Prof. Karl K. Berggren and Dr. P. Donald Keathley
The frontier of information processing lies in nanoscience and nanotechnology research. At the nanoscale, materials and structures can be engineered to exhibit interesting new properties, some based on quantum mechanical effects. Our research focuses on developing nanofabrication technology at the few-nanometer length-scale. We use these technologies to push the envelope of what is possible with photonic and electrical devices, focusing in particular on superconductive and free-electron devices. Our research combines electrical engineering, physics, and materials science and helps extend the limits of nanoscale engineering.
LATEST EVENTS IN OUR GROUP
Nanofabrication, and nanolithography in particular, are the cornerstone of the modern microelectronics industry, and are integral to the future of nanotechnology as a whole. We are investigating fundamental challenges associated... Read more >>
Tags: Nanofabrication, Research
New paper: “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” accepted to JVSTB
We developed two processes for fabricating three-dimensional nanostructures using a hydrogen silsesquioxane and poly(methylmethacrylate) bilayer resist stack. We demonstrated self-aligned mushroom-shaped posts and freestanding supported structures that were fabricated in... Read more >>
Tags: 3D Nanostructures, Electron-beam Lithography, HSQ, Nanofabrication, PMMA, Resists