by RLE at MIT | Dec 9, 2016 | RLE Recent Papers
Simon Gustavsson, Fei Yan, Gianluigi Catelani, Jonas Bylander, Archana Kamal, Jeffrey Birenbaum, David Hover, Danna Rosenberg, Gabriel Samach, Adam P. Sears, Steven J. Weber, Jonilyn L. Yoder, John Clarke, Andrew J. Kerman, Fumiki Yoshihara, Yasunobu Nakamura, Terry...
by RLE at MIT | Dec 2, 2016 | RLE News Articles
Henry I. Smith, professor emeritus of electrical engineering, has been awarded the 2017 IEEE Robert Noyce Medal in recognition of his “contributions to lithography and nanopatterning through experimental advances in short-wavelength exposure systems and attenuated...