MIT
Quantum Nanostructures and
Nanofabrication Group

Prof. Karl K. Berggren

Topic: Electron-beam Lithography

2.3.2015
New paper: “Control of zinc oxide nanowire array properties with electron-beam lithography templating for photovoltaic applications” accepted to Nanotechnology
[abstract] We found that electron-beam lithography, a top-down approach, is a suitable prototyping method for templating and controlling hydrothermally-grown ZnO nanowires (NWs). By varying the deposition method of the ZnO seed... Read more >>
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11.11.2014
New paper: “High-Yield, Ultrafast, Plasmon-Enhanced Au Nanorod Optical Field Emitter Arrays” accepted to ACS Nano
[abstract] [video] Here we demonstrate the design, fabrication and characterization of ultrafast, surface-plasmon enhanced Au nanorod optical field emitter arrays. We present a quantitative study of electron emission from Au... Read more >>
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9.29.2014
Recent Paper Editor’s Pick JVST B
Congrats to Hyung Wan Do on his recent paper being chosen as an editor's pick in JVST B.   Editor's Pick
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8.25.2014
New paper: “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” accepted to JVSTB
We developed two processes for fabricating three-dimensional nanostructures using a hydrogen silsesquioxane and poly(methylmethacrylate) bilayer resist stack. We demonstrated self-aligned mushroom-shaped posts and freestanding supported structures that were fabricated in... Read more >>
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