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The future of chip manufacturing

newsbrief_2011_06_30_berggren

MIT researchers show how to make e-beam lithography, commonly used to prototype computer chips, more practical as a mass-production technique.<<more>>

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The future of chip manufacturing

Professor Karl K. Berggren

Professor Henry I. Smith

RLE Quantum Nanostructures and Nanofabrication Group

RLE NanoStructures Laboratory