Selected Topics in Quantum Electronics 21(2), article number 3800507 (2015)
  15. “High-density Au nanorod optical field-emitter arrays” R G Hobbs, Y Yang, P D Keathley, M E Swanwick, L F Velásquez-Garcíia, F X Kärtner, W S Graves and K K Berggren, Nanotechnology25(46), pp. 465304 (2014) | pdf
  16. “A superconducting-nanowire 3-terminal electrothermal device” Adam McCaughan, and Karl K. Berggren, Nano Letters, 14(10), pp. 5748–5753 (2014) [arXiv]|video
  17. “Eight-fold signal amplification of a superconducting nanowire single-photon detector using a multiple-avalanche architecture” Qingyuan Zhao, Adam McCaughan, Andrew Dane, Faraz Najafi, Francesco Bellei, Domenico De Fazio, Kristen Sunter, Yachin Ivry, Karl K. Berggren, Optics Express, 22(20), pp. 24574-24581, (2014)pdf | video
  18. “Determining the resolution limits of electron-beam lithography: direct measurement of the point-spread function” Manfrinato, Vitor; Wen, Jianguo; Zhang, Lihua; Yang, Yujia; Hobbs, Richard; Baker, Bowen; Su, Dong; Zakharov, Dmitri; Zaluzec, Nestor; Miller, Dean; Stach, Eric; Berggren, Karl, Nano Letters, 14(8), pp. 4406-4412 (2014) | video
  19. “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” Hyung Wan Do, Jae-Byum Chang, and Karl K. Berggren Journal of Vacuum Science and Technology B 32, 06F501 (2014).*JVSTB[2014]  preprint | video
  20. “Universal scaling of the critical temperature for thin films near the superconducting-to-insulating transition” Yachin Ivry, Chung-Soo Kim, Andrew E. Dane, Domenico De Fazio, Adam McCaughan, Kristen A. Sunter, Qingyuan Zhao and Karl K. Berggren, Phys. Rev. B, 90,  pp. 214515 (2014)preprint | supp. info.
  21. “Design rules for self-assembled block copolymer patterns using tiled templates” Jae-Byum Chang, Hong Kyoon Choi, Adam F. Hannon, Alfredo Alexander-Katz, Caroline A. Ross & Karl K. Berggren, Nature Communications 5, 3305(2014) (preprint)
  22. “Three-Dimensional Nanofabrication by Block Copolymer Self-Assembly” Caroline A. Ross, Karl K. Berggren, Joy Y. Cheng, Yeon Sik Jung, and Jae-Byum Chang, Advanced Materials, 26, 4386-4396 (2014)
  23. “Superconducting-nanowire single-photon-detector linear array” Qingyuan Zhao, Adam McCaughan, Francesco Bellei, Faraz Najafi, Domenico De Fazio, Andrew Dane, Yachin Ivry, and Karl K. Berggren, Applied Physics Letters 103,142602 (2013) (pdf)
  24. “Improvement of infrared single-photon detectors absorptance by integrated plasmonic structures” Mária Csete, Áron Sipos, Anikó Szalai, Faraz Najafi, Gábor Szabo & Karl K. Berggren, Scientific Reports 3 : 2406 (2013)
  25. “Sacrificial-Post Templating Method for Block Copolymer Self-Assembly” Amir Tavakkoli K. G., Samuel M. Nicaise, Adam F. Hannon, Kevin W. Gotrik, Alfredo Alexander-Katz, Caroline A. Ross, Karl K. Berggren, small 10(3), 418 (2014) (inside front cover)
  26. “Resolution limits of electron-beam lithography towards the atomic scale” Vitor R. Manfrinato, Lihua Zhang, Dong Su, Huigao Duan, Richard Hobbs, Eric A. Stach, and Karl K. Berggren, Nano Letters 13(4), (2013) (Featured Video)
  27. “Controlled placement of colloidal quantum dots in sub-15-nm clusters” Vitor R. Manfrinato, Darcy D. Wanger, David B. Strasfeld, Hee-Sun Han, Francesco Marsili, Jose P. Arrieta, Tamar S. Mentzel, Moungi G. Bawendi, and Karl K. Berggren, Nanotechnology 24 125302 (2013) (preprint)
  28. “Bubble nucleation on nano- to micro-size cavities and posts: An experimental validation of classical theory” S. Witharana, B. Phillips, S. Strobel, H. D. Kim, T. McKrell, J.-B. Chang, J. Buongiorno, K. K. Berggren, L. Chen, and Y. Ding, Journal of Applied Physics 112 064904 (2012) (full text)
  29. “Efficient Single Photon Detection from 500 nm to 5 µm Wavelength” Francesco Marsili, Francesco Bellei, Faraz Najafi, Andrew E. Dane, Eric A. Dauler, Richard J. Molnar, and Karl K. Berggren Nano Letters 12(9) 4799-4804 (2012)
  30. “Rectangular Symmetry Morphologies in a Topographically Templated Block Copolymer” Amir Tavakkoli K. G., Adam F. Hannon, Kevin W. Gotrik, Alfredo Alexander-Katz, Caroline A. Ross, Karl K. Berggren Advanced Materials 24(31) 4249-4254 (2012) (Back Cover)
  31. “Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films” A. Tavakkoli K. G., K. W. Gotrik, A. F. Hannon, A. Alexander-Katz, C. A. Ross, K. K. Berggren, Science 336 1294-1298 (2012) (full text) (Nature Nanotechnology|Research Highlights) (Video on Templated Self-Assembly)
  32. “Single Photon Counting from Individual Nanocrystals in the Infrared” Raoul E. Correa, Eric A. Dauler, Gautham Nair, Si H. Pan, Danna Rosenberg, Andrew J. Kerman, Richard J. Molnar, Xiaolong Hu, Francesco Marsili, Vikas Anant, Karl K. Berggren, and Moungi G. Bawendi, Nano Letters 12(6) 2953 (2012)
  33. “Critical-current reduction in thin superconducting wires due to current crowding” H. L. Hortensius, E. F. C. Driessen, T. M. Klapwijk, K. K. Berggren, and J. R. Clem, Applied Physics Letters 100 182602 (2012) (full text)
  34. “Timing performance of 30-nm-wide superconducting nanowire avalanche photodetectors” F. Najafi, F. Marsili, E. Dauler, R. J. Molnar, K. K. Berggren, Applied Physics Letters 100 152602 (2012) (full text)
  35. “Aligned Sub-10-nm Block Copolymer Patterns Templated by Post Array” Jae-Byum Chang, Jeong Gon Son, Adam F. Hannon, Alfredo Alexander-Katz, Caroline A. Ross, and Karl K. Berggren, ACS Nano 6(3) 2071 (2012) (full text)
  36. “Afterpulsing and Instability in Superconducting Nanowire Avalanche Photodetectors” F. Marsili, F. Najafi, E. Dauler, R. J. Molnar, K. K. Berggren, Applied Physics Letters 100 112601 (2012) (full text)
  37. “Optical nano-antennae boost speed and efficiency of single-photon detectors” XIAOLONG HU and KARL K. BERGGREN, Laser Focus World 01/01/2012
  38. “Assembly of sub-10-nm block copolymer patterns with mixed morphology and period using electron irradiation and solvent annealing” Jeong Gon Son, Jae-Byum Chang, Karl K. Berggren, and Caroline A. Ross, Nano Letters 11(11), 5079 (2011)
  39. “Highly ordered square arrays from a templated ABC triblock terpolymer” Jeong Gon Son, Jessica Gwyther, Jae-Byum Chang, Karl K. Berggren, Ian Manner, and Caroline A. Ross, Nano Letters 11(7), 2849 (2011)
  40. “Numerical method to optimize the Polar-Azimuthal Orientation of Infrared Superconducting Nanowire Single-Photon Detectors” Csete, Mária; Sipos, Áron; Najafi, Faraz; Hu, Xiaolong; Berggren, Karl K, Applied Optics 50(31), 5949-5956 (2011) (full text).
  41. “Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si” J. C. van Oven, F. Berwald, K. K. Berggren, P. Kruit, and C. W. Hagen, Journal of Vacuum Science and Technology B 29, 06F305 (2011)*JVSTB[8] (full text).
  42. John R. Clem and Karl K. Berggren, “Geometry-dependent critical currents in superconducting nanocircuits,” Physical Review B 84, 174510 (2011). [full text]. Copyright 2011 by the American Physical Society.
  43. In situ study of hydrogen sisesquioxane dissolution rate in salty and electrochemical developers” Katherine J. Harry, Sebastian Strobel, Joel K. W. Yang, Huigao Duan, and Karl K. Berggren, Journal of Vacuum Science and Technology B 29, 06FJ01 (2011).*JVSTB[8] (full text).
  44. “Controlled Collapse of High-Aspect-Ratio Nanostructures,” Huigao Duan, Joel K. W. Yang, Karl K. Berggren, Small 7(18) 2661-2668 (2011). (full text)
  45. “Neon Ion Beam Lithography (NIBL),” Donald Winston , Vitor R Manfrinato , Samuel M Nicaise , Lin Lee Cheong , Huigao Duan , David Ferranti , Jeff Marshman , Shawn McVey , Lewis A Stern , John A Notte , and Karl Berggren, Nano Letters 11(10) 4343-4347(2011). (full text) (Nature Nanotechnology | Research Highlights) (Press Coverage).
  46. “Electrochemical development of hydrogen silsesquioxane by applying an electrical potential,” Sebastian Strobel, Katherine J Harry, Huigao Duan, Joel K W Yang, Vitor R Manfrinato and Karl K Berggren, Nanotechnology 22 375301(2011). (full text).
  47. “Modeling the point-spread function in helium-ion lithography,” D. Winston, J. Ferrera, L. Battistella, A. E. Vladár, K. K. Berggren, Scanning 24(2) 121-128 (2011). (full text).
  48. “Sub-5 keV Electron-Beam Lithography in Hydrogen Silsesquioxane Resist,” Vitor R. Manfrinato, Lin Lee Cheong, Huigao Duan, Donald Winston, Henry I. Smith, Karl K. Berggren, Journal of Microelectronic Engineering  88(2011) 3070-3074. (full text)
  49. “Single-Photon Detectors Based on Ultranarrow Superconducting Nanowires,” Francesco Marsili, Faraz Najafi, Eric Dauler, Francesco Bellei, Xiaolong Hu, Maria Csete, Richard J. Molnar, and Karl K. Berggren, Nano Letters  11(5) 2048 (2011). (full text)
  50. “Electrothermal simulation of superconducting nanowire avalanche photodetectors,” Francesco Marsili, Faraz Najafi, Charles Herder, Karl K. Berggren, Applied Physics Letters  98 093507 (2011). (full text).
  51. “Superconducting nanowire single-photon detectors integrated with optical nano-antennae,” Xiaolong Hu, Eric A. Dauler, Richard J. Molnar, and Karl K. Berggren, Optics Express  19(1) 17-31 (2011). (full text).
  52. “Development of a simple, compact, low-cost interference lithography system,” Hasan Korre, Corey P. Fucetola, Jeremy A. Johnson, and Karl K. Berggren, Journal of Vacuum Science and Technology B 28 C6Q20 (2010).*JVSTB[7] (full text). (Instructional YouTube Video)
  53. “Sub-10-nm Half-Pitch Electron-Beam Lithography by Using PMMA as a Negative Resist,” Huigao Duan, Donald Winston, Joel K. W. Yang, Bryan M. Cord, Vitor R. Manfrinato, and Karl K. Berggren, Journal of Vacuum Science and Technology B  28 C6C58-C6C62 (2010).*JVSTB[7] (full text).
  54. “Superconducting microfabricated ion traps,” Shannon X. Wang, Yufei Ge, Jaroslaw Labaziewicz, Eric Dauler, Karl K. Berggren and Isaac L. Chuang, Applied Physics Letters  97 244102 (2010). (full text)
  55. “The Scanning Electron Microscope As An Accelerator For The Undergraduate Advanced Physics Laboratory,” Randolph S. Peterson, Karl K. Berggren, and Mark Mondol, CAARI 2010: 21st International Conference on the Application of Accelerators in Research and Industry, Denton, TX; AIP. (full text)
  56. “Sub-10-nm Structures on Silicon by Thermal Dewetting of Platinum,” Sebastian Strobel, Christopher Kirkendall, Jae-Byum Chang, and Karl K. Berggren, Nanotechnology  21 (2010) 505301. (full text)
  57. “Metrology for electron-beam lithography and resist contrast at the sub-10nm scale,” Huigao Duan, Vitor R. Manfrinato, Joel K. W. Yang, Donald Winston, Bryan M. Cord, and Karl K. Berggren, Journal of Vacuum Science and Technology B  vol. 28, no. 6, pp. H11-H17, (2010).*JVSTB[1](full text)
  58. “Enhancing the potential of block copolymer lithography with polymer self-consistent field theory simulations,” R. A. Mickiewicz, J. K. W. Yang, A. F. Hannon, Y.-S. Jung, A. Alexander-Katz, K. K. Berggren, and C. A. Ross, Macromolecules  vol. 43, no. 19, pp. 8290-8295, (2010). (full text)
  59. “Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion,” Huigao Duan and Karl K. Berggren, Nano Letters 10 (9), 3710-3716 (2010) . (full text)
  60. “High-order temporal coherences of chaotic and laser light,” Martin J. Stevens, Burm Baek, Eric A. Dauler, Andrew J. Kerman, Richard J. Molnar, Scott A. Hamilton, Karl K. Berggren, Richard P. Mirin, and Sae Woo Nam , Optics Express 18, pp. 1430-1437 (2010) (full text).
  61. “High-quality fiber-optic polarization entanglement distribution at 1.3µm telecom wavelength,” Tian Zhong, Xiaolong Hu, Franco N. C. Wong, Karl K. Berggren, Tony D. Roberts, and Philip Battle, Optics Letters 35, pp. 1392-1394 (2010). (full text)
  62. “Complex self-assembled patterns using sparse commensurate templates with locally varying motifs,” Joel K. W. Yang, Yeon Sik Jung, Jae-Byum Chang, R. A. Mickiewicz, A. Alexander-Katz, C. A. Ross and Karl K. Berggren, Nature Nanotechnology 5, pp. 256-260 (2010). (News and Views concerning this paper.)
  63. “A Path to Ultranarrow Patterns Using Self-Assembled Lithography,” Yeon Sik Jung, J. B. Chang, Eric Verploegen, Karl K. Berggren and C. A. Ross, Nano Letters 10, pp. 1000-1005 (2010). (full text)
  64. “Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer,” Sung-Wook Nam, Michael J. Rooks, Joel K. W. Yang, Karl K. Berggren, Hyun-Mi Kim, Min-Hyun Lee, Ki-Bum Kima, Jae Hwan Sim and Do Yeung Yoon, Journal of Vacuum Science and Technology B 27, pp. 2635-2639 (2009).*JVSTB[1] (full text)
  65. “Low-cost Interference Lithography,” Corey P. Fucetola, Hasan Korre and Karl K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2958-2961 (2009).*JVSTB[1] (full text)
  66. “Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist,” D. Winston, B. M. Cord, B. Ming, D. C. Bell, W. F. DiNatale, L. A. Stern, A. E. Vladar, M. T. Postek, M. K. Mondol, J. K. W. Yang, and K. K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2702-2706 (2009).*JVSTB[1] (full text)
  67. “Understanding of Hydrogen Silsesquioxane Electron Resist for Sub-5-nm-Half-Pitch Lithography,” Joel K.W. Yang, Bryan Cord, Karl K. Berggren, Joseph Klingfus, Sung-Wook Nam, Ki-Bum Kim, and Michael J. Rooks, Journal of Vacuum Science and Technology B 27, pp. 2622-2627 (2009).*JVSTB[1] (full text)
  68. “Sub-15-nm nanoimprint molds and pattern transfer,” Debbie Morecroft, Joel K.W. Yang, Simon Schuster, Karl K. Berggren, Qiangfei Xia, Wei Wu, and R. Stanley Williams, Journal of Vacuum Science and Technology B 27, pp. 2837-2840 (2009).*JVSTB[1] (full text)
  69. “Limiting Factors in Sub-10-nm Scanning-Electron-Beam Lithography,” Bryan Cord, Joel Yang, Huigao Duan, David C. Joy, Joseph Klingfus, and Karl K. Berggren, Journal of Vacuum Science and Technology B 27, pp. 2616-2621 (2009).*JVSTB[1] (full text)
  70. “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Xiaolong Hu, Tian Zhong, James E. White, Eric A. Dauler, Faraz Najafi, Charles H. Herder, Franco N. C. Wong, and Karl K. Berggren, Optics Letters 34, pp. 3607-3609 (2009). (full text)
  71. Andrew J. Kerman, Joel K.W. Yang, Richard J. Molnar, Eric A. Dauler, and Karl K. Berggren, “Electrothermal feedback in superconducting nanowire single-photon detectors,” Physical Review B 79, 100509 (2009). (full text) Copyright 2009 by the American Physical Society.
  72. “Efficiently Coupling Light to Superconducting Nanowire Single-Photon Detectors,” Xiaolong Hu, Charles W. Holzwarth, Daniele Masciarelli, Eric A. Dauler, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity 19, pp. 336-340 (2009). (full text)
  73. “Suppressed Critical Current in Superconducting Nanowire Single-Photon Detectors With High Fill-Factors,” Joel K. W. Yang, Andrew J. Kerman, Eric A. Dauler, Bryan Cord, Vikas Anant, Richard J. Molnar, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity 19, pp. 318-322 (2009). (full text)
  74. “Photon-number-resolution with sub-30-ps timing using multi-element superconducting nanowire single photon detectors,” Eric A. Dauler, Andrew J. Kerman, Bryan S. Robinson, Joel K. W. Yang, Boris Voronov, Gregory Gol’tsman, Scott A. Hamilton, and Karl K. Berggren, Journal of Modern Optics 56, pp. 364-373 (2008). (full text).
  75. “Si-Containing Block Copolymers for Self-Assembled Nanolithography (invited),” C.A. Ross, Y.S. Jung, V.P.Chuang, F. Ilievski, J.K.W. Yang, I. Bita, E.L. Thomas, H.I. Smith, K.K. Berggren, J.G.Vansco, and J.Y. Cheng, Journal of Vacuum Science and Technology B 26, pp.2489-2494 (2008). (full text)*JVSTB[2]
  76. E.A. Dauler, M.J. Stevens, B. Baek, R. Molnar, S.A. Hamilton, R.P. Mirin, S.-W. Nam, and K.K. Berggren, “Measuring intensity correlations with a two-element superconducting nanowire single photon detector,” Physical Review A 78, 053826 (2008) (4 pages). (full text) Copyright 2008 by the American Physical Society.
  77. “Sub-10 nm Nanoimprint Lithography by Wafer Bowing,” Wei Wu, W.M. Tong, J. Bartman, Y. Chen, R. Walmsley, Z. Yu, Q. Xia, I. Park, C. Picciotto, J. Gao, S.-Y. Wang, D. Morecroft, J.K.W. Yang, K.K. Berggren, and R.S. Williams, Nano Letters 8, pp. 3865-3869 (2008). (full text)
  78. “Fabrication and Characterization of Suspended Uniaxial Tensile Strained-Si Nanowires for Gate-All-Around n-MOSFETs,P. Hashemi, M. Canonico, J.K.W. Yang, L. Gomez, K.K. Berggren, and J. L. Hoyt, ECS (Electrochemical Society) Transactions, Vol. 16, No. 10, pp. 57-68, October 2008. (full text)
  79. “Amplitude spectroscopy of a solid-state artificial atom,” David M. Berns, Mark S. Rudner, Sergio O. Valenzuela, Karl K. Berggren, William D. Oliver, Leonid S. Levitov, Terry P. Orlando, Nature 455, 51-57, (2008). (full text)
  80. “Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates,” Ion Bita, Joel K. W. Yang, Yeon Sik Jung, Caroline A. Ross, Edwin L. Thomas, and Karl K. Berggren, Science 321, 939 (2008). (full text)
  81. “Optical properties of superconducting nanowire single-photon detectors,” Vikas Anant, Andrew J. Kerman, Eric A. Dauler, Joel K.W. Yang, Kristine M. Rosfjord, and Karl K. Berggren,  Optics Express, 16, 10750 (2008). (full text)
  82. “Controlling the optical properties of transparent media by mixing active and passive resonances,” Vikas Anant, Ayman F. Abouraddy, and Karl K. Berggren, arXiv:0711.5021 (2008)
  83. “Pulse Calibration and non-adiabatic control of solid-state artificial atoms,” Jona Bylander, Mark S. Rudner, Andrey V. Shytov, Sergio O. Valenzuela, David M. Berns, Karl K. Berggren, leonid S. Levitov, and William D. Oliver, Physical Review B, 80, 220506(R) (2009).  (full text)
  84. “Atomic-force lithography with interferometric tip-to-substrate position metrology,” Euclid E. Moon, Jan Kupec, Mark K. Mondol, Henry I. Smith, and Karl K. Berggren, Journal of Vacuum Science and Technology B, 25, 2284 (2007). *JVSTB[3] (full text)
  85. “Optimal temperature for development of poly(methylmethacrylate),” Bryan Cord, Jodie Lutkenhaus, and Karl K. Berggren, Journal of Vacuum Science and Technology B, 25, 2013 (2007). JVSTB*[2] (full text)
  86. “Using high-contrast salty development of hydrogen silsesquioxane for sub-10-nm half-pitch lithography,” Joel K. W. Yang and Karl K. Berggren, Journal of Vacuum Science and Technology B 25, 2025 (2007). (full text)*JVSTB[3]
  87. “Pattern Generation by Using Multi-Step Room-Temperature Nanoimprint Lithography,” Stefan Harrer, Joel Yang, Giovanni Antonio Salvatore. Karl K. Berggren, Filip Ilievski, and Caroline A. Ross, IEEE Transactions on Nanotechnology, 6 639-644 (2007) . (abstract) (full text)
  88. “Multi-Element Superconducting Nanowire Single-Photon Detector,” Eric A. Dauler, Bryan S. Robinson, Andrew J. Kerman, Joel K. W. Yang, Kristine M. Rosfjord, Vikas Anant, Boris Voronov, Gregory Gol’tsman, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity, 17 279-284 (2007). (full text)
  89. “Modeling the Electrical and Thermal Response of Superconducting Nanowire Single-Photon Detectors,”Joel K. W. Yang, Andrew J. Kerman, Eric A. Dauler, Vikas Anant, Kristine M. Rosfjord, and Karl K. Berggren, IEEE Transactions on Applied Superconductivity, 17 581-585 (2007). (full text)
  90. Janice C. Lee, William D. Oliver, Karl K. Berggren, and Terry P. Orlando, “Nonlinear resonant behavior of a dispersive readout circuit for a superconducting flux qubit,” Physical Review B75, 144505 (2007). (abstract) (full text) Copyright 2007 by the American Physical Society.
  91. “Constriction-limited detection efficiency of superconducting nanowire single-photon detectors,” Andrew J. Kerman, Eric A. Dauler, Joel K. W. Yang, Kristine M. Rosfjord, Karl K. Berggren, G. Gol’tsman, and B. Voronov, Applied Physics Letters, 90 101110 (2007). (abstract) (full text).
  92. “Enhancing etch resistance of hydrogen silsesquioxane via postdevelop electron curing,” Joel K. W. Yang, Vikas Anant, and Karl K. Berggren, Journal of Vacuum Science and Technology B 24, 3157 (2006) .*JVSTB[4](full text)
  93. “Robust shadow-mask evaporation via lithographically controlled undercut,” B. Cord, C. Dames, K.K. Berggren, and J. Aumentado, Journal of Vacuum Science and Technology B 24, 3139 (2006).*JVSTB[4](full text)
  94. “Microwave-Induced Cooling of a Superconducting Qubit,” Sergio O. Valenzuela, William D. Oliver, David M. Berns, Karl K. Berggren, Leonid S. Levitov, and Terry P. Orlando, Science 314, 1589-92 (2006).
  95. Eric A. Dauler, Bryan S. Robinson, Andrew J. Kerman, Vikas Anant, Richard J. Barron, Karl K. Berggren, David O. Caplan, John J. Carney, Scott A. Hamilton, Kristine M. Rosfjord, Mark L. Stevens, Joel K. Yang, “1.25 Gbit/s photon-counting optical communications using a two-element superconducting nanowire single photon detector,” Proc. of SPIE Advanced Photon Counting Techniques, Wolfgang Becker; Ed., Vol. 6372, Oct (2006).(full text).
  96. “Nanowires detect individual infrared photons,” K.K. Berggren and A.J. Kerman, Laser Focus World, 42 87-89 (2006).(review article)
  97. D. M. Berns, W. D. Oliver, S. O. Valenzuela, A. V. Shytov, K. K. Berggren, L. S. Levitov, and T. P. Orlando, “Coherent Quasiclassical Dynamics of a Persistent Current Qubit,” Physical Review Letters 97, 150502 (2006). Copyright 2006 by the American Physical Society.
  98. “Superconducting Nanowire Photon-Counting Detectors for Optical Communications,” A.J. Kerman, E.A. Dauler, B.S. Robinson, R. Barron, D.O. Caplan, M.L. Stevens, J.J. Carney, S.A. Hamilton, W.E. Keicher, J.K.W. Yang, K. Rosfjord, V. Anant, and K.K. Berggren, Lincoln Laboratory Journal, 16, 217-224, (2006).(review article)
  99. “Kinetic-inductance-limited reset time of superconducting nanowire photon counters,” Andrew J. Kerman, Eric A. Dauler, William E. Keicher, Joel K. W. Yang, Karl K. Berggren, G. Gol’tsman, and B. Voronov, Applied Physics Letters, 88 111116 (2006). (abstract) (full text) (YouTube Video).
  100. “781-Mbit/s photon-counting optical communications using a superconducting nanowire detector,” Bryan S. Robinson, Andrew J. Kerman, Eric A. Dauler, Richard J. Barron, David O. Caplan, Mark L. Stevens, John J. Carney, and Scott A. Hamilton, Joel K. W. Yang, and Karl K. Berggren, Optics Letters , 31 444-446 (2006). (abstract) (full text).
  101. “Nanowire Single-Photon Detector with an Integrated Optical Cavity and Anti-Reflection Coating” K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. Voronov, G. N. Gol’tsman, K. K. Berggren, Optics Express, 14 527-34 (2006). (abstract) (full text).
  102. “Mach-Zehnder Interferometry in a Strongly Driven Superconducting Qubit,” William D. Oliver, Yang Yu, Janice C. Lee, Karl K. Berggren, Leonid S. Levitov, and Terry P. Orlando, Science, 310 1653-7 (2005) (abstract).
  103. “Multi-Photon, Multi-Level Dynamics in a Superconducting Persistent-Current Qubit,” Y. Yu, W. D. Oliver, J. C. Lee, K. K. Berggren, L. S. Levitov, T. P. Orlando, preprint available at cond-mat/0508587 (in review).
  104. “Pumped quantum systems: immersion fluids of the future?” Vikas Anant, Magnus Radmark, Ayman F. Abouraddy, Thomas C. Killian, and Karl K. Berggren, J. Vac. Sci. Tech. B, 23, 2662-2667, (2005) (pdf) (full text).
  105. “Fabrication Development for Nanowire GHz-Counting-Rate Single-Photon Detectors,” Joel K. W. Yang, Eric Dauler, Antonin Ferri, Aaron Pearlman, Aleksandr Verevkin, Gregory Gol’tsman, Boris Voronov, Roman Sobolewski, William E. Keicher, Karl K. Berggren, IEEE Trans. Appl. Supercond., 15, pp. 626-630, (2005) (full text).
  106. “Energy Relaxation Times in Nb Persistent Current Qubits,” Yang Yu, William D. Oliver, Janice C. Lee, Karl K. Berggren, and T. P .Orlando, IEEE Trans. Appl. Supercond., 15, pp. 845-848 (2005) (full text).
  107. “Resonant Readout of a Persistent Current Qubit,” Janice C. Lee, William D. Oliver, Terry P. Orlando, and Karl K. Berggren, IEEE Trans. on Appl. Supercond., 15, 841-844, (2005) (full text).
  108. Y. Yu, D. Nakada, J. C. Lee, B. Singh, D. S. Crankshaw, T. P. Orlando, K. K. Berggren, and W. D. Oliver, “Energy relaxation time between macroscopic quantum levels in a superconducting persistent-current qubit,” Phys. Rev. Lett., 92, 117904-1, (2004) (full text). Copyright 2004 by the American Physical Society.
  109. “Quantum Computing with Superconductors,” K. K. Berggren, Proc. of the IEEE, 92, 1630 (2004) (full text) (review article).
  110. D. S. Crankshaw, K. Segall, D. Nakada, T. P. Orlando, L. S. Levitov, S. Lloyd, S. O. Valenzuela, N. Markovic, M. Tinkham, and K. K. Berggren, “dc measurements of macroscopic quantum levels in a superconducting qubit structure with a time-ordered meter,” Phys. Rev. B, 69, 144518-1, (2004). “Copyright 2004 by the Americal Physical Society.”
  111. K. Segall, D. Crankshaw, D. Nakada, T. P. Orlando, L.S. Levitov, S. Lloyd, N. Markovic, S. O. Valenzuela, M. Tinkham, and K. K. Berggren, “Impact of time-ordered measurements of the two states in a niobium superconducting qubit structure,” Phys. Rev. B 67, 220506 (2003). Copyright 2003 by the American Physical Society.
  112. “Improved critical-current-density uniformity by using anodization,” D. Nakada, K. K. Berggren, E. Macedo, V. Liberman, and T. P. Orlando, IEEE Trans. Appl. Supercond. 13, 111 (2003). (full text)
  113. “Experimental characterization of the two current states in a Nb persistent-current qubit,” K. Segall, D. S. Crankshaw, D. Nakada, B. Singh, J. Lee, T. P. Orlando, K. K. Berggren, N. Markovic, S. Valenzuela, M. Tinkham, IEEE Trans. Appl. Supercond. 13, 1009 (2003). (full text)
  114. “Flux-based superconducting qubits for quantum computation,” T. P. Orlando, S. Lloyd, L. S. Levitov, K. K. Berggren, M. J .Feldman, M. F. Bocko, M. Tinkham, J. E. Mooij, C. J. P. Harmans, and C. H. van der Wal, Physica C 372, 194, (2001). (full text)
  115. “Room-temperature testing for high critical-current-density Josephson junctions,” M. J. O’Hara, and K. K. Berggren, IEEE Trans. Appl. Supercond. 10, 1669 (2000). (full text)
  116. “Measurement of the energy sensitivity of a superconductive comparator,” D. A. Feld, J. P. Sage, K. K. Berggren, and A. Siddiqui, IEEE Trans. Appl. Supercond. 9, 4361 (1999). (full text)
  117. “Low Tc superconductive circuits fabricated on 150-mm-diameter wafers using a doubly planarized Nb/AlOx/Nb process,” K. K. Berggren, E. M. Macedo, D. A. Feld, and J. P. Sage, IEEE Trans. Appl. Supercond. 9, 3271 (1999). (full text)
  118. “Evaluation of critical current density of Nb/Al/AlOx/Nb Josephson junctions using test structures at 300K,” K. K. Berggren, M. J. O’Hara, J. P. Sage, and A. H. Worsham, IEEE Trans. Appl. Supercond. 9, 3236 (1999). (full text)
  119. “Localization of metastable atom beams with optical standing waves: nanolithography at the Heisenberg limit,” K. S. Johnson, J. H. Thywissen, N. H. Dekker, K. K. Berggren, A. P. Chu, R. Younkin, M. Prentiss, Science 280, 1583 (1998).
  120. R. Younkin, K. K. Berggren, E. Cheung, K. S. Johnson, M. Prentiss, A. J. Black, G. M. Whitesides, D. C. Ralph, C. T. Black, M. Tinkham, “Demonstration of a nanolithographic system using a self-assembled monolayer resist for neutral atomic cesium,” Proc. of SPIE Vol. 2995, 109-120 (1997).
  121. Kent S. Johnson, Karl K. Berggren, Andrew J. Black, Charles T. Black, Arthur P. Chu, Nynke H. Dekker, D. C. Ralph, Joseph H. Thywissen, Rebecca J. Younkin, Mara Goff Prentiss, Michael Tinkham, George M. Whitesides, “Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold,” Proc. of SPIE Vol. 2995, 97-108 (1997).
  122. “Nanostructure fabrication in silicon using cesium to pattern a self-assembled monolayer,” R. Younkin, K. K. Berggren, K. S. Johnson, M. Prentiss, D. C. Ralph, and G. M. Whitesides, Appl. Phys. Lett. 71, 1261 (1997).
  123. “Demonstration of a nanolithographic system using a self-assembled monolayer resist for neutral atomic cesium,” K. K. Berggren, R. Younkin, E. Cheung, M. Prentiss, A. J. Black, G. M. Whitesides, D. C. Ralph, C. T. Black, and M. Tinkham, Advanced Materials 9, 5255 (1997).
  124. “Self-assembled monolayers exposed by metastable argon and metastable helium for neutral atom lithography and atomic beam imaging,” A. Bard, K. K. Berggren, J. L. Wilbur, J. D. Gillaspy, S. L. Rolston, J. J. McClelland, W. D. Phillips, M. Prentiss, and G. M. Whitesides, J. Vac. Sci. Technol. B 15, 1805 (1997).
  125. “Nanofabrication using neutral atomic beams,” J. H. Thywissen, K. S. Johnson, R. Younkin, N. H. Dekker, K. K. Berggren, A. P. Chu, M. Prentiss, S. A. Lee, J. Vac. Sci. Tech. B 15, 2093 (1997).
  126. “Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold,” K. S. Johnson, K. K. Berggren, A. Black, C. T. Black, A. P. Chu, N. H. Dekker, D. C. Ralph, J. H. Thywissen, R. Younkin, M. Prentiss, G. M. Whitesides, Appl. Phys. Lett. 69, 2773 (1996).
  127. “A virtual slit for atomic optics and nanolithography,” A. P. Chu, K. K. Berggren, K. S. Johnson, M. G. Prentiss, Quantum and Semiclassical Optics 8, 521 (1996).
  128. “Demonstration of a blazed grating beam splitter for two level atoms,” K. S. Johnson, A. P. Chu, K. K. Berggren, M. Prentiss, Opt. Comm. 126, 326 (1996).
  129. “Microlithography by using neutral metastable atoms and self-assembled monolayers,” K. K. Berggren, A. Bard, J. L. Wilbur, A. G. Helg, J. D. Gillaspy, J. J. McClelland, S. L. Rolston, W. D. Phillips, M. Prentiss, G. M. Whitesides, Science 269, 1255 (1995).
  130. “Demonstration of a non-magnetic blazed grating atomic beam splitter,” K. S. Johnson, A. Chu, T. W. Lynn, K. K. Berggren, M. S. Shahriar, M. Prentiss, Opt. Lett. 20, 1310 (1995).
  131. “Calculation of atomic positions in nanometer-scale direct write optical lithography with an optical standing wave,” K. K. Berggren, M. Prentiss, G. L. Timp, R. E. Behringer, J. Opt. Soc. Am. B 11, 1166 (1994).
  132. G. L. Timp, R. E. Behringer, D. M. Tennant, J. E. Cunningham, M. Prentiss, and K. K. Berggren, “Using light as a lens for submicron neutral-atom lithography,” Phys. Rev. Lett. 69, 1636 (1992). Copyright 1992 by the American Physical Society.
  133. P. R. Hemmer, M. S. Shahriar, M. Prentiss, D. P. Katz, K. K. Berggren, J. Mervis, and N. P. Bigelow, “First observation of forces on three-level atoms in Raman resonant standing-wave optical fields,” Phys. Rev. Lett. 68, 3148 (1992). Copyright 1992 by the American Physical Society.

Patents, Issued and Pending

  1. Pat. No. 9509315 A1: US, “Superconducting three-terminal device and logic gates” (International Patent Application No.:  PCT/US2014/023664 ). Inventor(s): A. N. McCaughan, K. K. Berggren. Issue Date: November 29, 2016. (MIT Case No. 17799K)
  2. Pat. No.: 8761848, “NANOWIRE-BASED DETECTOR,” Issue Date: June 24, 2014. Berggren, Karl K., Hu, Xiaolong, Masciarelli, Danielle [Copy of Patent]
  3. App. No.: 20130318483, “STANDARDIZED TOPOGRAPHICAL ARRANGEMENTS FOR TEMPLATE REGIONS THAT ORIENT SELF-ASSEMBLY,” Filing Date: May 22, 2013. Chang, Jae-byum, Choi, Hong Kyoon, Hannon, Adam F., Ross, Caroline A., Berggren, Karl K., [Online Listing]
  4. Pat. No. 9478429: US, “REMOVABLE TEMPLATES FOR DIRECTED SELF ASSEMBLY,” Issue Date: October 25, 2016. Ghariehali, Amir Tavakkoli Kermani, Nicaise, Samuel Mospens, Berggren, Karl K., Gotrik, Kevin Willy, Ross, Caroline A., [Google Scholar Posting]
  5. Pat. No. 8625072 B2: US, “Systems and Methods Related to Generating Electromagnetic Radiation Interference Patterns,” Issue Date July 7, 2014. Karl K. Berggren, Hasan Korre, Correy P. Fucetola, [publication]
  6. Patent #7638751, “Multi-element optical detectors with sub-wavelength gaps,” Issued December 29, 2009. Erik A. Dauler, Vikas Anant, Karl K. Berggren, and Joel K.W. Yang
  7. Ion Bita, Edwin L. Thomas, Joel K.W. Yang, Yeon Sik Jung, Caroline A. Ross, and Karl K. Berggren, “Self-Assembly Technique Applicable to Large Areas and Nanofabrication,” U.S. Patent Application No., 12/239362, September 26, 2008.
  8. Patent # US 2010/0078854 A1, “Nanotemplate Aribrary Imprint Lithography,” Issued April 1, 2010. Karl K. Berggren, Stefan Harrer, Giovanni Salvatore, Joel Yang.
  9. Patent #5900160, “Methods of etching articles via microcontact printing,” Issued May 4, 1999. George M. Whitesides, Younan Xia, James L. Wilbur, Rebecca J. Jackman, Enoch Kim, Mara G. Prentiss, Milan Mrksich, Amit Kumar, Christopher B. Gorman, Hans Biebuyck, Karl K. Berggren
  10. Patent #6180239, “Microcontact printing on surfaces and derivative articles,” Issued January 30, 2001. George M. Whitesides, Younan Xia, James L. Wilbur, Rebecca J. Jackman, Enoch Kim, Mara G. Prentiss, Milan Mrksich, Amit Kumar, Christopher B. Gorman, Hans Biebuyck, Karl K. Berggren.

Group Theses

  1. “Superconducting Nanowire Single Photon Detectors for Infrared Communications,” Ph.D Bellei, Francesco, February 2017. pdf
  2. “Superconducting thin film nanoelectronics,” Ph.D McCaughan, Adam, September 2015. pdf
  3. “Electron-beam lithography towards the atomic scale and applications to nano-optics,” Ph.D Manfrinato, Vitor, August 2015. pdf
  4. “Superconducting Nanowire Single-Photon Detectors: New Detector Architectures and Integration with Photonic Chips,” Ph.D Najafi, Faraz, June 2015. pdf
  5. “Study of ultranarrow superconducting NbN nanowires and nanowires under strong magnetic field for photon detection,” S.B. Herder, Charles, June 2009. pdf
  6. “Engineering the optical properties of subwavelength devices and materials,” Ph.D Anant, Vikas, September 2007. pdf
  7. “Methods of sub-10-nm lithography,” Ph.D Cord, Bryan, May 2009. pdf
  8. “Multi-element superconducting nanowire single-photon detectors,” Ph.D Dauler, Eric, January 2009. pdf
  9. “Efficient Superconducting-Nanowire Single-Photon Detectors and Their Applications in Quantum Optics,” Ph.D Hu, Xiaolong, February 2011. pdf
  10. “Sub-10-nm Lithography With Light-Ion Beams,” Ph.D Winston, Donald, January 2012. pdf
  11. “Advancements in superconducting nanowire single photon detectors and development of fabrication methods for sub-10-nm lithography,” Ph.D Yang, Joel, April 2009. pdf
  12. “Resolution improvements on poly(methyl methacrylate) as electron-beam lithography resist,” M.S Arrieta, Jose, 2012.
  13. “Directed Self-Assembly of Colloidal Nanoparticles by Sub-10-nm Templates,” M.S. Battistella, Lorenzo [EPFL, INP Grenoble, and Politecnico di Torino], September 2009.
  14. “Rapid Fabrication of Deep-Submicron Josephson Junctions,” M.S. Cord, Bryan (co-supervised with Prof. Terry Orlando), June 2004. pdf
  15. “Optimization of Thin Film Growth for SNSPDs,” M.S. De Fazio [Politecnico di Torino], Domenico, September 2012.
  16. “Coupling Light to Superconductive Photon Counters,” M.S. Hu, Xiaolong, April 2008. pdf
  17. “On The Development Of A Low-Cost Lithographic Interferometer,” M.S. Korre, Hasan, September 2010. pdf
  18. “System Aspects of a Scalable Tip-based Tool for Controlled Nanomanufacturing” M.S. Kupec, Jan [Technical University of Munich – Munich, Germany], December 2007.
  19. “Templated Self-Assembly of sub-10 nm Quantum Dots,” M.S. Leu, Joshua (co-supervised with Prof. Vladimir Bulovic), May 2008. pdf
  20. “Sub-10-nm Electron-Beam Lithography For Templated Placement Of Colloidal Quantum Dots,” M.S. Manfrinato, Vitor R., August 2011. pdf
  21. “Nanophotonic Devices for Enhancement of Photodetection,” M.S. Masciarelli, Daniele [EPFL, INP Grenoble, and Politecnico di Torino], September 2006.
  22. “Chemical and Physical Methods of the Templated Direction of Block Copolymers,” M.S. Nicaise, Sam, October 2012. pdf
  23. “Improving Resolution in Photolithography by: 1. Refractive-Index Enhancement in Atomic Immersion Vapor; 2. Quantum State Quenching of Photoresist Molecules,” M.S. Rådmark, Magnus [Royal Institute of Technology, Stockholm, Sweden], June 2005.
  24. “Circuit-based Architectures for Evolvable Hardware,” M.S. Sanchez, Delano, June 2006. pdf
  25. “Nodal Photolithography: Lithography via Far-Field Optical Nodes in the Resist,” M.S. Winston, Donald, January 2008. pdf
  26. “Fabrication of Superconducting Nanowire Single-Photon Detectors,” M.S. Yang, Joel K., July 2005. pdf
  27. “Development of Optical Field Emitter Arrays,” M.S. Yang, Yujia, September 2013. pdf
  28. “Designing and Implementing a Readout Strategy for Superconducting Single Photon Detectors,” M.Eng. Herder, Charles, February 2010. pdf
  29. “High-Q Superconducting Coplanar Waveguide Resonators for Integration into Molecule Ion Traps,” M.Eng. McCaughan, Adam, May 2010. pdf
  30. “Design of Superconducting Transmission Line Integrated Surface-Electrode Ion-Traps,” M.Eng. Meyer, David, June 2011. pdf
  31. “Drift Correction for Scanning-Electron Microscopy,” M.Eng. Snella, Michael, September 2010. pdf
  32. “Modeling Superconductors using Surface Impedance Techniques,” S.B. Aude, Diana, May 2010. pdf
  33. “Salty Development of an Optical Photoresist,” S.B. Chao, Adam, May 2008. pdf
  34. “Analysis of Superconducting Nanowire Single-Photon Detector Efficiency with Magnetic-Field Biasing,” S.B. Herder, Charles, June 2009.
  35. “Characterization of the Superconducting Transition in Disordered NbN Films,” S.B. Schonenberg, Lars, June 2012.

Disclaimer

*JVSTB
Copyright [1](2009) [2](2008) [3](2007) [4](2006) [5](2005) [6](1997) [7](2010) [8](2011) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society.