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Professor of Electrical Engineering
Department of Electrical Engineering and Computer Science
Room 36-225
77 Massachusetts Avenue
Cambridge, MA 02139
hismith@nano.mit.edu
617.253.6865—Tel
617.253.8509—Fax
NanoStructures Laboratory
Group Background | Group Website
Biographical Background
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Current Progress Report Chapter
2007 | No. 149
Nanostructures Technology, Research and Applications
>> more Progress Report Chapters
News
04.09.2009
It's a fine line: New method could lead to narrower chip patterns
>> more News
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Keywords
nanostructures, nanofabrication,
nanomagnetics, microphotonic devices, lithography,
nanolithography, scanning-electron-beam
lithography, photonic bandgap structures
Administrative Assistant
Alicia J. Akins
aakins@mit.edu
617.324.3139—Tel
617.258.7864—Fax
Room 36-231
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