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ABOUT THE GROUP
The RLE Micromechanics Group investigates biological micromechanics, micro-electro-mechanical systems (MEMS), and light microscopy and computer microvision. The group has developed a new optical paradigm for semiconductor critical dimension (CD) metrology, which the group has named
Synthetic Aperture Metrology (SAM). SAM combines the speed of optical methods
with the microscope imaging capability of CD scanning electron microscopy (CD-SEM). Its
accuracy derives from the interference of multiple coherent laser beams. Its imaging property
means that it can be used to determine CDs of arbitrary structures-not just specially-designed,
periodic, metrology pads, but also CDs of designed parts such as gate widths. Since it does not
require moving parts or a vacuum, SAM can be fast relative to other CD metrology tools. In addition, the group continues to work on topics related to signal transmission in the auditory system, particularly middle-ear functions in human and animal hearing.
CURRENT PROGRESS REPORT CHAPTERS
2007 | No. 149
Cochlear Mechanics
2006 | No. 148
Cochlear Mechanics
>> more Progress Report Chapters
CURRENT GROUP NEWS
05.16.2008
Roozbeh Ghaffari and teammates named winners of the 2008 MIT 100K Entrepreneurship Competition
>> more News
OTHER MEDIA
05.23.2003
Transforming Healthcare
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