Nanofabrication, and nanolithography in particular, are the cornerstones of the modern microelectronics industry, and are integral to the future of nanotechnology as a whole. We are investigating fundamental challenges associated with continued scaling of electronic and nano-photonic device components, and are exploring the resolution limits of charged-particle lithography, including electron-beam and ion-beam lithography. The group also actively investigates the use of nanostructure arrays fabricated by nanolithography, as templates for: self-assembly of block copolymers, placement control of biomolecules or quantum dots and as sources for the production of coherent electron pulses. Continued scaling of devices toward molecular dimensions continues to unearth fascinating physical phenomena, which are of fundamental scientific interest as well as being critical to the development of future applications.

In addition, we are developing the ultimate light detection technologies characterized by high-sensitivity, broad spectral range, fast reset time and high-timing certainty. Resolving the information hidden in a light signal is essential for a broad range of applications, such as communication, quantum computation, microscopy and spectroscopy, as well as for optical, and thermal imaging systems.We initiate, design, model, fabricate, characterize and utilize single photon detectors that are based on superconducting nanowires (SNSPDs). We are doing so by integrating cutting-edge nano-fabrication capabilities with nano-optics and thermoelectric approaches, and we employ low-temperature, ultra-fast and high-sensitivity optical and electrical characterization methods and tools.


Ultrafast Optically Stimulated Electron Emitter Arrays
Nanometer Length-Scale Templated Self-Assembly of Proteins
Charged-particle beam lithography towards the atomic scale
Templated Self-Assembly of Block Copolymers in Single and Bilayer Block Copolymer Films
Nano fabrication for highest sensitivity and timing resolution
Nanowire single photon array
Free-space coupling for real applications
Nano optics for enhanced performances

The group is led by Professor Karl K. Berggren

Visit the group’s website