by RLE at MIT | Jan 1, 2004 | RLE News Articles
New facility to be a resource for MIT researchers in nanoscience and device fabrication For Immediate Release MONDAY, 1 January 2004 Contact: William Smith, Assistant Director for Finance and Sponsor Relations Phone: +1.617.253.5621 Email:...
by RLE at MIT | Jan 1, 2004 | RLE News Articles
The Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) announces the establishment of a new MIT Scanning-Electron-Beam Lithography (SEBL) Facility. The SEBL Facility enables the writing of patterns of arbitrary geometries with...