The frontier of information processing lies in nanoscience and nanotechnology research. At the nanoscale, materials and structures can be engineered to exhibit interesting new properties, some based on quantum mechanical effects. Our research focuses on developing nanofabrication technology at the few-nanometer length-scale. We use these technologies to push the envelope of what is possible with photonic and electrical devices, focusing in particular on superconductive and free-electron devices. Our research combines electrical engineering, physics, and materials science and helps extend the limits of nanoscale engineering.