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Professor of Electrical Engineering
Department of Electrical Engineering and Computer Science
Room 36-225
77 Massachusetts Avenue
Cambridge, MA 02139
hismith@mit.edu
617.253.6865—Tel
617.253.8509—Fax
NanoStructures Laboratory
Group Background | Group Website
Biographical Background
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Current Progress Report Chapter
2010 | No. 152
Nanostructures Technology, Research and Applications
>> more Progress Report Chapters
News
06.30.2011
The future of chip manufacturing
>> more News
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Keywords
nanostructures, nanofabrication,
nanomagnetics, microphotonic devices, lithography,
nanolithography, scanning-electron-beam
lithography, photonic bandgap structures
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